Metrology Department
 

Front End Alignment



Scheduled Milestones
(Rev. 11.35)
Expected Start Date
September 5, 2003
Expected End Date
October 17, 2003

Overview

START DATE
END DATE
DETAILS
Activity ID
Sep 19, 2003 Sep 22, 2003 Align BL3 Front End VS0320
Sep 19, 2003 Sep 22, 2003 Align BL4 Front End VS0345
Sep 23, 2003 Sep 23, 2003 Align BL11 Front End VS0370
Sep 5, 2003 Sep 8, 2003 Align BL6 Front End VS0395
Sep 22, 2003 Sep 23, 2003 Align BL5 Front End VS0420
Oct 3, 2003 Oct 3, 2003 Align BL1 Front End VS0445
Oct 16, 2003 Oct 17, 2003 Align BL2 Front End VS0470
Oct 16, 2003 Oct 17, 2003 Align BL7 Front End VS0495
Sep 9, 2003 Sep 10, 2003 Align BL8 Front End VS0520
Oct 1, 2003 Oct 2, 2003 Align BL9 Front End VS0545
Oct 2, 2003 Oct 3, 2003 Align BL10 Front End VS0670


= task completed


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Last update: April 13, 2007