Pointed magnet started at: 12-10-2018 08:37:26 ***************************************************************** 08:37:28 Move node 0: Move Device = UMAC, Read Device = UMAC ***************************************************************** 08:37:28 Move node 1: Move Device = UMAC, Read Device = UMAC ***************************************************************** 08:37:28 Move node 2: Move Device = UMAC, Read Device = UMAC ***************************************************************** Device:HP3458 , integration time = 1.200000 , number of channels = 1, number of samples = 37888, range = 5.000000 *------------------------------------------------------------------------------* Device:NONE , integration time = 1.200000 , number of channels = 1, number of samples = 0, range = 5.000000 *------------------------------------------------------------------------------* Device:NONE , integration time = 1.200000 , number of channels = 1, number of samples = 0, range = 5.000000 *------------------------------------------------------------------------------* 08:49:05 Move:node 0 absolute position = 0.516195 m 08:49:05 Stage Position Measurement, pos = 0.000000 m 08:49:05 Stage Position Measurement, pos = 0.000000 m 08:49:05 Stage Position Measurement, pos = 0.516195 m 08:49:14 Move:node 1 absolute position = -0.033370 m 08:49:14 Stage Position Measurement, pos = 0.000000 m 08:49:14 Stage Position Measurement, pos = -0.033370 m 08:49:14 Stage Position Measurement, pos = 0.516195 m 08:49:16 Move:node 2 absolute position = 0.000911 m 08:49:16 Stage Position Measurement, pos = 0.000911 m 08:49:16 Stage Position Measurement, pos = -0.033370 m 08:49:16 Stage Position Measurement, pos = 0.516195 m 09:07:16 Stage Position Measurement, pos = 0.000911 m 09:07:16 Stage Position Measurement, pos = -0.033370 m 09:07:16 Stage Position Measurement, pos = 0.516195 m 09:07:18 Move:node 2 absolute position = 0.000111 m 09:07:18 Stage Position Measurement, pos = 0.000111 m 09:07:18 Stage Position Measurement, pos = -0.033370 m 09:07:18 Stage Position Measurement, pos = 0.516195 m 09:07:20 Move:node 0 absolute position = 0.515195 m 09:07:20 Stage Position Measurement, pos = 0.000111 m 09:07:20 Stage Position Measurement, pos = -0.033370 m 09:07:20 Stage Position Measurement, pos = 0.515195 m 09:07:23 Move:node 0 absolute position = 0.515295 m 09:07:23 Stage Position Measurement, pos = 0.000111 m 09:07:23 Stage Position Measurement, pos = -0.033370 m 09:07:23 Stage Position Measurement, pos = 0.515295 m 09:07:27 Move:node 0 absolute position = 0.515395 m 09:07:27 Stage Position Measurement, pos = 0.000111 m 09:07:27 Stage Position Measurement, pos = -0.033370 m 09:07:27 Stage Position Measurement, pos = 0.515395 m 09:07:30 Move:node 0 absolute position = 0.515495 m 09:07:30 Stage Position Measurement, pos = 0.000111 m 09:07:30 Stage Position Measurement, pos = -0.033370 m 09:07:30 Stage Position Measurement, pos = 0.515495 m 09:07:33 Move:node 0 absolute position = 0.515595 m 09:07:33 Stage Position Measurement, pos = 0.000111 m 09:07:33 Stage Position Measurement, pos = -0.033370 m 09:07:33 Stage Position Measurement, pos = 0.515595 m 09:07:37 Move:node 0 absolute position = 0.515695 m 09:07:37 Stage Position Measurement, pos = 0.000111 m 09:07:37 Stage Position Measurement, pos = -0.033370 m 09:07:37 Stage Position Measurement, pos = 0.515695 m 09:07:40 Move:node 0 absolute position = 0.515795 m 09:07:40 Stage Position Measurement, pos = 0.000111 m 09:07:40 Stage Position Measurement, pos = -0.033370 m 09:07:40 Stage Position Measurement, pos = 0.515795 m 09:07:44 Move:node 0 absolute position = 0.515895 m 09:07:44 Stage Position Measurement, pos = 0.000111 m 09:07:44 Stage Position Measurement, pos = -0.033370 m 09:07:44 Stage Position Measurement, pos = 0.515895 m 09:07:47 Move:node 0 absolute position = 0.515995 m 09:07:47 Stage Position Measurement, pos = 0.000111 m 09:07:47 Stage Position Measurement, pos = -0.033370 m 09:07:47 Stage Position Measurement, pos = 0.515995 m 09:07:50 Move:node 0 absolute position = 0.516095 m 09:07:50 Stage Position Measurement, pos = 0.000111 m 09:07:50 Stage Position Measurement, pos = -0.033370 m 09:07:50 Stage Position Measurement, pos = 0.516095 m 09:07:54 Move:node 0 absolute position = 0.516195 m 09:07:54 Stage Position Measurement, pos = 0.000111 m 09:07:54 Stage Position Measurement, pos = -0.033370 m 09:07:54 Stage Position Measurement, pos = 0.516195 m 09:07:57 Move:node 0 absolute position = 0.516295 m 09:07:57 Stage Position Measurement, pos = 0.000111 m 09:07:57 Stage Position Measurement, pos = -0.033370 m 09:07:57 Stage Position Measurement, pos = 0.516295 m 09:08:01 Move:node 0 absolute position = 0.516395 m 09:08:01 Stage Position Measurement, pos = 0.000111 m 09:08:01 Stage Position Measurement, pos = -0.033370 m 09:08:01 Stage Position Measurement, pos = 0.516395 m 09:08:04 Move:node 0 absolute position = 0.516495 m 09:08:04 Stage Position Measurement, pos = 0.000111 m 09:08:04 Stage Position Measurement, pos = -0.033370 m 09:08:04 Stage Position Measurement, pos = 0.516495 m 09:08:08 Move:node 0 absolute position = 0.516595 m 09:08:08 Stage Position Measurement, pos = 0.000111 m 09:08:08 Stage Position Measurement, pos = -0.033370 m 09:08:08 Stage Position Measurement, pos = 0.516595 m 09:08:11 Move:node 0 absolute position = 0.516695 m 09:08:11 Stage Position Measurement, pos = 0.000111 m 09:08:11 Stage Position Measurement, pos = -0.033370 m 09:08:11 Stage Position Measurement, pos = 0.516695 m 09:08:14 Move:node 0 absolute position = 0.516795 m 09:08:14 Stage Position Measurement, pos = 0.000111 m 09:08:14 Stage Position Measurement, pos = -0.033370 m 09:08:14 Stage Position Measurement, pos = 0.516795 m 09:08:18 Move:node 0 absolute position = 0.516895 m 09:08:18 Stage Position Measurement, pos = 0.000111 m 09:08:18 Stage Position Measurement, pos = -0.033370 m 09:08:18 Stage Position Measurement, pos = 0.516895 m 09:08:21 Move:node 0 absolute position = 0.516995 m 09:08:21 Stage Position Measurement, pos = 0.000111 m 09:08:21 Stage Position Measurement, pos = -0.033370 m 09:08:21 Stage Position Measurement, pos = 0.516995 m 09:08:25 Move:node 0 absolute position = 0.517095 m 09:08:25 Stage Position Measurement, pos = 0.000111 m 09:08:25 Stage Position Measurement, pos = -0.033370 m 09:08:25 Stage Position Measurement, pos = 0.517095 m PolyFit: -70405.200329 208022.484975 -204815.985631 67198.834026, Error = 0.000000 Max position = 0.51611209:08:28 Move:node 0 absolute position = 0.516112 m 09:08:28 Stage Position Measurement, pos = 0.000111 m 09:08:28 Stage Position Measurement, pos = -0.033370 m 09:08:28 Stage Position Measurement, pos = 0.516112 m 09:08:31 Stage Position Measurement, pos = 0.000111 m 09:08:31 Stage Position Measurement, pos = -0.033370 m 09:08:31 Stage Position Measurement, pos = 0.516112 m 09:08:33 Move:node 1 absolute position = -0.033970 m 09:08:33 Stage Position Measurement, pos = 0.000111 m 09:08:33 Stage Position Measurement, pos = -0.033970 m 09:08:33 Stage Position Measurement, pos = 0.516112 m 09:08:36 Move:node 1 absolute position = -0.033910 m 09:08:36 Stage Position Measurement, pos = 0.000111 m 09:08:36 Stage Position Measurement, pos = -0.033910 m 09:08:36 Stage Position Measurement, pos = 0.516112 m 09:08:40 Move:node 1 absolute position = -0.033850 m 09:08:40 Stage Position Measurement, pos = 0.000111 m 09:08:40 Stage Position Measurement, pos = -0.033850 m 09:08:40 Stage Position Measurement, pos = 0.516112 m 09:08:43 Move:node 1 absolute position = -0.033790 m 09:08:43 Stage Position Measurement, pos = 0.000111 m 09:08:43 Stage Position Measurement, pos = -0.033790 m 09:08:43 Stage Position Measurement, pos = 0.516112 m 09:08:47 Move:node 1 absolute position = -0.033730 m 09:08:47 Stage Position Measurement, pos = 0.000111 m 09:08:47 Stage Position Measurement, pos = -0.033730 m 09:08:47 Stage Position Measurement, pos = 0.516112 m 09:08:50 Move:node 1 absolute position = -0.033670 m 09:08:50 Stage Position Measurement, pos = 0.000111 m 09:08:50 Stage Position Measurement, pos = -0.033670 m 09:08:50 Stage Position Measurement, pos = 0.516112 m 09:08:53 Move:node 1 absolute position = -0.033610 m 09:08:53 Stage Position Measurement, pos = 0.000111 m 09:08:53 Stage Position Measurement, pos = -0.033610 m 09:08:53 Stage Position Measurement, pos = 0.516112 m 09:08:57 Move:node 1 absolute position = -0.033550 m 09:08:57 Stage Position Measurement, pos = 0.000111 m 09:08:57 Stage Position Measurement, pos = -0.033550 m 09:08:57 Stage Position Measurement, pos = 0.516112 m 09:09:00 Move:node 1 absolute position = -0.033490 m 09:09:00 Stage Position Measurement, pos = 0.000111 m 09:09:00 Stage Position Measurement, pos = -0.033490 m 09:09:00 Stage Position Measurement, pos = 0.516112 m 09:09:04 Move:node 1 absolute position = -0.033430 m 09:09:04 Stage Position Measurement, pos = 0.000111 m 09:09:04 Stage Position Measurement, pos = -0.033430 m 09:09:04 Stage Position Measurement, pos = 0.516112 m 09:09:07 Move:node 1 absolute position = -0.033370 m 09:09:07 Stage Position Measurement, pos = 0.000111 m 09:09:07 Stage Position Measurement, pos = -0.033370 m 09:09:07 Stage Position Measurement, pos = 0.516112 m 09:09:10 Move:node 1 absolute position = -0.033310 m 09:09:10 Stage Position Measurement, pos = 0.000111 m 09:09:10 Stage Position Measurement, pos = -0.033310 m 09:09:10 Stage Position Measurement, pos = 0.516112 m 09:09:14 Move:node 1 absolute position = -0.033250 m 09:09:14 Stage Position Measurement, pos = 0.000111 m 09:09:14 Stage Position Measurement, pos = -0.033250 m 09:09:14 Stage Position Measurement, pos = 0.516112 m 09:09:17 Move:node 1 absolute position = -0.033190 m 09:09:17 Stage Position Measurement, pos = 0.000111 m 09:09:17 Stage Position Measurement, pos = -0.033190 m 09:09:17 Stage Position Measurement, pos = 0.516112 m 09:09:21 Move:node 1 absolute position = -0.033130 m 09:09:21 Stage Position Measurement, pos = 0.000111 m 09:09:21 Stage Position Measurement, pos = -0.033130 m 09:09:21 Stage Position Measurement, pos = 0.516112 m 09:09:24 Move:node 1 absolute position = -0.033070 m 09:09:24 Stage Position Measurement, pos = 0.000111 m 09:09:24 Stage Position Measurement, pos = -0.033070 m 09:09:24 Stage Position Measurement, pos = 0.516112 m 09:09:27 Move:node 1 absolute position = -0.033010 m 09:09:27 Stage Position Measurement, pos = 0.000111 m 09:09:27 Stage Position Measurement, pos = -0.033010 m 09:09:27 Stage Position Measurement, pos = 0.516112 m 09:09:31 Move:node 1 absolute position = -0.032950 m 09:09:31 Stage Position Measurement, pos = 0.000111 m 09:09:31 Stage Position Measurement, pos = -0.032950 m 09:09:31 Stage Position Measurement, pos = 0.516112 m 09:09:34 Move:node 1 absolute position = -0.032890 m 09:09:34 Stage Position Measurement, pos = 0.000111 m 09:09:34 Stage Position Measurement, pos = -0.032890 m 09:09:34 Stage Position Measurement, pos = 0.516112 m 09:09:38 Move:node 1 absolute position = -0.032830 m 09:09:38 Stage Position Measurement, pos = 0.000111 m 09:09:38 Stage Position Measurement, pos = -0.032830 m 09:09:38 Stage Position Measurement, pos = 0.516112 m PolyFit: -21.568275 48.236666 -31.962437 5.433878, Error = 0.000000 Max position = -0.03347909:09:41 Move:node 1 absolute position = -0.033479 m 09:09:41 Stage Position Measurement, pos = 0.000111 m 09:09:41 Stage Position Measurement, pos = -0.033479 m 09:09:41 Stage Position Measurement, pos = 0.516112 m 09:09:44 Stage Position Measurement, pos = 0.000111 m 09:09:44 Stage Position Measurement, pos = -0.033479 m 09:09:44 Stage Position Measurement, pos = 0.516112 m 09:09:46 Move:node 2 absolute position = 0.000711 m 09:09:46 Stage Position Measurement, pos = 0.000711 m 09:09:46 Stage Position Measurement, pos = -0.033479 m 09:09:46 Stage Position Measurement, pos = 0.516112 m 09:09:49 Move:node 2 absolute position = 0.000731 m 09:09:49 Stage Position Measurement, pos = 0.000731 m 09:09:49 Stage Position Measurement, pos = -0.033479 m 09:09:49 Stage Position Measurement, pos = 0.516112 m 09:09:53 Move:node 2 absolute position = 0.000751 m 09:09:53 Stage Position Measurement, pos = 0.000751 m 09:09:53 Stage Position Measurement, pos = -0.033479 m 09:09:53 Stage Position Measurement, pos = 0.516112 m 09:09:56 Move:node 2 absolute position = 0.000771 m 09:09:56 Stage Position Measurement, pos = 0.000771 m 09:09:56 Stage Position Measurement, pos = -0.033479 m 09:09:56 Stage Position Measurement, pos = 0.516112 m 09:10:00 Move:node 2 absolute position = 0.000791 m 09:10:00 Stage Position Measurement, pos = 0.000791 m 09:10:00 Stage Position Measurement, pos = -0.033479 m 09:10:00 Stage Position Measurement, pos = 0.516112 m 09:10:03 Move:node 2 absolute position = 0.000811 m 09:10:03 Stage Position Measurement, pos = 0.000811 m 09:10:03 Stage Position Measurement, pos = -0.033479 m 09:10:03 Stage Position Measurement, pos = 0.516111 m 09:10:06 Move:node 2 absolute position = 0.000831 m 09:10:06 Stage Position Measurement, pos = 0.000831 m 09:10:06 Stage Position Measurement, pos = -0.033479 m 09:10:06 Stage Position Measurement, pos = 0.516112 m 09:10:10 Move:node 2 absolute position = 0.000851 m 09:10:10 Stage Position Measurement, pos = 0.000851 m 09:10:10 Stage Position Measurement, pos = -0.033479 m 09:10:10 Stage Position Measurement, pos = 0.516112 m 09:10:13 Move:node 2 absolute position = 0.000871 m 09:10:13 Stage Position Measurement, pos = 0.000871 m 09:10:13 Stage Position Measurement, pos = -0.033479 m 09:10:13 Stage Position Measurement, pos = 0.516112 m 09:10:17 Move:node 2 absolute position = 0.000891 m 09:10:17 Stage Position Measurement, pos = 0.000891 m 09:10:17 Stage Position Measurement, pos = -0.033479 m 09:10:17 Stage Position Measurement, pos = 0.516112 m 09:10:20 Move:node 2 absolute position = 0.000911 m 09:10:20 Stage Position Measurement, pos = 0.000911 m 09:10:20 Stage Position Measurement, pos = -0.033479 m 09:10:20 Stage Position Measurement, pos = 0.516111 m 09:10:23 Move:node 2 absolute position = 0.000931 m 09:10:23 Stage Position Measurement, pos = 0.000931 m 09:10:23 Stage Position Measurement, pos = -0.033479 m 09:10:23 Stage Position Measurement, pos = 0.516112 m 09:10:27 Move:node 2 absolute position = 0.000951 m 09:10:27 Stage Position Measurement, pos = 0.000951 m 09:10:27 Stage Position Measurement, pos = -0.033479 m 09:10:27 Stage Position Measurement, pos = 0.516112 m 09:10:30 Move:node 2 absolute position = 0.000971 m 09:10:30 Stage Position Measurement, pos = 0.000971 m 09:10:30 Stage Position Measurement, pos = -0.033479 m 09:10:30 Stage Position Measurement, pos = 0.516112 m 09:10:34 Move:node 2 absolute position = 0.000991 m 09:10:34 Stage Position Measurement, pos = 0.000991 m 09:10:34 Stage Position Measurement, pos = -0.033479 m 09:10:34 Stage Position Measurement, pos = 0.516112 m 09:10:37 Move:node 2 absolute position = 0.001011 m 09:10:37 Stage Position Measurement, pos = 0.001011 m 09:10:37 Stage Position Measurement, pos = -0.033479 m 09:10:37 Stage Position Measurement, pos = 0.516112 m 09:10:40 Move:node 2 absolute position = 0.001031 m 09:10:40 Stage Position Measurement, pos = 0.001031 m 09:10:40 Stage Position Measurement, pos = -0.033479 m 09:10:40 Stage Position Measurement, pos = 0.516112 m 09:10:44 Move:node 2 absolute position = 0.001051 m 09:10:44 Stage Position Measurement, pos = 0.001051 m 09:10:44 Stage Position Measurement, pos = -0.033479 m 09:10:44 Stage Position Measurement, pos = 0.516112 m 09:10:47 Move:node 2 absolute position = 0.001071 m 09:10:47 Stage Position Measurement, pos = 0.001071 m 09:10:47 Stage Position Measurement, pos = -0.033479 m 09:10:47 Stage Position Measurement, pos = 0.516112 m 09:10:51 Move:node 2 absolute position = 0.001091 m 09:10:51 Stage Position Measurement, pos = 0.001091 m 09:10:51 Stage Position Measurement, pos = -0.033479 m 09:10:51 Stage Position Measurement, pos = 0.516112 m Linear fit Error = 0.00000009:10:54 Move:node 2 absolute position = 0.000923 m 09:10:54 Stage Position Measurement, pos = 0.000923 m 09:10:54 Stage Position Measurement, pos = -0.033479 m 09:10:54 Stage Position Measurement, pos = 0.516112 m 09:10:57 Stage Position Measurement, pos = 0.000923 m 09:10:57 Stage Position Measurement, pos = -0.033479 m 09:10:57 Stage Position Measurement, pos = 0.516112 m 09:10:59 Move:node 2 absolute position = 0.001723 m 09:10:59 Stage Position Measurement, pos = 0.001723 m 09:10:59 Stage Position Measurement, pos = -0.033479 m 09:10:59 Stage Position Measurement, pos = 0.516112 m 09:11:01 Move:node 0 absolute position = 0.515112 m 09:11:01 Stage Position Measurement, pos = 0.001723 m 09:11:01 Stage Position Measurement, pos = -0.033479 m 09:11:01 Stage Position Measurement, pos = 0.515111 m 09:11:04 Move:node 0 absolute position = 0.515212 m 09:11:04 Stage Position Measurement, pos = 0.001723 m 09:11:04 Stage Position Measurement, pos = -0.033479 m 09:11:04 Stage Position Measurement, pos = 0.515212 m 09:11:08 Move:node 0 absolute position = 0.515312 m 09:11:08 Stage Position Measurement, pos = 0.001723 m 09:11:08 Stage Position Measurement, pos = -0.033479 m 09:11:08 Stage Position Measurement, pos = 0.515312 m 09:11:11 Move:node 0 absolute position = 0.515412 m 09:11:11 Stage Position Measurement, pos = 0.001723 m 09:11:11 Stage Position Measurement, pos = -0.033479 m 09:11:11 Stage Position Measurement, pos = 0.515411 m 09:11:15 Move:node 0 absolute position = 0.515512 m 09:11:15 Stage Position Measurement, pos = 0.001723 m 09:11:15 Stage Position Measurement, pos = -0.033479 m 09:11:15 Stage Position Measurement, pos = 0.515512 m 09:11:18 Move:node 0 absolute position = 0.515612 m 09:11:18 Stage Position Measurement, pos = 0.001723 m 09:11:18 Stage Position Measurement, pos = -0.033479 m 09:11:18 Stage Position Measurement, pos = 0.515612 m 09:11:21 Move:node 0 absolute position = 0.515712 m 09:11:21 Stage Position Measurement, pos = 0.001723 m 09:11:21 Stage Position Measurement, pos = -0.033479 m 09:11:21 Stage Position Measurement, pos = 0.515712 m 09:11:25 Move:node 0 absolute position = 0.515812 m 09:11:25 Stage Position Measurement, pos = 0.001723 m 09:11:25 Stage Position Measurement, pos = -0.033479 m 09:11:25 Stage Position Measurement, pos = 0.515812 m 09:11:28 Move:node 0 absolute position = 0.515912 m 09:11:28 Stage Position Measurement, pos = 0.001723 m 09:11:28 Stage Position Measurement, pos = -0.033479 m 09:11:28 Stage Position Measurement, pos = 0.515912 m 09:11:31 Move:node 0 absolute position = 0.516012 m 09:11:31 Stage Position Measurement, pos = 0.001723 m 09:11:31 Stage Position Measurement, pos = -0.033479 m 09:11:31 Stage Position Measurement, pos = 0.516012 m 09:11:35 Move:node 0 absolute position = 0.516112 m 09:11:35 Stage Position Measurement, pos = 0.001723 m 09:11:35 Stage Position Measurement, pos = -0.033479 m 09:11:35 Stage Position Measurement, pos = 0.516112 m 09:11:38 Move:node 0 absolute position = 0.516212 m 09:11:38 Stage Position Measurement, pos = 0.001723 m 09:11:38 Stage Position Measurement, pos = -0.033479 m 09:11:38 Stage Position Measurement, pos = 0.516212 m 09:11:42 Move:node 0 absolute position = 0.516312 m 09:11:42 Stage Position Measurement, pos = 0.001723 m 09:11:42 Stage Position Measurement, pos = -0.033479 m 09:11:42 Stage Position Measurement, pos = 0.516312 m 09:11:45 Move:node 0 absolute position = 0.516412 m 09:11:45 Stage Position Measurement, pos = 0.001723 m 09:11:45 Stage Position Measurement, pos = -0.033479 m 09:11:45 Stage Position Measurement, pos = 0.516412 m 09:11:48 Move:node 0 absolute position = 0.516512 m 09:11:48 Stage Position Measurement, pos = 0.001723 m 09:11:48 Stage Position Measurement, pos = -0.033479 m 09:11:48 Stage Position Measurement, pos = 0.516512 m 09:11:52 Move:node 0 absolute position = 0.516612 m 09:11:52 Stage Position Measurement, pos = 0.001723 m 09:11:52 Stage Position Measurement, pos = -0.033479 m 09:11:52 Stage Position Measurement, pos = 0.516612 m 09:11:55 Move:node 0 absolute position = 0.516712 m 09:11:55 Stage Position Measurement, pos = 0.001723 m 09:11:55 Stage Position Measurement, pos = -0.033479 m 09:11:55 Stage Position Measurement, pos = 0.516712 m 09:11:59 Move:node 0 absolute position = 0.516812 m 09:11:59 Stage Position Measurement, pos = 0.001723 m 09:11:59 Stage Position Measurement, pos = -0.033479 m 09:11:59 Stage Position Measurement, pos = 0.516812 m 09:12:02 Move:node 0 absolute position = 0.516912 m 09:12:02 Stage Position Measurement, pos = 0.001723 m 09:12:02 Stage Position Measurement, pos = -0.033479 m 09:12:02 Stage Position Measurement, pos = 0.516912 m 09:12:06 Move:node 0 absolute position = 0.517012 m 09:12:06 Stage Position Measurement, pos = 0.001723 m 09:12:06 Stage Position Measurement, pos = -0.033479 m 09:12:06 Stage Position Measurement, pos = 0.517012 m PolyFit: -180486.832838 538268.492439 -535057.396859 177275.861089, Error = 0.000000 Max position = 0.51576209:12:09 Move:node 0 absolute position = 0.515762 m 09:12:09 Stage Position Measurement, pos = 0.001723 m 09:12:09 Stage Position Measurement, pos = -0.033479 m 09:12:09 Stage Position Measurement, pos = 0.515762 m 09:12:12 Stage Position Measurement, pos = 0.001723 m 09:12:12 Stage Position Measurement, pos = -0.033479 m 09:12:12 Stage Position Measurement, pos = 0.515762 m 09:12:14 Move:node 1 absolute position = -0.034079 m 09:12:14 Stage Position Measurement, pos = 0.001723 m 09:12:14 Stage Position Measurement, pos = -0.034079 m 09:12:14 Stage Position Measurement, pos = 0.515762 m 09:12:17 Move:node 1 absolute position = -0.034019 m 09:12:17 Stage Position Measurement, pos = 0.001723 m 09:12:17 Stage Position Measurement, pos = -0.034019 m 09:12:17 Stage Position Measurement, pos = 0.515762 m 09:12:20 Move:node 1 absolute position = -0.033959 m 09:12:20 Stage Position Measurement, pos = 0.001723 m 09:12:20 Stage Position Measurement, pos = -0.033959 m 09:12:20 Stage Position Measurement, pos = 0.515762 m 09:12:24 Move:node 1 absolute position = -0.033899 m 09:12:24 Stage Position Measurement, pos = 0.001723 m 09:12:24 Stage Position Measurement, pos = -0.033899 m 09:12:24 Stage Position Measurement, pos = 0.515762 m 09:12:27 Move:node 1 absolute position = -0.033839 m 09:12:27 Stage Position Measurement, pos = 0.001723 m 09:12:27 Stage Position Measurement, pos = -0.033839 m 09:12:27 Stage Position Measurement, pos = 0.515762 m 09:12:31 Move:node 1 absolute position = -0.033779 m 09:12:31 Stage Position Measurement, pos = 0.001723 m 09:12:31 Stage Position Measurement, pos = -0.033779 m 09:12:31 Stage Position Measurement, pos = 0.515762 m 09:12:34 Move:node 1 absolute position = -0.033719 m 09:12:34 Stage Position Measurement, pos = 0.001723 m 09:12:34 Stage Position Measurement, pos = -0.033719 m 09:12:34 Stage Position Measurement, pos = 0.515762 m 09:12:37 Move:node 1 absolute position = -0.033659 m 09:12:37 Stage Position Measurement, pos = 0.001723 m 09:12:37 Stage Position Measurement, pos = -0.033659 m 09:12:37 Stage Position Measurement, pos = 0.515762 m 09:12:41 Move:node 1 absolute position = -0.033599 m 09:12:41 Stage Position Measurement, pos = 0.001723 m 09:12:41 Stage Position Measurement, pos = -0.033599 m 09:12:41 Stage Position Measurement, pos = 0.515762 m 09:12:44 Move:node 1 absolute position = -0.033539 m 09:12:44 Stage Position Measurement, pos = 0.001723 m 09:12:44 Stage Position Measurement, pos = -0.033539 m 09:12:44 Stage Position Measurement, pos = 0.515762 m 09:12:48 Move:node 1 absolute position = -0.033479 m 09:12:48 Stage Position Measurement, pos = 0.001723 m 09:12:48 Stage Position Measurement, pos = -0.033479 m 09:12:48 Stage Position Measurement, pos = 0.515762 m 09:12:51 Move:node 1 absolute position = -0.033419 m 09:12:51 Stage Position Measurement, pos = 0.001723 m 09:12:51 Stage Position Measurement, pos = -0.033419 m 09:12:51 Stage Position Measurement, pos = 0.515762 m 09:12:54 Move:node 1 absolute position = -0.033359 m 09:12:54 Stage Position Measurement, pos = 0.001723 m 09:12:54 Stage Position Measurement, pos = -0.033359 m 09:12:54 Stage Position Measurement, pos = 0.515762 m 09:12:58 Move:node 1 absolute position = -0.033299 m 09:12:58 Stage Position Measurement, pos = 0.001723 m 09:12:58 Stage Position Measurement, pos = -0.033299 m 09:12:58 Stage Position Measurement, pos = 0.515762 m 09:13:01 Move:node 1 absolute position = -0.033239 m 09:13:01 Stage Position Measurement, pos = 0.001723 m 09:13:01 Stage Position Measurement, pos = -0.033239 m 09:13:01 Stage Position Measurement, pos = 0.515762 m 09:13:05 Move:node 1 absolute position = -0.033179 m 09:13:05 Stage Position Measurement, pos = 0.001723 m 09:13:05 Stage Position Measurement, pos = -0.033179 m 09:13:05 Stage Position Measurement, pos = 0.515762 m 09:13:08 Move:node 1 absolute position = -0.033119 m 09:13:08 Stage Position Measurement, pos = 0.001723 m 09:13:08 Stage Position Measurement, pos = -0.033119 m 09:13:08 Stage Position Measurement, pos = 0.515762 m 09:13:11 Move:node 1 absolute position = -0.033059 m 09:13:11 Stage Position Measurement, pos = 0.001723 m 09:13:11 Stage Position Measurement, pos = -0.033059 m 09:13:11 Stage Position Measurement, pos = 0.515762 m 09:13:15 Move:node 1 absolute position = -0.032999 m 09:13:15 Stage Position Measurement, pos = 0.001723 m 09:13:15 Stage Position Measurement, pos = -0.032999 m 09:13:15 Stage Position Measurement, pos = 0.515762 m 09:13:18 Move:node 1 absolute position = -0.032939 m 09:13:18 Stage Position Measurement, pos = 0.001723 m 09:13:18 Stage Position Measurement, pos = -0.032939 m 09:13:18 Stage Position Measurement, pos = 0.515762 m PolyFit: -107.696315 301.873731 -280.357036 86.330222, Error = 0.000000 Max position = -0.03305809:13:22 Move:node 1 absolute position = -0.033058 m 09:13:22 Stage Position Measurement, pos = 0.001723 m 09:13:22 Stage Position Measurement, pos = -0.033058 m 09:13:22 Stage Position Measurement, pos = 0.515762 m 09:13:24 Stage Position Measurement, pos = 0.001723 m 09:13:24 Stage Position Measurement, pos = -0.033058 m 09:13:24 Stage Position Measurement, pos = 0.515762 m 09:13:26 Move:node 2 absolute position = 0.000723 m 09:13:26 Stage Position Measurement, pos = 0.000723 m 09:13:26 Stage Position Measurement, pos = -0.033058 m 09:13:26 Stage Position Measurement, pos = 0.515762 m 09:13:30 Move:node 2 absolute position = 0.000743 m 09:13:30 Stage Position Measurement, pos = 0.000743 m 09:13:30 Stage Position Measurement, pos = -0.033058 m 09:13:30 Stage Position Measurement, pos = 0.515762 m 09:13:33 Move:node 2 absolute position = 0.000763 m 09:13:33 Stage Position Measurement, pos = 0.000763 m 09:13:33 Stage Position Measurement, pos = -0.033058 m 09:13:33 Stage Position Measurement, pos = 0.515762 m 09:13:36 Move:node 2 absolute position = 0.000783 m 09:13:36 Stage Position Measurement, pos = 0.000783 m 09:13:36 Stage Position Measurement, pos = -0.033058 m 09:13:36 Stage Position Measurement, pos = 0.515762 m 09:13:40 Move:node 2 absolute position = 0.000803 m 09:13:40 Stage Position Measurement, pos = 0.000803 m 09:13:40 Stage Position Measurement, pos = -0.033058 m 09:13:40 Stage Position Measurement, pos = 0.515762 m 09:13:43 Move:node 2 absolute position = 0.000823 m 09:13:43 Stage Position Measurement, pos = 0.000823 m 09:13:43 Stage Position Measurement, pos = -0.033058 m 09:13:43 Stage Position Measurement, pos = 0.515762 m 09:13:47 Move:node 2 absolute position = 0.000843 m 09:13:47 Stage Position Measurement, pos = 0.000843 m 09:13:47 Stage Position Measurement, pos = -0.033058 m 09:13:47 Stage Position Measurement, pos = 0.515762 m 09:13:50 Move:node 2 absolute position = 0.000863 m 09:13:50 Stage Position Measurement, pos = 0.000863 m 09:13:50 Stage Position Measurement, pos = -0.033058 m 09:13:50 Stage Position Measurement, pos = 0.515762 m 09:13:53 Move:node 2 absolute position = 0.000883 m 09:13:53 Stage Position Measurement, pos = 0.000883 m 09:13:53 Stage Position Measurement, pos = -0.033058 m 09:13:53 Stage Position Measurement, pos = 0.515762 m 09:13:57 Move:node 2 absolute position = 0.000903 m 09:13:57 Stage Position Measurement, pos = 0.000903 m 09:13:57 Stage Position Measurement, pos = -0.033058 m 09:13:57 Stage Position Measurement, pos = 0.515762 m 09:14:00 Move:node 2 absolute position = 0.000923 m 09:14:00 Stage Position Measurement, pos = 0.000923 m 09:14:00 Stage Position Measurement, pos = -0.033058 m 09:14:00 Stage Position Measurement, pos = 0.515762 m 09:14:04 Move:node 2 absolute position = 0.000943 m 09:14:04 Stage Position Measurement, pos = 0.000943 m 09:14:04 Stage Position Measurement, pos = -0.033058 m 09:14:04 Stage Position Measurement, pos = 0.515762 m 09:14:07 Move:node 2 absolute position = 0.000963 m 09:14:07 Stage Position Measurement, pos = 0.000963 m 09:14:07 Stage Position Measurement, pos = -0.033058 m 09:14:07 Stage Position Measurement, pos = 0.515762 m 09:14:10 Move:node 2 absolute position = 0.000983 m 09:14:10 Stage Position Measurement, pos = 0.000983 m 09:14:10 Stage Position Measurement, pos = -0.033058 m 09:14:10 Stage Position Measurement, pos = 0.515762 m 09:14:14 Move:node 2 absolute position = 0.001003 m 09:14:14 Stage Position Measurement, pos = 0.001003 m 09:14:14 Stage Position Measurement, pos = -0.033058 m 09:14:14 Stage Position Measurement, pos = 0.515762 m 09:14:17 Move:node 2 absolute position = 0.001023 m 09:14:17 Stage Position Measurement, pos = 0.001023 m 09:14:17 Stage Position Measurement, pos = -0.033058 m 09:14:17 Stage Position Measurement, pos = 0.515762 m 09:14:21 Move:node 2 absolute position = 0.001043 m 09:14:21 Stage Position Measurement, pos = 0.001043 m 09:14:21 Stage Position Measurement, pos = -0.033058 m 09:14:21 Stage Position Measurement, pos = 0.515762 m 09:14:24 Move:node 2 absolute position = 0.001063 m 09:14:24 Stage Position Measurement, pos = 0.001063 m 09:14:24 Stage Position Measurement, pos = -0.033058 m 09:14:24 Stage Position Measurement, pos = 0.515762 m 09:14:27 Move:node 2 absolute position = 0.001083 m 09:14:27 Stage Position Measurement, pos = 0.001083 m 09:14:27 Stage Position Measurement, pos = -0.033058 m 09:14:27 Stage Position Measurement, pos = 0.515762 m 09:14:31 Move:node 2 absolute position = 0.001103 m 09:14:31 Stage Position Measurement, pos = 0.001103 m 09:14:31 Stage Position Measurement, pos = -0.033058 m 09:14:31 Stage Position Measurement, pos = 0.515762 m Linear fit Error = 0.00000009:14:34 Move:node 2 absolute position = 0.000901 m 09:14:34 Stage Position Measurement, pos = 0.000901 m 09:14:34 Stage Position Measurement, pos = -0.033058 m 09:14:34 Stage Position Measurement, pos = 0.515762 m 09:14:37 Stage Position Measurement, pos = 0.000901 m 09:14:37 Stage Position Measurement, pos = -0.033058 m 09:14:37 Stage Position Measurement, pos = 0.515762 m 09:14:47 Move:node 1 absolute position = 0.000000 m 09:14:48 Stage Position Measurement, pos = 0.000000 m 09:14:50 Move:node 2 absolute position = -0.000000 m 09:14:51 Move:node 0 absolute position = 0.000000 m 09:16:00 Move:node 0 absolute position = 0.515936 m 09:16:00 Stage Position Measurement, pos = 0.000000 m 09:16:00 Stage Position Measurement, pos = 0.000000 m 09:16:00 Stage Position Measurement, pos = 0.515936 m 09:16:09 Move:node 1 absolute position = -0.033269 m 09:16:09 Stage Position Measurement, pos = 0.000000 m 09:16:09 Stage Position Measurement, pos = -0.033269 m 09:16:09 Stage Position Measurement, pos = 0.515937 m 09:16:11 Move:node 2 absolute position = 0.000912 m 09:16:11 Stage Position Measurement, pos = 0.000912 m 09:16:11 Stage Position Measurement, pos = -0.033269 m 09:16:11 Stage Position Measurement, pos = 0.515937 m 09:16:19 Stage Position Measurement, pos = 0.000912 m 09:16:19 Stage Position Measurement, pos = -0.033269 m 09:16:19 Stage Position Measurement, pos = 0.515937 m 09:16:21 Move:node 2 absolute position = 0.000112 m 09:16:21 Stage Position Measurement, pos = 0.000112 m 09:16:21 Stage Position Measurement, pos = -0.033269 m 09:16:21 Stage Position Measurement, pos = 0.515937 m 09:16:23 Move:node 0 absolute position = 0.514937 m 09:16:23 Stage Position Measurement, pos = 0.000112 m 09:16:23 Stage Position Measurement, pos = -0.033269 m 09:16:23 Stage Position Measurement, pos = 0.514937 m 09:16:27 Move:node 0 absolute position = 0.515037 m 09:16:27 Stage Position Measurement, pos = 0.000112 m 09:16:27 Stage Position Measurement, pos = -0.033269 m 09:16:27 Stage Position Measurement, pos = 0.515037 m 09:16:30 Move:node 0 absolute position = 0.515137 m 09:16:30 Stage Position Measurement, pos = 0.000112 m 09:16:30 Stage Position Measurement, pos = -0.033269 m 09:16:30 Stage Position Measurement, pos = 0.515137 m 09:16:34 Move:node 0 absolute position = 0.515237 m 09:16:34 Stage Position Measurement, pos = 0.000112 m 09:16:34 Stage Position Measurement, pos = -0.033269 m 09:16:34 Stage Position Measurement, pos = 0.515237 m 09:16:37 Move:node 0 absolute position = 0.515337 m 09:16:37 Stage Position Measurement, pos = 0.000112 m 09:16:37 Stage Position Measurement, pos = -0.033269 m 09:16:37 Stage Position Measurement, pos = 0.515337 m 09:16:40 Move:node 0 absolute position = 0.515437 m 09:16:40 Stage Position Measurement, pos = 0.000112 m 09:16:40 Stage Position Measurement, pos = -0.033269 m 09:16:40 Stage Position Measurement, pos = 0.515437 m 09:16:44 Move:node 0 absolute position = 0.515537 m 09:16:44 Stage Position Measurement, pos = 0.000112 m 09:16:44 Stage Position Measurement, pos = -0.033269 m 09:16:44 Stage Position Measurement, pos = 0.515537 m 09:16:47 Move:node 0 absolute position = 0.515637 m 09:16:47 Stage Position Measurement, pos = 0.000112 m 09:16:47 Stage Position Measurement, pos = -0.033269 m 09:16:47 Stage Position Measurement, pos = 0.515637 m 09:16:51 Move:node 0 absolute position = 0.515737 m 09:16:51 Stage Position Measurement, pos = 0.000112 m 09:16:51 Stage Position Measurement, pos = -0.033269 m 09:16:51 Stage Position Measurement, pos = 0.515737 m 09:16:54 Move:node 0 absolute position = 0.515837 m 09:16:54 Stage Position Measurement, pos = 0.000112 m 09:16:54 Stage Position Measurement, pos = -0.033269 m 09:16:54 Stage Position Measurement, pos = 0.515837 m 09:16:57 Move:node 0 absolute position = 0.515937 m 09:16:57 Stage Position Measurement, pos = 0.000112 m 09:16:57 Stage Position Measurement, pos = -0.033269 m 09:16:57 Stage Position Measurement, pos = 0.515937 m 09:17:01 Move:node 0 absolute position = 0.516037 m 09:17:01 Stage Position Measurement, pos = 0.000112 m 09:17:01 Stage Position Measurement, pos = -0.033269 m 09:17:01 Stage Position Measurement, pos = 0.516037 m 09:17:04 Move:node 0 absolute position = 0.516137 m 09:17:04 Stage Position Measurement, pos = 0.000112 m 09:17:04 Stage Position Measurement, pos = -0.033269 m 09:17:04 Stage Position Measurement, pos = 0.516137 m 09:17:08 Move:node 0 absolute position = 0.516237 m 09:17:08 Stage Position Measurement, pos = 0.000112 m 09:17:08 Stage Position Measurement, pos = -0.033269 m 09:17:08 Stage Position Measurement, pos = 0.516237 m 09:17:11 Move:node 0 absolute position = 0.516337 m 09:17:11 Stage Position Measurement, pos = 0.000112 m 09:17:11 Stage Position Measurement, pos = -0.033269 m 09:17:11 Stage Position Measurement, pos = 0.516337 m 09:17:14 Move:node 0 absolute position = 0.516437 m 09:17:14 Stage Position Measurement, pos = 0.000112 m 09:17:14 Stage Position Measurement, pos = -0.033269 m 09:17:14 Stage Position Measurement, pos = 0.516437 m 09:17:18 Move:node 0 absolute position = 0.516537 m 09:17:18 Stage Position Measurement, pos = 0.000112 m 09:17:18 Stage Position Measurement, pos = -0.033269 m 09:17:18 Stage Position Measurement, pos = 0.516537 m 09:17:21 Move:node 0 absolute position = 0.516637 m 09:17:21 Stage Position Measurement, pos = 0.000112 m 09:17:21 Stage Position Measurement, pos = -0.033269 m 09:17:21 Stage Position Measurement, pos = 0.516637 m 09:17:25 Move:node 0 absolute position = 0.516737 m 09:17:25 Stage Position Measurement, pos = 0.000112 m 09:17:25 Stage Position Measurement, pos = -0.033269 m 09:17:25 Stage Position Measurement, pos = 0.516737 m 09:17:28 Move:node 0 absolute position = 0.516837 m 09:17:28 Stage Position Measurement, pos = 0.000112 m 09:17:28 Stage Position Measurement, pos = -0.033269 m 09:17:28 Stage Position Measurement, pos = 0.516837 m PolyFit: 58221.049890 -178511.336888 182370.237300 -62079.812361, Error = 0.000000 Max position = 0.51612609:17:31 Move:node 0 absolute position = 0.516126 m 09:17:31 Stage Position Measurement, pos = 0.000112 m 09:17:31 Stage Position Measurement, pos = -0.033269 m 09:17:31 Stage Position Measurement, pos = 0.516126 m 09:17:34 Stage Position Measurement, pos = 0.000112 m 09:17:34 Stage Position Measurement, pos = -0.033269 m 09:17:34 Stage Position Measurement, pos = 0.516126 m 09:17:36 Move:node 1 absolute position = -0.033869 m 09:17:36 Stage Position Measurement, pos = 0.000112 m 09:17:36 Stage Position Measurement, pos = -0.033869 m 09:17:36 Stage Position Measurement, pos = 0.516126 m 09:17:40 Move:node 1 absolute position = -0.033809 m 09:17:40 Stage Position Measurement, pos = 0.000112 m 09:17:40 Stage Position Measurement, pos = -0.033809 m 09:17:40 Stage Position Measurement, pos = 0.516126 m 09:17:43 Move:node 1 absolute position = -0.033749 m 09:17:43 Stage Position Measurement, pos = 0.000112 m 09:17:43 Stage Position Measurement, pos = -0.033749 m 09:17:43 Stage Position Measurement, pos = 0.516126 m 09:17:46 Move:node 1 absolute position = -0.033689 m 09:17:46 Stage Position Measurement, pos = 0.000112 m 09:17:46 Stage Position Measurement, pos = -0.033689 m 09:17:46 Stage Position Measurement, pos = 0.516126 m 09:17:50 Move:node 1 absolute position = -0.033629 m 09:17:50 Stage Position Measurement, pos = 0.000112 m 09:17:50 Stage Position Measurement, pos = -0.033629 m 09:17:50 Stage Position Measurement, pos = 0.516125 m 09:17:53 Move:node 1 absolute position = -0.033569 m 09:17:53 Stage Position Measurement, pos = 0.000112 m 09:17:53 Stage Position Measurement, pos = -0.033569 m 09:17:53 Stage Position Measurement, pos = 0.516126 m 09:17:57 Move:node 1 absolute position = -0.033509 m 09:17:57 Stage Position Measurement, pos = 0.000112 m 09:17:57 Stage Position Measurement, pos = -0.033509 m 09:17:57 Stage Position Measurement, pos = 0.516126 m 09:18:00 Move:node 1 absolute position = -0.033449 m 09:18:00 Stage Position Measurement, pos = 0.000112 m 09:18:00 Stage Position Measurement, pos = -0.033449 m 09:18:00 Stage Position Measurement, pos = 0.516126 m 09:18:03 Move:node 1 absolute position = -0.033389 m 09:18:03 Stage Position Measurement, pos = 0.000112 m 09:18:03 Stage Position Measurement, pos = -0.033389 m 09:18:03 Stage Position Measurement, pos = 0.516126 m 09:18:07 Move:node 1 absolute position = -0.033329 m 09:18:07 Stage Position Measurement, pos = 0.000112 m 09:18:07 Stage Position Measurement, pos = -0.033329 m 09:18:07 Stage Position Measurement, pos = 0.516126 m 09:18:10 Move:node 1 absolute position = -0.033269 m 09:18:10 Stage Position Measurement, pos = 0.000112 m 09:18:10 Stage Position Measurement, pos = -0.033269 m 09:18:10 Stage Position Measurement, pos = 0.516125 m 09:18:14 Move:node 1 absolute position = -0.033209 m 09:18:14 Stage Position Measurement, pos = 0.000112 m 09:18:14 Stage Position Measurement, pos = -0.033209 m 09:18:14 Stage Position Measurement, pos = 0.516126 m 09:18:17 Move:node 1 absolute position = -0.033149 m 09:18:17 Stage Position Measurement, pos = 0.000112 m 09:18:17 Stage Position Measurement, pos = -0.033149 m 09:18:17 Stage Position Measurement, pos = 0.516125 m 09:18:20 Move:node 1 absolute position = -0.033089 m 09:18:20 Stage Position Measurement, pos = 0.000112 m 09:18:20 Stage Position Measurement, pos = -0.033089 m 09:18:20 Stage Position Measurement, pos = 0.516126 m 09:18:24 Move:node 1 absolute position = -0.033029 m 09:18:24 Stage Position Measurement, pos = 0.000112 m 09:18:24 Stage Position Measurement, pos = -0.033029 m 09:18:24 Stage Position Measurement, pos = 0.516126 m 09:18:27 Move:node 1 absolute position = -0.032969 m 09:18:27 Stage Position Measurement, pos = 0.000112 m 09:18:27 Stage Position Measurement, pos = -0.032969 m 09:18:27 Stage Position Measurement, pos = 0.516126 m 09:18:30 Move:node 1 absolute position = -0.032909 m 09:18:30 Stage Position Measurement, pos = 0.000112 m 09:18:30 Stage Position Measurement, pos = -0.032909 m 09:18:30 Stage Position Measurement, pos = 0.516125 m 09:18:34 Move:node 1 absolute position = -0.032849 m 09:18:34 Stage Position Measurement, pos = 0.000112 m 09:18:34 Stage Position Measurement, pos = -0.032849 m 09:18:34 Stage Position Measurement, pos = 0.516126 m 09:18:37 Move:node 1 absolute position = -0.032789 m 09:18:37 Stage Position Measurement, pos = 0.000112 m 09:18:37 Stage Position Measurement, pos = -0.032789 m 09:18:37 Stage Position Measurement, pos = 0.516126 m 09:18:41 Move:node 1 absolute position = -0.032729 m 09:18:41 Stage Position Measurement, pos = 0.000112 m 09:18:41 Stage Position Measurement, pos = -0.032729 m 09:18:41 Stage Position Measurement, pos = 0.516126 m PolyFit: 1.331490 -19.419668 34.568885 -16.342819, Error = 0.000000 Max position = -0.03347909:18:44 Move:node 1 absolute position = -0.033479 m 09:18:44 Stage Position Measurement, pos = 0.000112 m 09:18:44 Stage Position Measurement, pos = -0.033479 m 09:18:44 Stage Position Measurement, pos = 0.516126 m 09:18:47 Stage Position Measurement, pos = 0.000112 m 09:18:47 Stage Position Measurement, pos = -0.033480 m 09:18:47 Stage Position Measurement, pos = 0.516125 m 09:18:49 Move:node 2 absolute position = 0.000712 m 09:18:49 Stage Position Measurement, pos = 0.000712 m 09:18:49 Stage Position Measurement, pos = -0.033480 m 09:18:49 Stage Position Measurement, pos = 0.516125 m 09:18:52 Move:node 2 absolute position = 0.000732 m 09:18:52 Stage Position Measurement, pos = 0.000732 m 09:18:52 Stage Position Measurement, pos = -0.033480 m 09:18:52 Stage Position Measurement, pos = 0.516126 m 09:18:56 Move:node 2 absolute position = 0.000752 m 09:18:56 Stage Position Measurement, pos = 0.000752 m 09:18:56 Stage Position Measurement, pos = -0.033480 m 09:18:56 Stage Position Measurement, pos = 0.516126 m 09:18:59 Move:node 2 absolute position = 0.000772 m 09:18:59 Stage Position Measurement, pos = 0.000772 m 09:18:59 Stage Position Measurement, pos = -0.033480 m 09:18:59 Stage Position Measurement, pos = 0.516126 m 09:19:03 Move:node 2 absolute position = 0.000792 m 09:19:03 Stage Position Measurement, pos = 0.000792 m 09:19:03 Stage Position Measurement, pos = -0.033480 m 09:19:03 Stage Position Measurement, pos = 0.516125 m 09:19:06 Move:node 2 absolute position = 0.000812 m 09:19:06 Stage Position Measurement, pos = 0.000812 m 09:19:06 Stage Position Measurement, pos = -0.033479 m 09:19:06 Stage Position Measurement, pos = 0.516125 m 09:19:09 Move:node 2 absolute position = 0.000832 m 09:19:09 Stage Position Measurement, pos = 0.000832 m 09:19:09 Stage Position Measurement, pos = -0.033480 m 09:19:09 Stage Position Measurement, pos = 0.516126 m 09:19:13 Move:node 2 absolute position = 0.000852 m 09:19:13 Stage Position Measurement, pos = 0.000852 m 09:19:13 Stage Position Measurement, pos = -0.033480 m 09:19:13 Stage Position Measurement, pos = 0.516126 m 09:19:16 Move:node 2 absolute position = 0.000872 m 09:19:16 Stage Position Measurement, pos = 0.000872 m 09:19:16 Stage Position Measurement, pos = -0.033479 m 09:19:16 Stage Position Measurement, pos = 0.516126 m 09:19:19 Move:node 2 absolute position = 0.000892 m 09:19:19 Stage Position Measurement, pos = 0.000892 m 09:19:19 Stage Position Measurement, pos = -0.033480 m 09:19:19 Stage Position Measurement, pos = 0.516126 m 09:19:23 Move:node 2 absolute position = 0.000912 m 09:19:23 Stage Position Measurement, pos = 0.000912 m 09:19:23 Stage Position Measurement, pos = -0.033480 m 09:19:23 Stage Position Measurement, pos = 0.516126 m 09:19:26 Move:node 2 absolute position = 0.000932 m 09:19:26 Stage Position Measurement, pos = 0.000932 m 09:19:26 Stage Position Measurement, pos = -0.033480 m 09:19:26 Stage Position Measurement, pos = 0.516125 m 09:19:30 Move:node 2 absolute position = 0.000952 m 09:19:30 Stage Position Measurement, pos = 0.000952 m 09:19:30 Stage Position Measurement, pos = -0.033480 m 09:19:30 Stage Position Measurement, pos = 0.516125 m 09:19:33 Move:node 2 absolute position = 0.000972 m 09:19:33 Stage Position Measurement, pos = 0.000972 m 09:19:33 Stage Position Measurement, pos = -0.033480 m 09:19:33 Stage Position Measurement, pos = 0.516125 m 09:19:36 Move:node 2 absolute position = 0.000992 m 09:19:36 Stage Position Measurement, pos = 0.000992 m 09:19:36 Stage Position Measurement, pos = -0.033479 m 09:19:36 Stage Position Measurement, pos = 0.516125 m 09:19:40 Move:node 2 absolute position = 0.001012 m 09:19:40 Stage Position Measurement, pos = 0.001012 m 09:19:40 Stage Position Measurement, pos = -0.033480 m 09:19:40 Stage Position Measurement, pos = 0.516126 m 09:19:43 Move:node 2 absolute position = 0.001032 m 09:19:43 Stage Position Measurement, pos = 0.001032 m 09:19:43 Stage Position Measurement, pos = -0.033479 m 09:19:43 Stage Position Measurement, pos = 0.516126 m 09:19:47 Move:node 2 absolute position = 0.001052 m 09:19:47 Stage Position Measurement, pos = 0.001052 m 09:19:47 Stage Position Measurement, pos = -0.033480 m 09:19:47 Stage Position Measurement, pos = 0.516125 m 09:19:50 Move:node 2 absolute position = 0.001072 m 09:19:50 Stage Position Measurement, pos = 0.001072 m 09:19:50 Stage Position Measurement, pos = -0.033479 m 09:19:50 Stage Position Measurement, pos = 0.516126 m 09:19:53 Move:node 2 absolute position = 0.001092 m 09:19:53 Stage Position Measurement, pos = 0.001092 m 09:19:53 Stage Position Measurement, pos = -0.033480 m 09:19:53 Stage Position Measurement, pos = 0.516126 m Linear fit Error = 0.00000009:19:57 Move:node 2 absolute position = 0.000924 m 09:19:57 Stage Position Measurement, pos = 0.000924 m 09:19:57 Stage Position Measurement, pos = -0.033480 m 09:19:57 Stage Position Measurement, pos = 0.516126 m 09:19:59 Stage Position Measurement, pos = 0.000924 m 09:19:59 Stage Position Measurement, pos = -0.033480 m 09:19:59 Stage Position Measurement, pos = 0.516126 m 09:20:02 Move:node 2 absolute position = 0.001724 m 09:20:02 Stage Position Measurement, pos = 0.001724 m 09:20:02 Stage Position Measurement, pos = -0.033480 m 09:20:02 Stage Position Measurement, pos = 0.516126 m 09:20:04 Move:node 0 absolute position = 0.515126 m 09:20:04 Stage Position Measurement, pos = 0.001724 m 09:20:04 Stage Position Measurement, pos = -0.033480 m 09:20:04 Stage Position Measurement, pos = 0.515126 m 09:20:07 Move:node 0 absolute position = 0.515226 m 09:20:07 Stage Position Measurement, pos = 0.001724 m 09:20:07 Stage Position Measurement, pos = -0.033480 m 09:20:07 Stage Position Measurement, pos = 0.515226 m 09:20:10 Move:node 0 absolute position = 0.515325 m 09:20:10 Stage Position Measurement, pos = 0.001724 m 09:20:10 Stage Position Measurement, pos = -0.033480 m 09:20:10 Stage Position Measurement, pos = 0.515325 m 09:20:14 Move:node 0 absolute position = 0.515425 m 09:20:14 Stage Position Measurement, pos = 0.001724 m 09:20:14 Stage Position Measurement, pos = -0.033480 m 09:20:14 Stage Position Measurement, pos = 0.515425 m 09:20:17 Move:node 0 absolute position = 0.515526 m 09:20:17 Stage Position Measurement, pos = 0.001724 m 09:20:17 Stage Position Measurement, pos = -0.033480 m 09:20:17 Stage Position Measurement, pos = 0.515525 m 09:20:21 Move:node 0 absolute position = 0.515626 m 09:20:21 Stage Position Measurement, pos = 0.001724 m 09:20:21 Stage Position Measurement, pos = -0.033479 m 09:20:21 Stage Position Measurement, pos = 0.515625 m 09:20:24 Move:node 0 absolute position = 0.515726 m 09:20:24 Stage Position Measurement, pos = 0.001724 m 09:20:24 Stage Position Measurement, pos = -0.033480 m 09:20:24 Stage Position Measurement, pos = 0.515725 m 09:20:27 Move:node 0 absolute position = 0.515825 m 09:20:27 Stage Position Measurement, pos = 0.001724 m 09:20:27 Stage Position Measurement, pos = -0.033480 m 09:20:27 Stage Position Measurement, pos = 0.515826 m 09:20:31 Move:node 0 absolute position = 0.515926 m 09:20:31 Stage Position Measurement, pos = 0.001724 m 09:20:31 Stage Position Measurement, pos = -0.033480 m 09:20:31 Stage Position Measurement, pos = 0.515926 m 09:20:34 Move:node 0 absolute position = 0.516025 m 09:20:34 Stage Position Measurement, pos = 0.001724 m 09:20:34 Stage Position Measurement, pos = -0.033480 m 09:20:34 Stage Position Measurement, pos = 0.516025 m 09:20:37 Move:node 0 absolute position = 0.516126 m 09:20:37 Stage Position Measurement, pos = 0.001724 m 09:20:37 Stage Position Measurement, pos = -0.033479 m 09:20:37 Stage Position Measurement, pos = 0.516125 m 09:20:41 Move:node 0 absolute position = 0.516226 m 09:20:41 Stage Position Measurement, pos = 0.001724 m 09:20:41 Stage Position Measurement, pos = -0.033479 m 09:20:41 Stage Position Measurement, pos = 0.516226 m 09:20:44 Move:node 0 absolute position = 0.516325 m 09:20:44 Stage Position Measurement, pos = 0.001724 m 09:20:44 Stage Position Measurement, pos = -0.033480 m 09:20:44 Stage Position Measurement, pos = 0.516326 m 09:20:48 Move:node 0 absolute position = 0.516425 m 09:20:48 Stage Position Measurement, pos = 0.001724 m 09:20:48 Stage Position Measurement, pos = -0.033480 m 09:20:48 Stage Position Measurement, pos = 0.516426 m 09:20:51 Move:node 0 absolute position = 0.516525 m 09:20:51 Stage Position Measurement, pos = 0.001724 m 09:20:51 Stage Position Measurement, pos = -0.033480 m 09:20:51 Stage Position Measurement, pos = 0.516526 m 09:20:54 Move:node 0 absolute position = 0.516626 m 09:20:54 Stage Position Measurement, pos = 0.001724 m 09:20:54 Stage Position Measurement, pos = -0.033479 m 09:20:54 Stage Position Measurement, pos = 0.516626 m 09:20:58 Move:node 0 absolute position = 0.516726 m 09:20:58 Stage Position Measurement, pos = 0.001724 m 09:20:58 Stage Position Measurement, pos = -0.033480 m 09:20:58 Stage Position Measurement, pos = 0.516726 m 09:21:01 Move:node 0 absolute position = 0.516826 m 09:21:01 Stage Position Measurement, pos = 0.001724 m 09:21:01 Stage Position Measurement, pos = -0.033480 m 09:21:01 Stage Position Measurement, pos = 0.516825 m 09:21:04 Move:node 0 absolute position = 0.516925 m 09:21:04 Stage Position Measurement, pos = 0.001724 m 09:21:04 Stage Position Measurement, pos = -0.033480 m 09:21:04 Stage Position Measurement, pos = 0.516926 m 09:21:08 Move:node 0 absolute position = 0.517025 m 09:21:08 Stage Position Measurement, pos = 0.001724 m 09:21:08 Stage Position Measurement, pos = -0.033480 m 09:21:08 Stage Position Measurement, pos = 0.517026 m PolyFit: -152871.180548 455254.432128 -451875.739050 149492.610876, Error = 0.000000 Max position = 0.51576709:21:11 Move:node 0 absolute position = 0.515767 m 09:21:11 Stage Position Measurement, pos = 0.001724 m 09:21:11 Stage Position Measurement, pos = -0.033479 m 09:21:11 Stage Position Measurement, pos = 0.515767 m 09:21:14 Stage Position Measurement, pos = 0.001724 m 09:21:14 Stage Position Measurement, pos = -0.033480 m 09:21:14 Stage Position Measurement, pos = 0.515766 m 09:21:16 Move:node 1 absolute position = -0.034079 m 09:21:17 Stage Position Measurement, pos = 0.001724 m 09:21:17 Stage Position Measurement, pos = -0.034080 m 09:21:17 Stage Position Measurement, pos = 0.515767 m 09:21:20 Move:node 1 absolute position = -0.034020 m 09:21:20 Stage Position Measurement, pos = 0.001724 m 09:21:20 Stage Position Measurement, pos = -0.034020 m 09:21:20 Stage Position Measurement, pos = 0.515767 m 09:21:24 Move:node 1 absolute position = -0.033959 m 09:21:24 Stage Position Measurement, pos = 0.001724 m 09:21:24 Stage Position Measurement, pos = -0.033959 m 09:21:24 Stage Position Measurement, pos = 0.515767 m 09:21:28 Move:node 1 absolute position = -0.033900 m 09:21:28 Stage Position Measurement, pos = 0.001724 m 09:21:28 Stage Position Measurement, pos = -0.033900 m 09:21:28 Stage Position Measurement, pos = 0.515767 m 09:21:31 Move:node 1 absolute position = -0.033840 m 09:21:31 Stage Position Measurement, pos = 0.001724 m 09:21:31 Stage Position Measurement, pos = -0.033840 m 09:21:31 Stage Position Measurement, pos = 0.515767 m 09:21:35 Move:node 1 absolute position = -0.033779 m 09:21:35 Stage Position Measurement, pos = 0.001724 m 09:21:35 Stage Position Measurement, pos = -0.033779 m 09:21:35 Stage Position Measurement, pos = 0.515767 m 09:21:38 Move:node 1 absolute position = -0.033719 m 09:21:38 Stage Position Measurement, pos = 0.001724 m 09:21:38 Stage Position Measurement, pos = -0.033719 m 09:21:38 Stage Position Measurement, pos = 0.515766 m 09:21:42 Move:node 1 absolute position = -0.033660 m 09:21:42 Stage Position Measurement, pos = 0.001724 m 09:21:42 Stage Position Measurement, pos = -0.033660 m 09:21:42 Stage Position Measurement, pos = 0.515767 m 09:21:45 Move:node 1 absolute position = -0.033599 m 09:21:45 Stage Position Measurement, pos = 0.001724 m 09:21:45 Stage Position Measurement, pos = -0.033599 m 09:21:45 Stage Position Measurement, pos = 0.515767 m 09:21:49 Move:node 1 absolute position = -0.033539 m 09:21:49 Stage Position Measurement, pos = 0.001724 m 09:21:49 Stage Position Measurement, pos = -0.033539 m 09:21:49 Stage Position Measurement, pos = 0.515766 m 09:21:52 Move:node 1 absolute position = -0.033480 m 09:21:52 Stage Position Measurement, pos = 0.001724 m 09:21:52 Stage Position Measurement, pos = -0.033480 m 09:21:52 Stage Position Measurement, pos = 0.515766 m 09:21:55 Move:node 1 absolute position = -0.033419 m 09:21:55 Stage Position Measurement, pos = 0.001724 m 09:21:56 Stage Position Measurement, pos = -0.033419 m 09:21:56 Stage Position Measurement, pos = 0.515767 m 09:21:59 Move:node 1 absolute position = -0.033360 m 09:21:59 Stage Position Measurement, pos = 0.001724 m 09:21:59 Stage Position Measurement, pos = -0.033360 m 09:21:59 Stage Position Measurement, pos = 0.515766 m 09:22:02 Move:node 1 absolute position = -0.033300 m 09:22:02 Stage Position Measurement, pos = 0.001724 m 09:22:02 Stage Position Measurement, pos = -0.033300 m 09:22:02 Stage Position Measurement, pos = 0.515766 m 09:22:06 Move:node 1 absolute position = -0.033239 m 09:22:06 Stage Position Measurement, pos = 0.001724 m 09:22:06 Stage Position Measurement, pos = -0.033239 m 09:22:06 Stage Position Measurement, pos = 0.515767 m 09:22:09 Move:node 1 absolute position = -0.033179 m 09:22:09 Stage Position Measurement, pos = 0.001724 m 09:22:09 Stage Position Measurement, pos = -0.033179 m 09:22:09 Stage Position Measurement, pos = 0.515766 m 09:22:13 Move:node 1 absolute position = -0.033120 m 09:22:13 Stage Position Measurement, pos = 0.001724 m 09:22:13 Stage Position Measurement, pos = -0.033119 m 09:22:13 Stage Position Measurement, pos = 0.515767 m 09:22:16 Move:node 1 absolute position = -0.033059 m 09:22:16 Stage Position Measurement, pos = 0.001724 m 09:22:16 Stage Position Measurement, pos = -0.033059 m 09:22:16 Stage Position Measurement, pos = 0.515766 m 09:22:19 Move:node 1 absolute position = -0.033000 m 09:22:20 Stage Position Measurement, pos = 0.001724 m 09:22:20 Stage Position Measurement, pos = -0.033000 m 09:22:20 Stage Position Measurement, pos = 0.515767 m 09:22:23 Move:node 1 absolute position = -0.032939 m 09:22:23 Stage Position Measurement, pos = 0.001724 m 09:22:23 Stage Position Measurement, pos = -0.032939 m 09:22:23 Stage Position Measurement, pos = 0.515767 m PolyFit: -108.739976 304.441192 -282.378498 86.827913, Error = 0.000000 Max position = -0.03306809:22:26 Move:node 1 absolute position = -0.033068 m 09:22:27 Stage Position Measurement, pos = 0.001724 m 09:22:27 Stage Position Measurement, pos = -0.033068 m 09:22:27 Stage Position Measurement, pos = 0.515767 m 09:22:29 Stage Position Measurement, pos = 0.001724 m 09:22:29 Stage Position Measurement, pos = -0.033068 m 09:22:29 Stage Position Measurement, pos = 0.515767 m 09:22:32 Move:node 2 absolute position = 0.000724 m 09:22:32 Stage Position Measurement, pos = 0.000724 m 09:22:32 Stage Position Measurement, pos = -0.033068 m 09:22:32 Stage Position Measurement, pos = 0.515767 m 09:22:36 Move:node 2 absolute position = 0.000744 m 09:22:36 Stage Position Measurement, pos = 0.000744 m 09:22:36 Stage Position Measurement, pos = -0.033068 m 09:22:36 Stage Position Measurement, pos = 0.515767 m 09:22:39 Move:node 2 absolute position = 0.000764 m 09:22:39 Stage Position Measurement, pos = 0.000764 m 09:22:39 Stage Position Measurement, pos = -0.033068 m 09:22:39 Stage Position Measurement, pos = 0.515766 m 09:22:43 Move:node 2 absolute position = 0.000784 m 09:22:43 Stage Position Measurement, pos = 0.000784 m 09:22:43 Stage Position Measurement, pos = -0.033068 m 09:22:43 Stage Position Measurement, pos = 0.515767 m 09:22:46 Move:node 2 absolute position = 0.000804 m 09:22:46 Stage Position Measurement, pos = 0.000804 m 09:22:46 Stage Position Measurement, pos = -0.033068 m 09:22:46 Stage Position Measurement, pos = 0.515766 m 09:22:50 Move:node 2 absolute position = 0.000824 m 09:22:50 Stage Position Measurement, pos = 0.000824 m 09:22:50 Stage Position Measurement, pos = -0.033068 m 09:22:50 Stage Position Measurement, pos = 0.515767 m 09:22:54 Move:node 2 absolute position = 0.000844 m 09:22:54 Stage Position Measurement, pos = 0.000844 m 09:22:54 Stage Position Measurement, pos = -0.033068 m 09:22:54 Stage Position Measurement, pos = 0.515767 m 09:22:57 Move:node 2 absolute position = 0.000864 m 09:22:57 Stage Position Measurement, pos = 0.000864 m 09:22:57 Stage Position Measurement, pos = -0.033068 m 09:22:57 Stage Position Measurement, pos = 0.515767 m 09:23:01 Move:node 2 absolute position = 0.000884 m 09:23:01 Stage Position Measurement, pos = 0.000884 m 09:23:01 Stage Position Measurement, pos = -0.033068 m 09:23:01 Stage Position Measurement, pos = 0.515767 m 09:23:04 Move:node 2 absolute position = 0.000904 m 09:23:04 Stage Position Measurement, pos = 0.000904 m 09:23:04 Stage Position Measurement, pos = -0.033068 m 09:23:04 Stage Position Measurement, pos = 0.515767 m 09:23:07 Move:node 2 absolute position = 0.000924 m 09:23:07 Stage Position Measurement, pos = 0.000924 m 09:23:07 Stage Position Measurement, pos = -0.033068 m 09:23:07 Stage Position Measurement, pos = 0.515767 m 09:23:11 Move:node 2 absolute position = 0.000944 m 09:23:11 Stage Position Measurement, pos = 0.000944 m 09:23:11 Stage Position Measurement, pos = -0.033068 m 09:23:11 Stage Position Measurement, pos = 0.515766 m 09:23:14 Move:node 2 absolute position = 0.000964 m 09:23:14 Stage Position Measurement, pos = 0.000964 m 09:23:14 Stage Position Measurement, pos = -0.033068 m 09:23:14 Stage Position Measurement, pos = 0.515767 m 09:23:18 Move:node 2 absolute position = 0.000984 m 09:23:18 Stage Position Measurement, pos = 0.000984 m 09:23:18 Stage Position Measurement, pos = -0.033068 m 09:23:18 Stage Position Measurement, pos = 0.515766 m 09:23:21 Move:node 2 absolute position = 0.001004 m 09:23:21 Stage Position Measurement, pos = 0.001004 m 09:23:21 Stage Position Measurement, pos = -0.033068 m 09:23:21 Stage Position Measurement, pos = 0.515767 m 09:23:25 Move:node 2 absolute position = 0.001024 m 09:23:25 Stage Position Measurement, pos = 0.001024 m 09:23:25 Stage Position Measurement, pos = -0.033068 m 09:23:25 Stage Position Measurement, pos = 0.515767 m 09:23:28 Move:node 2 absolute position = 0.001044 m 09:23:28 Stage Position Measurement, pos = 0.001044 m 09:23:29 Stage Position Measurement, pos = -0.033068 m 09:23:29 Stage Position Measurement, pos = 0.515767 m 09:23:32 Move:node 2 absolute position = 0.001064 m 09:23:32 Stage Position Measurement, pos = 0.001064 m 09:23:32 Stage Position Measurement, pos = -0.033068 m 09:23:32 Stage Position Measurement, pos = 0.515766 m 09:23:37 Move:node 2 absolute position = 0.001084 m 09:23:37 Stage Position Measurement, pos = 0.001084 m 09:23:37 Stage Position Measurement, pos = -0.033068 m 09:23:37 Stage Position Measurement, pos = 0.515767 m 09:23:41 Move:node 2 absolute position = 0.001104 m 09:23:41 Stage Position Measurement, pos = 0.001104 m 09:23:41 Stage Position Measurement, pos = -0.033068 m 09:23:41 Stage Position Measurement, pos = 0.515767 m Linear fit Error = 0.00000009:23:44 Move:node 2 absolute position = 0.000902 m 09:23:45 Stage Position Measurement, pos = 0.000902 m 09:23:45 Stage Position Measurement, pos = -0.033068 m 09:23:45 Stage Position Measurement, pos = 0.515767 m 09:23:47 Stage Position Measurement, pos = 0.000903 m 09:23:47 Stage Position Measurement, pos = -0.033068 m 09:23:47 Stage Position Measurement, pos = 0.515766 m 09:23:59 Move:node 1 absolute position = 0.000000 m 09:24:00 Stage Position Measurement, pos = 0.000000 m 09:24:02 Move:node 2 absolute position = -0.000000 m 09:24:03 Move:node 0 absolute position = 0.000000 m 09:25:03 Move:node 0 absolute position = 1.353545 m 09:25:03 Stage Position Measurement, pos = 0.000000 m 09:25:03 Stage Position Measurement, pos = 0.000000 m 09:25:03 Stage Position Measurement, pos = 1.353545 m 09:25:10 Move:node 1 absolute position = -0.024931 m 09:25:10 Stage Position Measurement, pos = -0.000000 m 09:25:10 Stage Position Measurement, pos = -0.024931 m 09:25:10 Stage Position Measurement, pos = 1.353546 m 09:25:12 Move:node 2 absolute position = 0.000383 m 09:25:12 Stage Position Measurement, pos = 0.000383 m 09:25:12 Stage Position Measurement, pos = -0.024931 m 09:25:12 Stage Position Measurement, pos = 1.353546 m 09:25:31 Stage Position Measurement, pos = 0.000383 m 09:25:31 Stage Position Measurement, pos = -0.024931 m 09:25:31 Stage Position Measurement, pos = 1.353546 m 09:25:33 Move:node 2 absolute position = -0.000417 m 09:25:33 Stage Position Measurement, pos = -0.000417 m 09:25:33 Stage Position Measurement, pos = -0.024931 m 09:25:33 Stage Position Measurement, pos = 1.353546 m 09:25:35 Move:node 0 absolute position = 1.352546 m 09:25:36 Stage Position Measurement, pos = -0.000417 m 09:25:36 Stage Position Measurement, pos = -0.024931 m 09:25:36 Stage Position Measurement, pos = 1.352546 m 09:25:39 Move:node 0 absolute position = 1.352646 m 09:25:39 Stage Position Measurement, pos = -0.000417 m 09:25:39 Stage Position Measurement, pos = -0.024931 m 09:25:39 Stage Position Measurement, pos = 1.352646 m 09:25:42 Move:node 0 absolute position = 1.352746 m 09:25:42 Stage Position Measurement, pos = -0.000417 m 09:25:42 Stage Position Measurement, pos = -0.024931 m 09:25:42 Stage Position Measurement, pos = 1.352746 m 09:25:46 Move:node 0 absolute position = 1.352846 m 09:25:46 Stage Position Measurement, pos = -0.000417 m 09:25:46 Stage Position Measurement, pos = -0.024931 m 09:25:46 Stage Position Measurement, pos = 1.352846 m 09:25:49 Move:node 0 absolute position = 1.352946 m 09:25:49 Stage Position Measurement, pos = -0.000417 m 09:25:49 Stage Position Measurement, pos = -0.024931 m 09:25:49 Stage Position Measurement, pos = 1.352946 m 09:25:54 Move:node 0 absolute position = 1.353046 m 09:25:54 Stage Position Measurement, pos = -0.000417 m 09:25:54 Stage Position Measurement, pos = -0.024931 m 09:25:54 Stage Position Measurement, pos = 1.353046 m 09:25:58 Move:node 0 absolute position = 1.353146 m 09:25:58 Stage Position Measurement, pos = -0.000417 m 09:25:58 Stage Position Measurement, pos = -0.024931 m 09:25:58 Stage Position Measurement, pos = 1.353146 m 09:26:01 Move:node 0 absolute position = 1.353246 m 09:26:01 Stage Position Measurement, pos = -0.000417 m 09:26:01 Stage Position Measurement, pos = -0.024931 m 09:26:01 Stage Position Measurement, pos = 1.353246 m 09:26:04 Move:node 0 absolute position = 1.353346 m 09:26:05 Stage Position Measurement, pos = -0.000417 m 09:26:05 Stage Position Measurement, pos = -0.024931 m 09:26:05 Stage Position Measurement, pos = 1.353346 m 09:26:08 Move:node 0 absolute position = 1.353446 m 09:26:08 Stage Position Measurement, pos = -0.000417 m 09:26:08 Stage Position Measurement, pos = -0.024931 m 09:26:08 Stage Position Measurement, pos = 1.353446 m 09:26:12 Move:node 0 absolute position = 1.353546 m 09:26:12 Stage Position Measurement, pos = -0.000417 m 09:26:12 Stage Position Measurement, pos = -0.024931 m 09:26:12 Stage Position Measurement, pos = 1.353546 m 09:26:15 Move:node 0 absolute position = 1.353646 m 09:26:15 Stage Position Measurement, pos = -0.000417 m 09:26:15 Stage Position Measurement, pos = -0.024931 m 09:26:15 Stage Position Measurement, pos = 1.353646 m 09:26:19 Move:node 0 absolute position = 1.353746 m 09:26:19 Stage Position Measurement, pos = -0.000417 m 09:26:19 Stage Position Measurement, pos = -0.024931 m 09:26:20 Stage Position Measurement, pos = 1.353746 m 09:26:23 Move:node 0 absolute position = 1.353846 m 09:26:23 Stage Position Measurement, pos = -0.000417 m 09:26:23 Stage Position Measurement, pos = -0.024931 m 09:26:23 Stage Position Measurement, pos = 1.353846 m 09:26:27 Move:node 0 absolute position = 1.353946 m 09:26:27 Stage Position Measurement, pos = -0.000417 m 09:26:27 Stage Position Measurement, pos = -0.024931 m 09:26:27 Stage Position Measurement, pos = 1.353946 m 09:26:30 Move:node 0 absolute position = 1.354046 m 09:26:30 Stage Position Measurement, pos = -0.000417 m 09:26:30 Stage Position Measurement, pos = -0.024931 m 09:26:30 Stage Position Measurement, pos = 1.354046 m 09:26:34 Move:node 0 absolute position = 1.354146 m 09:26:34 Stage Position Measurement, pos = -0.000417 m 09:26:34 Stage Position Measurement, pos = -0.024931 m 09:26:34 Stage Position Measurement, pos = 1.354146 m 09:26:37 Move:node 0 absolute position = 1.354246 m 09:26:38 Stage Position Measurement, pos = -0.000417 m 09:26:38 Stage Position Measurement, pos = -0.024931 m 09:26:38 Stage Position Measurement, pos = 1.354246 m 09:26:41 Move:node 0 absolute position = 1.354346 m 09:26:41 Stage Position Measurement, pos = -0.000417 m 09:26:41 Stage Position Measurement, pos = -0.024931 m 09:26:41 Stage Position Measurement, pos = 1.354346 m 09:26:45 Move:node 0 absolute position = 1.354446 m 09:26:45 Stage Position Measurement, pos = -0.000417 m 09:26:45 Stage Position Measurement, pos = -0.024931 m 09:26:45 Stage Position Measurement, pos = 1.354446 m PolyFit: -6755332.754307 20242813.611500 -20219568.889448 6732088.191686, Error = 0.000000 Max position = 1.35320609:26:49 Move:node 0 absolute position = 1.353206 m 09:26:49 Stage Position Measurement, pos = -0.000417 m 09:26:49 Stage Position Measurement, pos = -0.024931 m 09:26:49 Stage Position Measurement, pos = 1.353206 m 09:26:52 Stage Position Measurement, pos = -0.000417 m 09:26:53 Stage Position Measurement, pos = -0.024931 m 09:26:53 Stage Position Measurement, pos = 1.353206 m 09:26:55 Move:node 1 absolute position = -0.025531 m 09:26:55 Stage Position Measurement, pos = -0.000417 m 09:26:55 Stage Position Measurement, pos = -0.025531 m 09:26:55 Stage Position Measurement, pos = 1.353206 m 09:26:59 Move:node 1 absolute position = -0.025471 m 09:26:59 Stage Position Measurement, pos = -0.000417 m 09:26:59 Stage Position Measurement, pos = -0.025471 m 09:26:59 Stage Position Measurement, pos = 1.353206 m 09:27:02 Move:node 1 absolute position = -0.025411 m 09:27:02 Stage Position Measurement, pos = -0.000417 m 09:27:02 Stage Position Measurement, pos = -0.025411 m 09:27:02 Stage Position Measurement, pos = 1.353206 m 09:27:06 Move:node 1 absolute position = -0.025351 m 09:27:06 Stage Position Measurement, pos = -0.000417 m 09:27:06 Stage Position Measurement, pos = -0.025351 m 09:27:06 Stage Position Measurement, pos = 1.353206 m 09:27:09 Move:node 1 absolute position = -0.025291 m 09:27:09 Stage Position Measurement, pos = -0.000417 m 09:27:09 Stage Position Measurement, pos = -0.025291 m 09:27:09 Stage Position Measurement, pos = 1.353206 m 09:27:12 Move:node 1 absolute position = -0.025231 m 09:27:12 Stage Position Measurement, pos = -0.000417 m 09:27:13 Stage Position Measurement, pos = -0.025231 m 09:27:13 Stage Position Measurement, pos = 1.353206 m 09:27:17 Move:node 1 absolute position = -0.025171 m 09:27:17 Stage Position Measurement, pos = -0.000417 m 09:27:17 Stage Position Measurement, pos = -0.025171 m 09:27:17 Stage Position Measurement, pos = 1.353206 m 09:27:20 Move:node 1 absolute position = -0.025111 m 09:27:20 Stage Position Measurement, pos = -0.000417 m 09:27:20 Stage Position Measurement, pos = -0.025111 m 09:27:20 Stage Position Measurement, pos = 1.353206 m 09:27:24 Move:node 1 absolute position = -0.025051 m 09:27:24 Stage Position Measurement, pos = -0.000417 m 09:27:24 Stage Position Measurement, pos = -0.025051 m 09:27:24 Stage Position Measurement, pos = 1.353206 m 09:27:27 Move:node 1 absolute position = -0.024991 m 09:27:27 Stage Position Measurement, pos = -0.000417 m 09:27:27 Stage Position Measurement, pos = -0.024991 m 09:27:27 Stage Position Measurement, pos = 1.353206 m 09:27:30 Move:node 1 absolute position = -0.024931 m 09:27:30 Stage Position Measurement, pos = -0.000417 m 09:27:30 Stage Position Measurement, pos = -0.024931 m 09:27:31 Stage Position Measurement, pos = 1.353206 m 09:27:34 Move:node 1 absolute position = -0.024871 m 09:27:34 Stage Position Measurement, pos = -0.000417 m 09:27:34 Stage Position Measurement, pos = -0.024871 m 09:27:34 Stage Position Measurement, pos = 1.353206 m 09:27:38 Move:node 1 absolute position = -0.024811 m 09:27:38 Stage Position Measurement, pos = -0.000417 m 09:27:38 Stage Position Measurement, pos = -0.024811 m 09:27:38 Stage Position Measurement, pos = 1.353206 m 09:27:41 Move:node 1 absolute position = -0.024751 m 09:27:41 Stage Position Measurement, pos = -0.000417 m 09:27:41 Stage Position Measurement, pos = -0.024751 m 09:27:41 Stage Position Measurement, pos = 1.353206 m 09:27:45 Move:node 1 absolute position = -0.024691 m 09:27:45 Stage Position Measurement, pos = -0.000417 m 09:27:45 Stage Position Measurement, pos = -0.024691 m 09:27:45 Stage Position Measurement, pos = 1.353206 m 09:27:48 Move:node 1 absolute position = -0.024631 m 09:27:48 Stage Position Measurement, pos = -0.000417 m 09:27:48 Stage Position Measurement, pos = -0.024631 m 09:27:48 Stage Position Measurement, pos = 1.353206 m 09:27:52 Move:node 1 absolute position = -0.024571 m 09:27:52 Stage Position Measurement, pos = -0.000417 m 09:27:52 Stage Position Measurement, pos = -0.024571 m 09:27:52 Stage Position Measurement, pos = 1.353206 m 09:27:55 Move:node 1 absolute position = -0.024511 m 09:27:55 Stage Position Measurement, pos = -0.000417 m 09:27:55 Stage Position Measurement, pos = -0.024511 m 09:27:55 Stage Position Measurement, pos = 1.353206 m 09:27:59 Move:node 1 absolute position = -0.024451 m 09:27:59 Stage Position Measurement, pos = -0.000417 m 09:27:59 Stage Position Measurement, pos = -0.024451 m 09:27:59 Stage Position Measurement, pos = 1.353206 m 09:28:02 Move:node 1 absolute position = -0.024391 m 09:28:02 Stage Position Measurement, pos = -0.000417 m 09:28:02 Stage Position Measurement, pos = -0.024391 m 09:28:02 Stage Position Measurement, pos = 1.353206 m PolyFit: -61.866757 168.636435 -151.591532 45.008219, Error = 0.000000 Max position = -0.02476609:28:06 Move:node 1 absolute position = -0.024766 m 09:28:06 Stage Position Measurement, pos = -0.000417 m 09:28:06 Stage Position Measurement, pos = -0.024766 m 09:28:06 Stage Position Measurement, pos = 1.353206 m 09:28:09 Stage Position Measurement, pos = -0.000417 m 09:28:09 Stage Position Measurement, pos = -0.024766 m 09:28:09 Stage Position Measurement, pos = 1.353206 m 09:28:11 Move:node 2 absolute position = 0.000183 m 09:28:11 Stage Position Measurement, pos = 0.000183 m 09:28:11 Stage Position Measurement, pos = -0.024766 m 09:28:11 Stage Position Measurement, pos = 1.353206 m 09:28:15 Move:node 2 absolute position = 0.000203 m 09:28:15 Stage Position Measurement, pos = 0.000203 m 09:28:15 Stage Position Measurement, pos = -0.024766 m 09:28:15 Stage Position Measurement, pos = 1.353206 m 09:28:18 Move:node 2 absolute position = 0.000223 m 09:28:18 Stage Position Measurement, pos = 0.000223 m 09:28:18 Stage Position Measurement, pos = -0.024766 m 09:28:18 Stage Position Measurement, pos = 1.353206 m 09:28:22 Move:node 2 absolute position = 0.000243 m 09:28:22 Stage Position Measurement, pos = 0.000243 m 09:28:22 Stage Position Measurement, pos = -0.024766 m 09:28:22 Stage Position Measurement, pos = 1.353206 m 09:28:25 Move:node 2 absolute position = 0.000263 m 09:28:25 Stage Position Measurement, pos = 0.000263 m 09:28:25 Stage Position Measurement, pos = -0.024766 m 09:28:25 Stage Position Measurement, pos = 1.353206 m 09:28:29 Move:node 2 absolute position = 0.000283 m 09:28:29 Stage Position Measurement, pos = 0.000283 m 09:28:29 Stage Position Measurement, pos = -0.024767 m 09:28:29 Stage Position Measurement, pos = 1.353206 m 09:28:32 Move:node 2 absolute position = 0.000303 m 09:28:33 Stage Position Measurement, pos = 0.000303 m 09:28:33 Stage Position Measurement, pos = -0.024766 m 09:28:33 Stage Position Measurement, pos = 1.353206 m 09:28:36 Move:node 2 absolute position = 0.000323 m 09:28:36 Stage Position Measurement, pos = 0.000323 m 09:28:36 Stage Position Measurement, pos = -0.024766 m 09:28:37 Stage Position Measurement, pos = 1.353206 m 09:28:40 Move:node 2 absolute position = 0.000343 m 09:28:40 Stage Position Measurement, pos = 0.000343 m 09:28:40 Stage Position Measurement, pos = -0.024767 m 09:28:40 Stage Position Measurement, pos = 1.353206 m 09:28:44 Move:node 2 absolute position = 0.000363 m 09:28:44 Stage Position Measurement, pos = 0.000363 m 09:28:44 Stage Position Measurement, pos = -0.024767 m 09:28:44 Stage Position Measurement, pos = 1.353206 m 09:28:47 Move:node 2 absolute position = 0.000383 m 09:28:47 Stage Position Measurement, pos = 0.000383 m 09:28:47 Stage Position Measurement, pos = -0.024766 m 09:28:47 Stage Position Measurement, pos = 1.353206 m 09:28:51 Move:node 2 absolute position = 0.000403 m 09:28:51 Stage Position Measurement, pos = 0.000403 m 09:28:51 Stage Position Measurement, pos = -0.024766 m 09:28:51 Stage Position Measurement, pos = 1.353206 m 09:28:55 Move:node 2 absolute position = 0.000423 m 09:28:55 Stage Position Measurement, pos = 0.000423 m 09:28:55 Stage Position Measurement, pos = -0.024766 m 09:28:55 Stage Position Measurement, pos = 1.353206 m 09:28:58 Move:node 2 absolute position = 0.000443 m 09:28:58 Stage Position Measurement, pos = 0.000443 m 09:28:58 Stage Position Measurement, pos = -0.024766 m 09:28:58 Stage Position Measurement, pos = 1.353206 m 09:29:03 Move:node 2 absolute position = 0.000463 m 09:29:04 Stage Position Measurement, pos = 0.000463 m 09:29:04 Stage Position Measurement, pos = -0.024766 m 09:29:04 Stage Position Measurement, pos = 1.353206 m 09:29:07 Move:node 2 absolute position = 0.000483 m 09:29:07 Stage Position Measurement, pos = 0.000483 m 09:29:07 Stage Position Measurement, pos = -0.024767 m 09:29:07 Stage Position Measurement, pos = 1.353206 m 09:29:11 Move:node 2 absolute position = 0.000503 m 09:29:11 Stage Position Measurement, pos = 0.000503 m 09:29:11 Stage Position Measurement, pos = -0.024766 m 09:29:11 Stage Position Measurement, pos = 1.353206 m 09:29:14 Move:node 2 absolute position = 0.000523 m 09:29:15 Stage Position Measurement, pos = 0.000523 m 09:29:15 Stage Position Measurement, pos = -0.024766 m 09:29:15 Stage Position Measurement, pos = 1.353206 m 09:29:18 Move:node 2 absolute position = 0.000543 m 09:29:18 Stage Position Measurement, pos = 0.000543 m 09:29:18 Stage Position Measurement, pos = -0.024767 m 09:29:18 Stage Position Measurement, pos = 1.353206 m 09:29:22 Move:node 2 absolute position = 0.000563 m 09:29:22 Stage Position Measurement, pos = 0.000563 m 09:29:22 Stage Position Measurement, pos = -0.024766 m 09:29:22 Stage Position Measurement, pos = 1.353206 m Linear fit Error = 0.00000009:29:25 Move:node 2 absolute position = 0.000533 m 09:29:25 Stage Position Measurement, pos = 0.000533 m 09:29:25 Stage Position Measurement, pos = -0.024766 m 09:29:25 Stage Position Measurement, pos = 1.353206 m 09:29:28 Stage Position Measurement, pos = 0.000533 m 09:29:28 Stage Position Measurement, pos = -0.024766 m 09:29:28 Stage Position Measurement, pos = 1.353206 m 09:29:30 Move:node 2 absolute position = 0.001333 m 09:29:30 Stage Position Measurement, pos = 0.001333 m 09:29:30 Stage Position Measurement, pos = -0.024767 m 09:29:30 Stage Position Measurement, pos = 1.353206 m 09:29:32 Move:node 0 absolute position = 1.352206 m 09:29:32 Stage Position Measurement, pos = 0.001333 m 09:29:32 Stage Position Measurement, pos = -0.024766 m 09:29:32 Stage Position Measurement, pos = 1.352206 m 09:29:36 Move:node 0 absolute position = 1.352306 m 09:29:36 Stage Position Measurement, pos = 0.001333 m 09:29:36 Stage Position Measurement, pos = -0.024766 m 09:29:36 Stage Position Measurement, pos = 1.352306 m 09:29:39 Move:node 0 absolute position = 1.352406 m 09:29:39 Stage Position Measurement, pos = 0.001333 m 09:29:39 Stage Position Measurement, pos = -0.024766 m 09:29:39 Stage Position Measurement, pos = 1.352406 m 09:29:42 Move:node 0 absolute position = 1.352506 m 09:29:42 Stage Position Measurement, pos = 0.001333 m 09:29:42 Stage Position Measurement, pos = -0.024766 m 09:29:42 Stage Position Measurement, pos = 1.352506 m 09:29:46 Move:node 0 absolute position = 1.352606 m 09:29:46 Stage Position Measurement, pos = 0.001333 m 09:29:46 Stage Position Measurement, pos = -0.024766 m 09:29:46 Stage Position Measurement, pos = 1.352606 m 09:29:49 Move:node 0 absolute position = 1.352706 m 09:29:49 Stage Position Measurement, pos = 0.001333 m 09:29:49 Stage Position Measurement, pos = -0.024767 m 09:29:49 Stage Position Measurement, pos = 1.352706 m 09:29:53 Move:node 0 absolute position = 1.352806 m 09:29:53 Stage Position Measurement, pos = 0.001333 m 09:29:53 Stage Position Measurement, pos = -0.024767 m 09:29:53 Stage Position Measurement, pos = 1.352806 m 09:29:56 Move:node 0 absolute position = 1.352906 m 09:29:56 Stage Position Measurement, pos = 0.001333 m 09:29:56 Stage Position Measurement, pos = -0.024766 m 09:29:56 Stage Position Measurement, pos = 1.352906 m 09:30:00 Move:node 0 absolute position = 1.353006 m 09:30:00 Stage Position Measurement, pos = 0.001333 m 09:30:00 Stage Position Measurement, pos = -0.024767 m 09:30:00 Stage Position Measurement, pos = 1.353006 m 09:30:03 Move:node 0 absolute position = 1.353106 m 09:30:03 Stage Position Measurement, pos = 0.001333 m 09:30:03 Stage Position Measurement, pos = -0.024767 m 09:30:03 Stage Position Measurement, pos = 1.353106 m 09:30:06 Move:node 0 absolute position = 1.353206 m 09:30:06 Stage Position Measurement, pos = 0.001333 m 09:30:06 Stage Position Measurement, pos = -0.024766 m 09:30:06 Stage Position Measurement, pos = 1.353206 m 09:30:10 Move:node 0 absolute position = 1.353306 m 09:30:10 Stage Position Measurement, pos = 0.001333 m 09:30:10 Stage Position Measurement, pos = -0.024766 m 09:30:10 Stage Position Measurement, pos = 1.353306 m 09:30:13 Move:node 0 absolute position = 1.353406 m 09:30:13 Stage Position Measurement, pos = 0.001333 m 09:30:13 Stage Position Measurement, pos = -0.024766 m 09:30:13 Stage Position Measurement, pos = 1.353406 m 09:30:17 Move:node 0 absolute position = 1.353506 m 09:30:17 Stage Position Measurement, pos = 0.001333 m 09:30:17 Stage Position Measurement, pos = -0.024767 m 09:30:17 Stage Position Measurement, pos = 1.353506 m 09:30:20 Move:node 0 absolute position = 1.353606 m 09:30:20 Stage Position Measurement, pos = 0.001333 m 09:30:20 Stage Position Measurement, pos = -0.024767 m 09:30:20 Stage Position Measurement, pos = 1.353606 m 09:30:23 Move:node 0 absolute position = 1.353706 m 09:30:23 Stage Position Measurement, pos = 0.001333 m 09:30:23 Stage Position Measurement, pos = -0.024767 m 09:30:23 Stage Position Measurement, pos = 1.353706 m 09:30:27 Move:node 0 absolute position = 1.353806 m 09:30:27 Stage Position Measurement, pos = 0.001333 m 09:30:27 Stage Position Measurement, pos = -0.024767 m 09:30:27 Stage Position Measurement, pos = 1.353806 m 09:30:30 Move:node 0 absolute position = 1.353906 m 09:30:30 Stage Position Measurement, pos = 0.001333 m 09:30:30 Stage Position Measurement, pos = -0.024766 m 09:30:30 Stage Position Measurement, pos = 1.353906 m 09:30:34 Move:node 0 absolute position = 1.354006 m 09:30:34 Stage Position Measurement, pos = 0.001333 m 09:30:34 Stage Position Measurement, pos = -0.024766 m 09:30:34 Stage Position Measurement, pos = 1.354006 m 09:30:37 Move:node 0 absolute position = 1.354106 m 09:30:37 Stage Position Measurement, pos = 0.001333 m 09:30:37 Stage Position Measurement, pos = -0.024766 m 09:30:37 Stage Position Measurement, pos = 1.354106 m PolyFit: -1400159.635749 4170145.063794 -4139760.770591 1369775.480598, Error = 0.000000 Max position = 1.35304909:30:40 Move:node 0 absolute position = 1.353049 m 09:30:40 Stage Position Measurement, pos = 0.001333 m 09:30:40 Stage Position Measurement, pos = -0.024767 m 09:30:40 Stage Position Measurement, pos = 1.353049 m 09:30:43 Stage Position Measurement, pos = 0.001333 m 09:30:43 Stage Position Measurement, pos = -0.024766 m 09:30:43 Stage Position Measurement, pos = 1.353049 m 09:30:45 Move:node 1 absolute position = -0.025366 m 09:30:45 Stage Position Measurement, pos = 0.001333 m 09:30:45 Stage Position Measurement, pos = -0.025366 m 09:30:45 Stage Position Measurement, pos = 1.353049 m 09:30:49 Move:node 1 absolute position = -0.025306 m 09:30:49 Stage Position Measurement, pos = 0.001333 m 09:30:49 Stage Position Measurement, pos = -0.025306 m 09:30:49 Stage Position Measurement, pos = 1.353049 m 09:30:52 Move:node 1 absolute position = -0.025247 m 09:30:52 Stage Position Measurement, pos = 0.001333 m 09:30:52 Stage Position Measurement, pos = -0.025246 m 09:30:52 Stage Position Measurement, pos = 1.353048 m 09:30:55 Move:node 1 absolute position = -0.025186 m 09:30:55 Stage Position Measurement, pos = 0.001333 m 09:30:55 Stage Position Measurement, pos = -0.025186 m 09:30:55 Stage Position Measurement, pos = 1.353049 m 09:30:59 Move:node 1 absolute position = -0.025126 m 09:30:59 Stage Position Measurement, pos = 0.001333 m 09:30:59 Stage Position Measurement, pos = -0.025126 m 09:30:59 Stage Position Measurement, pos = 1.353049 m 09:31:02 Move:node 1 absolute position = -0.025067 m 09:31:02 Stage Position Measurement, pos = 0.001333 m 09:31:02 Stage Position Measurement, pos = -0.025067 m 09:31:02 Stage Position Measurement, pos = 1.353048 m 09:31:06 Move:node 1 absolute position = -0.025006 m 09:31:06 Stage Position Measurement, pos = 0.001333 m 09:31:06 Stage Position Measurement, pos = -0.025006 m 09:31:06 Stage Position Measurement, pos = 1.353049 m 09:31:09 Move:node 1 absolute position = -0.024946 m 09:31:09 Stage Position Measurement, pos = 0.001333 m 09:31:09 Stage Position Measurement, pos = -0.024946 m 09:31:09 Stage Position Measurement, pos = 1.353049 m 09:31:12 Move:node 1 absolute position = -0.024886 m 09:31:12 Stage Position Measurement, pos = 0.001333 m 09:31:12 Stage Position Measurement, pos = -0.024886 m 09:31:12 Stage Position Measurement, pos = 1.353049 m 09:31:16 Move:node 1 absolute position = -0.024826 m 09:31:16 Stage Position Measurement, pos = 0.001333 m 09:31:16 Stage Position Measurement, pos = -0.024826 m 09:31:16 Stage Position Measurement, pos = 1.353049 m 09:31:19 Move:node 1 absolute position = -0.024766 m 09:31:19 Stage Position Measurement, pos = 0.001333 m 09:31:19 Stage Position Measurement, pos = -0.024766 m 09:31:19 Stage Position Measurement, pos = 1.353048 m 09:31:23 Move:node 1 absolute position = -0.024706 m 09:31:23 Stage Position Measurement, pos = 0.001333 m 09:31:23 Stage Position Measurement, pos = -0.024706 m 09:31:23 Stage Position Measurement, pos = 1.353048 m 09:31:26 Move:node 1 absolute position = -0.024646 m 09:31:26 Stage Position Measurement, pos = 0.001333 m 09:31:26 Stage Position Measurement, pos = -0.024646 m 09:31:26 Stage Position Measurement, pos = 1.353049 m 09:31:30 Move:node 1 absolute position = -0.024586 m 09:31:30 Stage Position Measurement, pos = 0.001333 m 09:31:30 Stage Position Measurement, pos = -0.024586 m 09:31:30 Stage Position Measurement, pos = 1.353049 m 09:31:33 Move:node 1 absolute position = -0.024526 m 09:31:33 Stage Position Measurement, pos = 0.001333 m 09:31:33 Stage Position Measurement, pos = -0.024526 m 09:31:33 Stage Position Measurement, pos = 1.353049 m 09:31:36 Move:node 1 absolute position = -0.024466 m 09:31:36 Stage Position Measurement, pos = 0.001333 m 09:31:36 Stage Position Measurement, pos = -0.024466 m 09:31:36 Stage Position Measurement, pos = 1.353049 m 09:31:40 Move:node 1 absolute position = -0.024407 m 09:31:40 Stage Position Measurement, pos = 0.001333 m 09:31:40 Stage Position Measurement, pos = -0.024407 m 09:31:40 Stage Position Measurement, pos = 1.353049 m 09:31:43 Move:node 1 absolute position = -0.024346 m 09:31:43 Stage Position Measurement, pos = 0.001333 m 09:31:43 Stage Position Measurement, pos = -0.024346 m 09:31:43 Stage Position Measurement, pos = 1.353048 m 09:31:47 Move:node 1 absolute position = -0.024286 m 09:31:47 Stage Position Measurement, pos = 0.001333 m 09:31:47 Stage Position Measurement, pos = -0.024286 m 09:31:47 Stage Position Measurement, pos = 1.353049 m 09:31:50 Move:node 1 absolute position = -0.024226 m 09:31:50 Stage Position Measurement, pos = 0.001333 m 09:31:50 Stage Position Measurement, pos = -0.024226 m 09:31:50 Stage Position Measurement, pos = 1.353048 m PolyFit: -14.033210 30.192161 -18.428249 2.419620, Error = 0.000000 Max position = -0.02487709:31:53 Move:node 1 absolute position = -0.024877 m 09:31:53 Stage Position Measurement, pos = 0.001333 m 09:31:53 Stage Position Measurement, pos = -0.024877 m 09:31:53 Stage Position Measurement, pos = 1.353049 m 09:31:56 Stage Position Measurement, pos = 0.001333 m 09:31:56 Stage Position Measurement, pos = -0.024877 m 09:31:56 Stage Position Measurement, pos = 1.353049 m 09:31:58 Move:node 2 absolute position = 0.000333 m 09:31:58 Stage Position Measurement, pos = 0.000333 m 09:31:58 Stage Position Measurement, pos = -0.024877 m 09:31:58 Stage Position Measurement, pos = 1.353048 m 09:32:02 Move:node 2 absolute position = 0.000353 m 09:32:02 Stage Position Measurement, pos = 0.000353 m 09:32:02 Stage Position Measurement, pos = -0.024877 m 09:32:02 Stage Position Measurement, pos = 1.353049 m 09:32:05 Move:node 2 absolute position = 0.000373 m 09:32:05 Stage Position Measurement, pos = 0.000373 m 09:32:05 Stage Position Measurement, pos = -0.024877 m 09:32:05 Stage Position Measurement, pos = 1.353049 m 09:32:08 Move:node 2 absolute position = 0.000393 m 09:32:08 Stage Position Measurement, pos = 0.000393 m 09:32:08 Stage Position Measurement, pos = -0.024877 m 09:32:08 Stage Position Measurement, pos = 1.353049 m 09:32:12 Move:node 2 absolute position = 0.000413 m 09:32:12 Stage Position Measurement, pos = 0.000413 m 09:32:12 Stage Position Measurement, pos = -0.024877 m 09:32:12 Stage Position Measurement, pos = 1.353048 m 09:32:15 Move:node 2 absolute position = 0.000433 m 09:32:15 Stage Position Measurement, pos = 0.000433 m 09:32:15 Stage Position Measurement, pos = -0.024877 m 09:32:15 Stage Position Measurement, pos = 1.353048 m 09:32:19 Move:node 2 absolute position = 0.000453 m 09:32:19 Stage Position Measurement, pos = 0.000453 m 09:32:19 Stage Position Measurement, pos = -0.024877 m 09:32:19 Stage Position Measurement, pos = 1.353048 m 09:32:22 Move:node 2 absolute position = 0.000473 m 09:32:22 Stage Position Measurement, pos = 0.000473 m 09:32:22 Stage Position Measurement, pos = -0.024877 m 09:32:22 Stage Position Measurement, pos = 1.353049 m 09:32:25 Move:node 2 absolute position = 0.000493 m 09:32:25 Stage Position Measurement, pos = 0.000493 m 09:32:25 Stage Position Measurement, pos = -0.024877 m 09:32:25 Stage Position Measurement, pos = 1.353049 m 09:32:29 Move:node 2 absolute position = 0.000513 m 09:32:29 Stage Position Measurement, pos = 0.000513 m 09:32:29 Stage Position Measurement, pos = -0.024877 m 09:32:29 Stage Position Measurement, pos = 1.353049 m 09:32:32 Move:node 2 absolute position = 0.000533 m 09:32:32 Stage Position Measurement, pos = 0.000533 m 09:32:32 Stage Position Measurement, pos = -0.024877 m 09:32:32 Stage Position Measurement, pos = 1.353049 m 09:32:36 Move:node 2 absolute position = 0.000553 m 09:32:36 Stage Position Measurement, pos = 0.000553 m 09:32:36 Stage Position Measurement, pos = -0.024877 m 09:32:36 Stage Position Measurement, pos = 1.353048 m 09:32:39 Move:node 2 absolute position = 0.000573 m 09:32:39 Stage Position Measurement, pos = 0.000573 m 09:32:39 Stage Position Measurement, pos = -0.024877 m 09:32:39 Stage Position Measurement, pos = 1.353048 m 09:32:42 Move:node 2 absolute position = 0.000593 m 09:32:42 Stage Position Measurement, pos = 0.000593 m 09:32:42 Stage Position Measurement, pos = -0.024877 m 09:32:42 Stage Position Measurement, pos = 1.353049 m 09:32:46 Move:node 2 absolute position = 0.000613 m 09:32:46 Stage Position Measurement, pos = 0.000613 m 09:32:46 Stage Position Measurement, pos = -0.024877 m 09:32:46 Stage Position Measurement, pos = 1.353048 m 09:32:49 Move:node 2 absolute position = 0.000633 m 09:32:49 Stage Position Measurement, pos = 0.000633 m 09:32:49 Stage Position Measurement, pos = -0.024877 m 09:32:49 Stage Position Measurement, pos = 1.353049 m 09:32:53 Move:node 2 absolute position = 0.000653 m 09:32:53 Stage Position Measurement, pos = 0.000653 m 09:32:53 Stage Position Measurement, pos = -0.024877 m 09:32:53 Stage Position Measurement, pos = 1.353049 m 09:32:56 Move:node 2 absolute position = 0.000673 m 09:32:56 Stage Position Measurement, pos = 0.000673 m 09:32:56 Stage Position Measurement, pos = -0.024877 m 09:32:56 Stage Position Measurement, pos = 1.353049 m 09:33:00 Move:node 2 absolute position = 0.000693 m 09:33:00 Stage Position Measurement, pos = 0.000693 m 09:33:00 Stage Position Measurement, pos = -0.024877 m 09:33:00 Stage Position Measurement, pos = 1.353048 m 09:33:03 Move:node 2 absolute position = 0.000713 m 09:33:03 Stage Position Measurement, pos = 0.000713 m 09:33:03 Stage Position Measurement, pos = -0.024877 m 09:33:03 Stage Position Measurement, pos = 1.353048 m Linear fit Error = 0.00000009:33:06 Move:node 2 absolute position = 0.000529 m 09:33:06 Stage Position Measurement, pos = 0.000529 m 09:33:06 Stage Position Measurement, pos = -0.024877 m 09:33:06 Stage Position Measurement, pos = 1.353049 m 09:33:09 Stage Position Measurement, pos = 0.000529 m 09:33:09 Stage Position Measurement, pos = -0.024877 m 09:33:09 Stage Position Measurement, pos = 1.353049 m 09:33:18 Move:node 1 absolute position = 0.000000 m 09:33:19 Stage Position Measurement, pos = 0.000000 m 09:33:21 Move:node 2 absolute position = 0.000000 m 09:33:22 Move:node 0 absolute position = 0.000000 m 09:34:11 Move:node 0 absolute position = 1.353127 m 09:34:11 Stage Position Measurement, pos = 0.000000 m 09:34:11 Stage Position Measurement, pos = 0.000000 m 09:34:11 Stage Position Measurement, pos = 1.353127 m 09:34:18 Move:node 1 absolute position = -0.024822 m 09:34:18 Stage Position Measurement, pos = 0.000000 m 09:34:18 Stage Position Measurement, pos = -0.024822 m 09:34:18 Stage Position Measurement, pos = 1.353127 m 09:34:20 Move:node 2 absolute position = 0.000531 m 09:34:20 Stage Position Measurement, pos = 0.000531 m 09:34:20 Stage Position Measurement, pos = -0.024822 m 09:34:20 Stage Position Measurement, pos = 1.353127 m 09:34:26 Stage Position Measurement, pos = 0.000531 m 09:34:26 Stage Position Measurement, pos = -0.024822 m 09:34:26 Stage Position Measurement, pos = 1.353127 m 09:34:29 Move:node 2 absolute position = -0.000269 m 09:34:29 Stage Position Measurement, pos = -0.000269 m 09:34:29 Stage Position Measurement, pos = -0.024822 m 09:34:29 Stage Position Measurement, pos = 1.353127 m 09:34:31 Move:node 0 absolute position = 1.352127 m 09:34:31 Stage Position Measurement, pos = -0.000269 m 09:34:31 Stage Position Measurement, pos = -0.024822 m 09:34:31 Stage Position Measurement, pos = 1.352127 m 09:34:34 Move:node 0 absolute position = 1.352227 m 09:34:34 Stage Position Measurement, pos = -0.000269 m 09:34:34 Stage Position Measurement, pos = -0.024822 m 09:34:34 Stage Position Measurement, pos = 1.352227 m 09:34:37 Move:node 0 absolute position = 1.352328 m 09:34:37 Stage Position Measurement, pos = -0.000269 m 09:34:37 Stage Position Measurement, pos = -0.024822 m 09:34:37 Stage Position Measurement, pos = 1.352327 m 09:34:41 Move:node 0 absolute position = 1.352427 m 09:34:41 Stage Position Measurement, pos = -0.000269 m 09:34:41 Stage Position Measurement, pos = -0.024822 m 09:34:41 Stage Position Measurement, pos = 1.352427 m 09:34:44 Move:node 0 absolute position = 1.352527 m 09:34:44 Stage Position Measurement, pos = -0.000269 m 09:34:44 Stage Position Measurement, pos = -0.024822 m 09:34:44 Stage Position Measurement, pos = 1.352527 m 09:34:48 Move:node 0 absolute position = 1.352627 m 09:34:48 Stage Position Measurement, pos = -0.000269 m 09:34:48 Stage Position Measurement, pos = -0.024822 m 09:34:48 Stage Position Measurement, pos = 1.352627 m 09:34:51 Move:node 0 absolute position = 1.352727 m 09:34:51 Stage Position Measurement, pos = -0.000269 m 09:34:51 Stage Position Measurement, pos = -0.024822 m 09:34:51 Stage Position Measurement, pos = 1.352727 m 09:34:54 Move:node 0 absolute position = 1.352827 m 09:34:54 Stage Position Measurement, pos = -0.000269 m 09:34:54 Stage Position Measurement, pos = -0.024822 m 09:34:54 Stage Position Measurement, pos = 1.352827 m 09:34:58 Move:node 0 absolute position = 1.352927 m 09:34:58 Stage Position Measurement, pos = -0.000269 m 09:34:58 Stage Position Measurement, pos = -0.024822 m 09:34:58 Stage Position Measurement, pos = 1.352927 m 09:35:01 Move:node 0 absolute position = 1.353027 m 09:35:01 Stage Position Measurement, pos = -0.000269 m 09:35:01 Stage Position Measurement, pos = -0.024822 m 09:35:01 Stage Position Measurement, pos = 1.353027 m 09:35:05 Move:node 0 absolute position = 1.353127 m 09:35:05 Stage Position Measurement, pos = -0.000269 m 09:35:05 Stage Position Measurement, pos = -0.024822 m 09:35:05 Stage Position Measurement, pos = 1.353127 m 09:35:08 Move:node 0 absolute position = 1.353227 m 09:35:08 Stage Position Measurement, pos = -0.000269 m 09:35:08 Stage Position Measurement, pos = -0.024822 m 09:35:08 Stage Position Measurement, pos = 1.353227 m 09:35:11 Move:node 0 absolute position = 1.353327 m 09:35:11 Stage Position Measurement, pos = -0.000269 m 09:35:11 Stage Position Measurement, pos = -0.024822 m 09:35:11 Stage Position Measurement, pos = 1.353327 m 09:35:15 Move:node 0 absolute position = 1.353427 m 09:35:15 Stage Position Measurement, pos = -0.000269 m 09:35:15 Stage Position Measurement, pos = -0.024822 m 09:35:15 Stage Position Measurement, pos = 1.353427 m 09:35:18 Move:node 0 absolute position = 1.353527 m 09:35:18 Stage Position Measurement, pos = -0.000269 m 09:35:18 Stage Position Measurement, pos = -0.024822 m 09:35:18 Stage Position Measurement, pos = 1.353527 m 09:35:22 Move:node 0 absolute position = 1.353627 m 09:35:22 Stage Position Measurement, pos = -0.000269 m 09:35:22 Stage Position Measurement, pos = -0.024822 m 09:35:22 Stage Position Measurement, pos = 1.353627 m 09:35:25 Move:node 0 absolute position = 1.353727 m 09:35:25 Stage Position Measurement, pos = -0.000269 m 09:35:25 Stage Position Measurement, pos = -0.024822 m 09:35:25 Stage Position Measurement, pos = 1.353727 m 09:35:29 Move:node 0 absolute position = 1.353827 m 09:35:29 Stage Position Measurement, pos = -0.000269 m 09:35:29 Stage Position Measurement, pos = -0.024822 m 09:35:29 Stage Position Measurement, pos = 1.353827 m 09:35:32 Move:node 0 absolute position = 1.353927 m 09:35:32 Stage Position Measurement, pos = -0.000269 m 09:35:32 Stage Position Measurement, pos = -0.024822 m 09:35:32 Stage Position Measurement, pos = 1.353927 m 09:35:35 Move:node 0 absolute position = 1.354027 m 09:35:35 Stage Position Measurement, pos = -0.000269 m 09:35:35 Stage Position Measurement, pos = -0.024822 m 09:35:35 Stage Position Measurement, pos = 1.354027 m PolyFit: 2019140.694899 -6093026.469436 6128670.274176 -2054784.353571, Error = 0.000000 Max position = 1.35324909:35:39 Move:node 0 absolute position = 1.353250 m 09:35:39 Stage Position Measurement, pos = -0.000269 m 09:35:39 Stage Position Measurement, pos = -0.024822 m 09:35:39 Stage Position Measurement, pos = 1.353250 m 09:35:41 Stage Position Measurement, pos = -0.000269 m 09:35:41 Stage Position Measurement, pos = -0.024822 m 09:35:41 Stage Position Measurement, pos = 1.353249 m 09:35:44 Move:node 1 absolute position = -0.025422 m 09:35:44 Stage Position Measurement, pos = -0.000269 m 09:35:44 Stage Position Measurement, pos = -0.025422 m 09:35:44 Stage Position Measurement, pos = 1.353249 m 09:35:47 Move:node 1 absolute position = -0.025362 m 09:35:47 Stage Position Measurement, pos = -0.000269 m 09:35:47 Stage Position Measurement, pos = -0.025362 m 09:35:47 Stage Position Measurement, pos = 1.353249 m 09:35:50 Move:node 1 absolute position = -0.025302 m 09:35:50 Stage Position Measurement, pos = -0.000269 m 09:35:50 Stage Position Measurement, pos = -0.025302 m 09:35:50 Stage Position Measurement, pos = 1.353249 m 09:35:54 Move:node 1 absolute position = -0.025242 m 09:35:54 Stage Position Measurement, pos = -0.000269 m 09:35:54 Stage Position Measurement, pos = -0.025242 m 09:35:54 Stage Position Measurement, pos = 1.353249 m 09:35:57 Move:node 1 absolute position = -0.025182 m 09:35:57 Stage Position Measurement, pos = -0.000269 m 09:35:57 Stage Position Measurement, pos = -0.025182 m 09:35:57 Stage Position Measurement, pos = 1.353250 m 09:36:01 Move:node 1 absolute position = -0.025122 m 09:36:01 Stage Position Measurement, pos = -0.000269 m 09:36:01 Stage Position Measurement, pos = -0.025122 m 09:36:01 Stage Position Measurement, pos = 1.353249 m 09:36:04 Move:node 1 absolute position = -0.025062 m 09:36:04 Stage Position Measurement, pos = -0.000269 m 09:36:04 Stage Position Measurement, pos = -0.025062 m 09:36:04 Stage Position Measurement, pos = 1.353249 m 09:36:07 Move:node 1 absolute position = -0.025002 m 09:36:07 Stage Position Measurement, pos = -0.000269 m 09:36:07 Stage Position Measurement, pos = -0.025002 m 09:36:07 Stage Position Measurement, pos = 1.353249 m 09:36:11 Move:node 1 absolute position = -0.024942 m 09:36:11 Stage Position Measurement, pos = -0.000269 m 09:36:11 Stage Position Measurement, pos = -0.024942 m 09:36:11 Stage Position Measurement, pos = 1.353249 m 09:36:14 Move:node 1 absolute position = -0.024882 m 09:36:14 Stage Position Measurement, pos = -0.000269 m 09:36:14 Stage Position Measurement, pos = -0.024882 m 09:36:14 Stage Position Measurement, pos = 1.353249 m 09:36:18 Move:node 1 absolute position = -0.024822 m 09:36:18 Stage Position Measurement, pos = -0.000269 m 09:36:18 Stage Position Measurement, pos = -0.024822 m 09:36:18 Stage Position Measurement, pos = 1.353249 m 09:36:21 Move:node 1 absolute position = -0.024762 m 09:36:21 Stage Position Measurement, pos = -0.000269 m 09:36:21 Stage Position Measurement, pos = -0.024762 m 09:36:21 Stage Position Measurement, pos = 1.353249 m 09:36:24 Move:node 1 absolute position = -0.024702 m 09:36:24 Stage Position Measurement, pos = -0.000269 m 09:36:24 Stage Position Measurement, pos = -0.024702 m 09:36:24 Stage Position Measurement, pos = 1.353249 m 09:36:28 Move:node 1 absolute position = -0.024642 m 09:36:28 Stage Position Measurement, pos = -0.000269 m 09:36:28 Stage Position Measurement, pos = -0.024642 m 09:36:28 Stage Position Measurement, pos = 1.353249 m 09:36:31 Move:node 1 absolute position = -0.024582 m 09:36:31 Stage Position Measurement, pos = -0.000269 m 09:36:31 Stage Position Measurement, pos = -0.024582 m 09:36:31 Stage Position Measurement, pos = 1.353249 m 09:36:35 Move:node 1 absolute position = -0.024522 m 09:36:35 Stage Position Measurement, pos = -0.000269 m 09:36:35 Stage Position Measurement, pos = -0.024522 m 09:36:35 Stage Position Measurement, pos = 1.353250 m 09:36:38 Move:node 1 absolute position = -0.024462 m 09:36:38 Stage Position Measurement, pos = -0.000269 m 09:36:38 Stage Position Measurement, pos = -0.024462 m 09:36:38 Stage Position Measurement, pos = 1.353249 m 09:36:42 Move:node 1 absolute position = -0.024402 m 09:36:42 Stage Position Measurement, pos = -0.000269 m 09:36:42 Stage Position Measurement, pos = -0.024402 m 09:36:42 Stage Position Measurement, pos = 1.353249 m 09:36:45 Move:node 1 absolute position = -0.024342 m 09:36:45 Stage Position Measurement, pos = -0.000269 m 09:36:45 Stage Position Measurement, pos = -0.024342 m 09:36:45 Stage Position Measurement, pos = 1.353249 m 09:36:48 Move:node 1 absolute position = -0.024282 m 09:36:48 Stage Position Measurement, pos = -0.000269 m 09:36:48 Stage Position Measurement, pos = -0.024282 m 09:36:48 Stage Position Measurement, pos = 1.353249 m PolyFit: -17.596493 41.374019 -29.929873 6.305322, Error = 0.000000 Max position = -0.02476409:36:52 Move:node 1 absolute position = -0.024765 m 09:36:52 Stage Position Measurement, pos = -0.000269 m 09:36:52 Stage Position Measurement, pos = -0.024765 m 09:36:52 Stage Position Measurement, pos = 1.353249 m 09:36:54 Stage Position Measurement, pos = -0.000269 m 09:36:54 Stage Position Measurement, pos = -0.024765 m 09:36:54 Stage Position Measurement, pos = 1.353249 m 09:36:57 Move:node 2 absolute position = 0.000331 m 09:36:57 Stage Position Measurement, pos = 0.000331 m 09:36:57 Stage Position Measurement, pos = -0.024765 m 09:36:57 Stage Position Measurement, pos = 1.353250 m 09:37:00 Move:node 2 absolute position = 0.000351 m 09:37:00 Stage Position Measurement, pos = 0.000351 m 09:37:00 Stage Position Measurement, pos = -0.024765 m 09:37:00 Stage Position Measurement, pos = 1.353249 m 09:37:03 Move:node 2 absolute position = 0.000371 m 09:37:03 Stage Position Measurement, pos = 0.000371 m 09:37:03 Stage Position Measurement, pos = -0.024765 m 09:37:03 Stage Position Measurement, pos = 1.353249 m 09:37:07 Move:node 2 absolute position = 0.000391 m 09:37:07 Stage Position Measurement, pos = 0.000391 m 09:37:07 Stage Position Measurement, pos = -0.024765 m 09:37:07 Stage Position Measurement, pos = 1.353249 m 09:37:10 Move:node 2 absolute position = 0.000411 m 09:37:10 Stage Position Measurement, pos = 0.000411 m 09:37:10 Stage Position Measurement, pos = -0.024764 m 09:37:10 Stage Position Measurement, pos = 1.353249 m 09:37:14 Move:node 2 absolute position = 0.000431 m 09:37:14 Stage Position Measurement, pos = 0.000431 m 09:37:14 Stage Position Measurement, pos = -0.024765 m 09:37:14 Stage Position Measurement, pos = 1.353249 m 09:37:17 Move:node 2 absolute position = 0.000451 m 09:37:17 Stage Position Measurement, pos = 0.000451 m 09:37:17 Stage Position Measurement, pos = -0.024764 m 09:37:17 Stage Position Measurement, pos = 1.353250 m 09:37:20 Move:node 2 absolute position = 0.000471 m 09:37:20 Stage Position Measurement, pos = 0.000471 m 09:37:20 Stage Position Measurement, pos = -0.024765 m 09:37:20 Stage Position Measurement, pos = 1.353250 m 09:37:24 Move:node 2 absolute position = 0.000491 m 09:37:24 Stage Position Measurement, pos = 0.000491 m 09:37:24 Stage Position Measurement, pos = -0.024765 m 09:37:24 Stage Position Measurement, pos = 1.353250 m 09:37:27 Move:node 2 absolute position = 0.000511 m 09:37:27 Stage Position Measurement, pos = 0.000511 m 09:37:27 Stage Position Measurement, pos = -0.024765 m 09:37:27 Stage Position Measurement, pos = 1.353250 m 09:37:31 Move:node 2 absolute position = 0.000531 m 09:37:31 Stage Position Measurement, pos = 0.000531 m 09:37:31 Stage Position Measurement, pos = -0.024765 m 09:37:31 Stage Position Measurement, pos = 1.353249 m 09:37:34 Move:node 2 absolute position = 0.000551 m 09:37:34 Stage Position Measurement, pos = 0.000551 m 09:37:34 Stage Position Measurement, pos = -0.024764 m 09:37:34 Stage Position Measurement, pos = 1.353249 m 09:37:37 Move:node 2 absolute position = 0.000571 m 09:37:37 Stage Position Measurement, pos = 0.000571 m 09:37:37 Stage Position Measurement, pos = -0.024765 m 09:37:37 Stage Position Measurement, pos = 1.353250 m 09:37:41 Move:node 2 absolute position = 0.000591 m 09:37:41 Stage Position Measurement, pos = 0.000591 m 09:37:41 Stage Position Measurement, pos = -0.024765 m 09:37:41 Stage Position Measurement, pos = 1.353250 m 09:37:44 Move:node 2 absolute position = 0.000611 m 09:37:44 Stage Position Measurement, pos = 0.000611 m 09:37:44 Stage Position Measurement, pos = -0.024764 m 09:37:44 Stage Position Measurement, pos = 1.353249 m 09:37:48 Move:node 2 absolute position = 0.000631 m 09:37:48 Stage Position Measurement, pos = 0.000631 m 09:37:48 Stage Position Measurement, pos = -0.024765 m 09:37:48 Stage Position Measurement, pos = 1.353249 m 09:37:51 Move:node 2 absolute position = 0.000651 m 09:37:51 Stage Position Measurement, pos = 0.000651 m 09:37:51 Stage Position Measurement, pos = -0.024765 m 09:37:51 Stage Position Measurement, pos = 1.353249 m 09:37:54 Move:node 2 absolute position = 0.000671 m 09:37:54 Stage Position Measurement, pos = 0.000671 m 09:37:55 Stage Position Measurement, pos = -0.024765 m 09:37:55 Stage Position Measurement, pos = 1.353249 m 09:37:58 Move:node 2 absolute position = 0.000691 m 09:37:58 Stage Position Measurement, pos = 0.000691 m 09:37:58 Stage Position Measurement, pos = -0.024765 m 09:37:58 Stage Position Measurement, pos = 1.353249 m 09:38:01 Move:node 2 absolute position = 0.000711 m 09:38:01 Stage Position Measurement, pos = 0.000711 m 09:38:01 Stage Position Measurement, pos = -0.024765 m 09:38:01 Stage Position Measurement, pos = 1.353249 m Linear fit Error = 0.00000009:38:05 Move:node 2 absolute position = 0.000534 m 09:38:05 Stage Position Measurement, pos = 0.000534 m 09:38:05 Stage Position Measurement, pos = -0.024765 m 09:38:05 Stage Position Measurement, pos = 1.353250 m 09:38:07 Stage Position Measurement, pos = 0.000534 m 09:38:07 Stage Position Measurement, pos = -0.024765 m 09:38:07 Stage Position Measurement, pos = 1.353249 m 09:38:10 Move:node 2 absolute position = 0.001334 m 09:38:10 Stage Position Measurement, pos = 0.001334 m 09:38:10 Stage Position Measurement, pos = -0.024765 m 09:38:10 Stage Position Measurement, pos = 1.353249 m 09:38:12 Move:node 0 absolute position = 1.352249 m 09:38:12 Stage Position Measurement, pos = 0.001334 m 09:38:12 Stage Position Measurement, pos = -0.024765 m 09:38:12 Stage Position Measurement, pos = 1.352249 m 09:38:15 Move:node 0 absolute position = 1.352349 m 09:38:15 Stage Position Measurement, pos = 0.001334 m 09:38:15 Stage Position Measurement, pos = -0.024764 m 09:38:15 Stage Position Measurement, pos = 1.352350 m 09:38:18 Move:node 0 absolute position = 1.352449 m 09:38:18 Stage Position Measurement, pos = 0.001334 m 09:38:18 Stage Position Measurement, pos = -0.024765 m 09:38:18 Stage Position Measurement, pos = 1.352450 m 09:38:22 Move:node 0 absolute position = 1.352549 m 09:38:22 Stage Position Measurement, pos = 0.001334 m 09:38:22 Stage Position Measurement, pos = -0.024764 m 09:38:22 Stage Position Measurement, pos = 1.352550 m 09:38:25 Move:node 0 absolute position = 1.352649 m 09:38:25 Stage Position Measurement, pos = 0.001334 m 09:38:25 Stage Position Measurement, pos = -0.024765 m 09:38:25 Stage Position Measurement, pos = 1.352649 m 09:38:29 Move:node 0 absolute position = 1.352749 m 09:38:29 Stage Position Measurement, pos = 0.001334 m 09:38:29 Stage Position Measurement, pos = -0.024764 m 09:38:29 Stage Position Measurement, pos = 1.352749 m 09:38:32 Move:node 0 absolute position = 1.352849 m 09:38:32 Stage Position Measurement, pos = 0.001334 m 09:38:32 Stage Position Measurement, pos = -0.024765 m 09:38:32 Stage Position Measurement, pos = 1.352849 m 09:38:35 Move:node 0 absolute position = 1.352949 m 09:38:35 Stage Position Measurement, pos = 0.001334 m 09:38:35 Stage Position Measurement, pos = -0.024764 m 09:38:35 Stage Position Measurement, pos = 1.352949 m 09:38:39 Move:node 0 absolute position = 1.353049 m 09:38:39 Stage Position Measurement, pos = 0.001334 m 09:38:39 Stage Position Measurement, pos = -0.024765 m 09:38:39 Stage Position Measurement, pos = 1.353049 m 09:38:42 Move:node 0 absolute position = 1.353150 m 09:38:42 Stage Position Measurement, pos = 0.001334 m 09:38:42 Stage Position Measurement, pos = -0.024764 m 09:38:42 Stage Position Measurement, pos = 1.353149 m 09:38:46 Move:node 0 absolute position = 1.353249 m 09:38:46 Stage Position Measurement, pos = 0.001334 m 09:38:46 Stage Position Measurement, pos = -0.024764 m 09:38:46 Stage Position Measurement, pos = 1.353249 m 09:38:49 Move:node 0 absolute position = 1.353349 m 09:38:49 Stage Position Measurement, pos = 0.001334 m 09:38:49 Stage Position Measurement, pos = -0.024764 m 09:38:49 Stage Position Measurement, pos = 1.353349 m 09:38:53 Move:node 0 absolute position = 1.353449 m 09:38:53 Stage Position Measurement, pos = 0.001334 m 09:38:53 Stage Position Measurement, pos = -0.024764 m 09:38:53 Stage Position Measurement, pos = 1.353449 m 09:38:56 Move:node 0 absolute position = 1.353549 m 09:38:56 Stage Position Measurement, pos = 0.001334 m 09:38:56 Stage Position Measurement, pos = -0.024764 m 09:38:56 Stage Position Measurement, pos = 1.353549 m 09:38:59 Move:node 0 absolute position = 1.353649 m 09:38:59 Stage Position Measurement, pos = 0.001334 m 09:38:59 Stage Position Measurement, pos = -0.024764 m 09:38:59 Stage Position Measurement, pos = 1.353649 m 09:39:03 Move:node 0 absolute position = 1.353749 m 09:39:03 Stage Position Measurement, pos = 0.001334 m 09:39:03 Stage Position Measurement, pos = -0.024764 m 09:39:03 Stage Position Measurement, pos = 1.353750 m 09:39:06 Move:node 0 absolute position = 1.353850 m 09:39:06 Stage Position Measurement, pos = 0.001334 m 09:39:06 Stage Position Measurement, pos = -0.024765 m 09:39:06 Stage Position Measurement, pos = 1.353850 m 09:39:10 Move:node 0 absolute position = 1.353949 m 09:39:10 Stage Position Measurement, pos = 0.001334 m 09:39:10 Stage Position Measurement, pos = -0.024765 m 09:39:10 Stage Position Measurement, pos = 1.353949 m 09:39:13 Move:node 0 absolute position = 1.354049 m 09:39:13 Stage Position Measurement, pos = 0.001334 m 09:39:13 Stage Position Measurement, pos = -0.024765 m 09:39:13 Stage Position Measurement, pos = 1.354049 m 09:39:16 Move:node 0 absolute position = 1.354150 m 09:39:16 Stage Position Measurement, pos = 0.001334 m 09:39:16 Stage Position Measurement, pos = -0.024764 m 09:39:16 Stage Position Measurement, pos = 1.354149 m PolyFit: -2103668.056095 6282234.518832 -6253413.500195 2074847.174614, Error = 0.000000 Max position = 1.35305009:39:20 Move:node 0 absolute position = 1.353050 m 09:39:20 Stage Position Measurement, pos = 0.001334 m 09:39:20 Stage Position Measurement, pos = -0.024764 m 09:39:20 Stage Position Measurement, pos = 1.353050 m 09:39:22 Stage Position Measurement, pos = 0.001334 m 09:39:23 Stage Position Measurement, pos = -0.024765 m 09:39:23 Stage Position Measurement, pos = 1.353050 m 09:39:25 Move:node 1 absolute position = -0.025364 m 09:39:25 Stage Position Measurement, pos = 0.001334 m 09:39:25 Stage Position Measurement, pos = -0.025364 m 09:39:25 Stage Position Measurement, pos = 1.353050 m 09:39:28 Move:node 1 absolute position = -0.025305 m 09:39:28 Stage Position Measurement, pos = 0.001334 m 09:39:28 Stage Position Measurement, pos = -0.025305 m 09:39:28 Stage Position Measurement, pos = 1.353050 m 09:39:31 Move:node 1 absolute position = -0.025244 m 09:39:31 Stage Position Measurement, pos = 0.001334 m 09:39:31 Stage Position Measurement, pos = -0.025244 m 09:39:31 Stage Position Measurement, pos = 1.353050 m 09:39:35 Move:node 1 absolute position = -0.025184 m 09:39:35 Stage Position Measurement, pos = 0.001334 m 09:39:35 Stage Position Measurement, pos = -0.025184 m 09:39:35 Stage Position Measurement, pos = 1.353050 m 09:39:38 Move:node 1 absolute position = -0.025124 m 09:39:38 Stage Position Measurement, pos = 0.001334 m 09:39:38 Stage Position Measurement, pos = -0.025124 m 09:39:38 Stage Position Measurement, pos = 1.353050 m 09:39:42 Move:node 1 absolute position = -0.025064 m 09:39:42 Stage Position Measurement, pos = 0.001334 m 09:39:42 Stage Position Measurement, pos = -0.025064 m 09:39:42 Stage Position Measurement, pos = 1.353050 m 09:39:45 Move:node 1 absolute position = -0.025004 m 09:39:45 Stage Position Measurement, pos = 0.001334 m 09:39:45 Stage Position Measurement, pos = -0.025004 m 09:39:45 Stage Position Measurement, pos = 1.353050 m 09:39:48 Move:node 1 absolute position = -0.024945 m 09:39:48 Stage Position Measurement, pos = 0.001334 m 09:39:48 Stage Position Measurement, pos = -0.024945 m 09:39:48 Stage Position Measurement, pos = 1.353050 m 09:39:52 Move:node 1 absolute position = -0.024885 m 09:39:52 Stage Position Measurement, pos = 0.001334 m 09:39:52 Stage Position Measurement, pos = -0.024885 m 09:39:52 Stage Position Measurement, pos = 1.353050 m 09:39:55 Move:node 1 absolute position = -0.024824 m 09:39:55 Stage Position Measurement, pos = 0.001334 m 09:39:55 Stage Position Measurement, pos = -0.024824 m 09:39:55 Stage Position Measurement, pos = 1.353050 m 09:39:59 Move:node 1 absolute position = -0.024765 m 09:39:59 Stage Position Measurement, pos = 0.001334 m 09:39:59 Stage Position Measurement, pos = -0.024765 m 09:39:59 Stage Position Measurement, pos = 1.353050 m 09:40:02 Move:node 1 absolute position = -0.024704 m 09:40:02 Stage Position Measurement, pos = 0.001334 m 09:40:02 Stage Position Measurement, pos = -0.024704 m 09:40:02 Stage Position Measurement, pos = 1.353050 m 09:40:05 Move:node 1 absolute position = -0.024644 m 09:40:05 Stage Position Measurement, pos = 0.001334 m 09:40:05 Stage Position Measurement, pos = -0.024644 m 09:40:05 Stage Position Measurement, pos = 1.353050 m 09:40:09 Move:node 1 absolute position = -0.024584 m 09:40:09 Stage Position Measurement, pos = 0.001334 m 09:40:09 Stage Position Measurement, pos = -0.024584 m 09:40:09 Stage Position Measurement, pos = 1.353050 m 09:40:12 Move:node 1 absolute position = -0.024525 m 09:40:12 Stage Position Measurement, pos = 0.001334 m 09:40:12 Stage Position Measurement, pos = -0.024525 m 09:40:12 Stage Position Measurement, pos = 1.353050 m 09:40:16 Move:node 1 absolute position = -0.024465 m 09:40:16 Stage Position Measurement, pos = 0.001334 m 09:40:16 Stage Position Measurement, pos = -0.024465 m 09:40:16 Stage Position Measurement, pos = 1.353050 m 09:40:19 Move:node 1 absolute position = -0.024404 m 09:40:19 Stage Position Measurement, pos = 0.001334 m 09:40:19 Stage Position Measurement, pos = -0.024404 m 09:40:19 Stage Position Measurement, pos = 1.353050 m 09:40:23 Move:node 1 absolute position = -0.024345 m 09:40:23 Stage Position Measurement, pos = 0.001334 m 09:40:23 Stage Position Measurement, pos = -0.024345 m 09:40:23 Stage Position Measurement, pos = 1.353050 m 09:40:26 Move:node 1 absolute position = -0.024285 m 09:40:26 Stage Position Measurement, pos = 0.001334 m 09:40:26 Stage Position Measurement, pos = -0.024285 m 09:40:26 Stage Position Measurement, pos = 1.353050 m 09:40:29 Move:node 1 absolute position = -0.024224 m 09:40:29 Stage Position Measurement, pos = 0.001334 m 09:40:29 Stage Position Measurement, pos = -0.024224 m 09:40:29 Stage Position Measurement, pos = 1.353050 m PolyFit: 0.016821 -11.285347 22.371565 -10.952619, Error = 0.000000 Max position = -0.02488909:40:33 Move:node 1 absolute position = -0.024889 m 09:40:33 Stage Position Measurement, pos = 0.001334 m 09:40:33 Stage Position Measurement, pos = -0.024889 m 09:40:33 Stage Position Measurement, pos = 1.353050 m 09:40:35 Stage Position Measurement, pos = 0.001334 m 09:40:35 Stage Position Measurement, pos = -0.024889 m 09:40:35 Stage Position Measurement, pos = 1.353050 m 09:40:38 Move:node 2 absolute position = 0.000334 m 09:40:38 Stage Position Measurement, pos = 0.000334 m 09:40:38 Stage Position Measurement, pos = -0.024889 m 09:40:38 Stage Position Measurement, pos = 1.353050 m 09:40:41 Move:node 2 absolute position = 0.000354 m 09:40:41 Stage Position Measurement, pos = 0.000354 m 09:40:41 Stage Position Measurement, pos = -0.024889 m 09:40:41 Stage Position Measurement, pos = 1.353050 m 09:40:44 Move:node 2 absolute position = 0.000374 m 09:40:44 Stage Position Measurement, pos = 0.000374 m 09:40:44 Stage Position Measurement, pos = -0.024889 m 09:40:44 Stage Position Measurement, pos = 1.353050 m 09:40:48 Move:node 2 absolute position = 0.000394 m 09:40:48 Stage Position Measurement, pos = 0.000394 m 09:40:48 Stage Position Measurement, pos = -0.024889 m 09:40:48 Stage Position Measurement, pos = 1.353050 m 09:40:51 Move:node 2 absolute position = 0.000414 m 09:40:51 Stage Position Measurement, pos = 0.000414 m 09:40:51 Stage Position Measurement, pos = -0.024889 m 09:40:51 Stage Position Measurement, pos = 1.353050 m 09:40:55 Move:node 2 absolute position = 0.000434 m 09:40:55 Stage Position Measurement, pos = 0.000434 m 09:40:55 Stage Position Measurement, pos = -0.024889 m 09:40:55 Stage Position Measurement, pos = 1.353050 m 09:40:58 Move:node 2 absolute position = 0.000454 m 09:40:58 Stage Position Measurement, pos = 0.000454 m 09:40:58 Stage Position Measurement, pos = -0.024889 m 09:40:58 Stage Position Measurement, pos = 1.353050 m 09:41:01 Move:node 2 absolute position = 0.000474 m 09:41:01 Stage Position Measurement, pos = 0.000474 m 09:41:01 Stage Position Measurement, pos = -0.024889 m 09:41:01 Stage Position Measurement, pos = 1.353050 m 09:41:05 Move:node 2 absolute position = 0.000494 m 09:41:05 Stage Position Measurement, pos = 0.000494 m 09:41:05 Stage Position Measurement, pos = -0.024889 m 09:41:05 Stage Position Measurement, pos = 1.353050 m 09:41:08 Move:node 2 absolute position = 0.000514 m 09:41:08 Stage Position Measurement, pos = 0.000514 m 09:41:08 Stage Position Measurement, pos = -0.024889 m 09:41:08 Stage Position Measurement, pos = 1.353050 m 09:41:12 Move:node 2 absolute position = 0.000534 m 09:41:12 Stage Position Measurement, pos = 0.000534 m 09:41:12 Stage Position Measurement, pos = -0.024889 m 09:41:12 Stage Position Measurement, pos = 1.353050 m 09:41:15 Move:node 2 absolute position = 0.000554 m 09:41:15 Stage Position Measurement, pos = 0.000554 m 09:41:15 Stage Position Measurement, pos = -0.024889 m 09:41:15 Stage Position Measurement, pos = 1.353050 m 09:41:18 Move:node 2 absolute position = 0.000574 m 09:41:18 Stage Position Measurement, pos = 0.000574 m 09:41:18 Stage Position Measurement, pos = -0.024889 m 09:41:18 Stage Position Measurement, pos = 1.353050 m 09:41:22 Move:node 2 absolute position = 0.000594 m 09:41:22 Stage Position Measurement, pos = 0.000594 m 09:41:22 Stage Position Measurement, pos = -0.024889 m 09:41:22 Stage Position Measurement, pos = 1.353050 m 09:41:25 Move:node 2 absolute position = 0.000614 m 09:41:25 Stage Position Measurement, pos = 0.000614 m 09:41:25 Stage Position Measurement, pos = -0.024889 m 09:41:25 Stage Position Measurement, pos = 1.353050 m 09:41:29 Move:node 2 absolute position = 0.000634 m 09:41:29 Stage Position Measurement, pos = 0.000634 m 09:41:29 Stage Position Measurement, pos = -0.024889 m 09:41:29 Stage Position Measurement, pos = 1.353050 m 09:41:32 Move:node 2 absolute position = 0.000654 m 09:41:32 Stage Position Measurement, pos = 0.000654 m 09:41:32 Stage Position Measurement, pos = -0.024889 m 09:41:32 Stage Position Measurement, pos = 1.353050 m 09:41:36 Move:node 2 absolute position = 0.000674 m 09:41:36 Stage Position Measurement, pos = 0.000674 m 09:41:36 Stage Position Measurement, pos = -0.024889 m 09:41:36 Stage Position Measurement, pos = 1.353050 m 09:41:39 Move:node 2 absolute position = 0.000694 m 09:41:39 Stage Position Measurement, pos = 0.000694 m 09:41:39 Stage Position Measurement, pos = -0.024889 m 09:41:39 Stage Position Measurement, pos = 1.353050 m 09:41:42 Move:node 2 absolute position = 0.000714 m 09:41:42 Stage Position Measurement, pos = 0.000714 m 09:41:42 Stage Position Measurement, pos = -0.024889 m 09:41:42 Stage Position Measurement, pos = 1.353050 m Linear fit Error = 0.00000009:41:46 Move:node 2 absolute position = 0.000530 m 09:41:46 Stage Position Measurement, pos = 0.000530 m 09:41:46 Stage Position Measurement, pos = -0.024889 m 09:41:46 Stage Position Measurement, pos = 1.353050 m 09:41:48 Stage Position Measurement, pos = 0.000530 m 09:41:48 Stage Position Measurement, pos = -0.024889 m 09:41:48 Stage Position Measurement, pos = 1.353050 m 09:41:57 Move:node 1 absolute position = 0.000000 m 09:41:58 Stage Position Measurement, pos = 0.000000 m 09:42:00 Move:node 2 absolute position = 0.000000 m 09:42:01 Move:node 0 absolute position = 0.000000 m 09:43:20 Move:node 0 absolute position = 5.038344 m 09:43:20 Stage Position Measurement, pos = 0.000000 m 09:43:20 Stage Position Measurement, pos = 0.000000 m 09:43:20 Stage Position Measurement, pos = 5.038344 m 09:43:27 Move:node 1 absolute position = -0.024635 m 09:43:27 Stage Position Measurement, pos = 0.000000 m 09:43:27 Stage Position Measurement, pos = -0.024635 m 09:43:27 Stage Position Measurement, pos = 5.038344 m 09:43:29 Move:node 2 absolute position = 0.000487 m 09:43:29 Stage Position Measurement, pos = 0.000487 m 09:43:29 Stage Position Measurement, pos = -0.024635 m 09:43:29 Stage Position Measurement, pos = 5.038344 m 09:43:52 Stage Position Measurement, pos = 0.000487 m 09:43:52 Stage Position Measurement, pos = -0.024635 m 09:43:52 Stage Position Measurement, pos = 5.038344 m 09:43:54 Move:node 2 absolute position = -0.000313 m 09:43:54 Stage Position Measurement, pos = -0.000313 m 09:43:54 Stage Position Measurement, pos = -0.024635 m 09:43:54 Stage Position Measurement, pos = 5.038344 m 09:43:56 Move:node 0 absolute position = 5.037344 m 09:43:56 Stage Position Measurement, pos = -0.000313 m 09:43:56 Stage Position Measurement, pos = -0.024635 m 09:43:56 Stage Position Measurement, pos = 5.037344 m 09:43:59 Move:node 0 absolute position = 5.037444 m 09:43:59 Stage Position Measurement, pos = -0.000313 m 09:43:59 Stage Position Measurement, pos = -0.024635 m 09:43:59 Stage Position Measurement, pos = 5.037444 m 09:44:02 Move:node 0 absolute position = 5.037544 m 09:44:02 Stage Position Measurement, pos = -0.000313 m 09:44:02 Stage Position Measurement, pos = -0.024635 m 09:44:02 Stage Position Measurement, pos = 5.037544 m 09:44:06 Move:node 0 absolute position = 5.037644 m 09:44:06 Stage Position Measurement, pos = -0.000313 m 09:44:06 Stage Position Measurement, pos = -0.024635 m 09:44:06 Stage Position Measurement, pos = 5.037644 m 09:44:09 Move:node 0 absolute position = 5.037744 m 09:44:09 Stage Position Measurement, pos = -0.000313 m 09:44:09 Stage Position Measurement, pos = -0.024635 m 09:44:09 Stage Position Measurement, pos = 5.037744 m 09:44:13 Move:node 0 absolute position = 5.037844 m 09:44:13 Stage Position Measurement, pos = -0.000313 m 09:44:13 Stage Position Measurement, pos = -0.024635 m 09:44:13 Stage Position Measurement, pos = 5.037844 m 09:44:16 Move:node 0 absolute position = 5.037944 m 09:44:16 Stage Position Measurement, pos = -0.000313 m 09:44:16 Stage Position Measurement, pos = -0.024635 m 09:44:16 Stage Position Measurement, pos = 5.037944 m 09:44:19 Move:node 0 absolute position = 5.038044 m 09:44:19 Stage Position Measurement, pos = -0.000313 m 09:44:19 Stage Position Measurement, pos = -0.024635 m 09:44:19 Stage Position Measurement, pos = 5.038044 m 09:44:23 Move:node 0 absolute position = 5.038144 m 09:44:23 Stage Position Measurement, pos = -0.000313 m 09:44:23 Stage Position Measurement, pos = -0.024635 m 09:44:23 Stage Position Measurement, pos = 5.038144 m 09:44:26 Move:node 0 absolute position = 5.038244 m 09:44:26 Stage Position Measurement, pos = -0.000313 m 09:44:26 Stage Position Measurement, pos = -0.024635 m 09:44:26 Stage Position Measurement, pos = 5.038244 m 09:44:30 Move:node 0 absolute position = 5.038344 m 09:44:30 Stage Position Measurement, pos = -0.000313 m 09:44:30 Stage Position Measurement, pos = -0.024635 m 09:44:30 Stage Position Measurement, pos = 5.038344 m 09:44:34 Move:node 0 absolute position = 5.038444 m 09:44:34 Stage Position Measurement, pos = -0.000313 m 09:44:34 Stage Position Measurement, pos = -0.024635 m 09:44:34 Stage Position Measurement, pos = 5.038444 m 09:44:37 Move:node 0 absolute position = 5.038544 m 09:44:37 Stage Position Measurement, pos = -0.000313 m 09:44:37 Stage Position Measurement, pos = -0.024635 m 09:44:37 Stage Position Measurement, pos = 5.038544 m 09:44:41 Move:node 0 absolute position = 5.038644 m 09:44:41 Stage Position Measurement, pos = -0.000313 m 09:44:41 Stage Position Measurement, pos = -0.024635 m 09:44:41 Stage Position Measurement, pos = 5.038644 m 09:44:44 Move:node 0 absolute position = 5.038744 m 09:44:44 Stage Position Measurement, pos = -0.000313 m 09:44:44 Stage Position Measurement, pos = -0.024635 m 09:44:44 Stage Position Measurement, pos = 5.038744 m 09:44:48 Move:node 0 absolute position = 5.038844 m 09:44:48 Stage Position Measurement, pos = -0.000313 m 09:44:48 Stage Position Measurement, pos = -0.024635 m 09:44:48 Stage Position Measurement, pos = 5.038844 m 09:44:51 Move:node 0 absolute position = 5.038944 m 09:44:51 Stage Position Measurement, pos = -0.000313 m 09:44:51 Stage Position Measurement, pos = -0.024635 m 09:44:51 Stage Position Measurement, pos = 5.038944 m 09:44:55 Move:node 0 absolute position = 5.039044 m 09:44:55 Stage Position Measurement, pos = -0.000313 m 09:44:55 Stage Position Measurement, pos = -0.024635 m 09:44:55 Stage Position Measurement, pos = 5.039044 m 09:44:58 Move:node 0 absolute position = 5.039144 m 09:44:58 Stage Position Measurement, pos = -0.000313 m 09:44:58 Stage Position Measurement, pos = -0.024635 m 09:44:58 Stage Position Measurement, pos = 5.039144 m 09:45:02 Move:node 0 absolute position = 5.039244 m 09:45:03 Stage Position Measurement, pos = -0.000313 m 09:45:03 Stage Position Measurement, pos = -0.024635 m 09:45:03 Stage Position Measurement, pos = 5.039244 m PolyFit: -223321697.741793 669616199.917423 -669267107.110693 222972605.075694, Error = 0.000000 Max position = 5.03806909:45:06 Move:node 0 absolute position = 5.038069 m 09:45:06 Stage Position Measurement, pos = -0.000313 m 09:45:06 Stage Position Measurement, pos = -0.024635 m 09:45:06 Stage Position Measurement, pos = 5.038069 m 09:45:09 Stage Position Measurement, pos = -0.000313 m 09:45:09 Stage Position Measurement, pos = -0.024635 m 09:45:09 Stage Position Measurement, pos = 5.038069 m 09:45:11 Move:node 1 absolute position = -0.025235 m 09:45:11 Stage Position Measurement, pos = -0.000313 m 09:45:11 Stage Position Measurement, pos = -0.025235 m 09:45:11 Stage Position Measurement, pos = 5.038069 m 09:45:15 Move:node 1 absolute position = -0.025175 m 09:45:15 Stage Position Measurement, pos = -0.000313 m 09:45:15 Stage Position Measurement, pos = -0.025175 m 09:45:15 Stage Position Measurement, pos = 5.038069 m 09:45:18 Move:node 1 absolute position = -0.025115 m 09:45:18 Stage Position Measurement, pos = -0.000313 m 09:45:18 Stage Position Measurement, pos = -0.025115 m 09:45:19 Stage Position Measurement, pos = 5.038069 m 09:45:22 Move:node 1 absolute position = -0.025055 m 09:45:22 Stage Position Measurement, pos = -0.000313 m 09:45:22 Stage Position Measurement, pos = -0.025055 m 09:45:22 Stage Position Measurement, pos = 5.038069 m 09:45:26 Move:node 1 absolute position = -0.024995 m 09:45:26 Stage Position Measurement, pos = -0.000313 m 09:45:26 Stage Position Measurement, pos = -0.024995 m 09:45:26 Stage Position Measurement, pos = 5.038069 m 09:45:29 Move:node 1 absolute position = -0.024935 m 09:45:29 Stage Position Measurement, pos = -0.000313 m 09:45:29 Stage Position Measurement, pos = -0.024935 m 09:45:29 Stage Position Measurement, pos = 5.038069 m 09:45:32 Move:node 1 absolute position = -0.024875 m 09:45:33 Stage Position Measurement, pos = -0.000313 m 09:45:33 Stage Position Measurement, pos = -0.024875 m 09:45:33 Stage Position Measurement, pos = 5.038069 m 09:45:36 Move:node 1 absolute position = -0.024815 m 09:45:36 Stage Position Measurement, pos = -0.000313 m 09:45:36 Stage Position Measurement, pos = -0.024815 m 09:45:36 Stage Position Measurement, pos = 5.038069 m 09:45:40 Move:node 1 absolute position = -0.024755 m 09:45:40 Stage Position Measurement, pos = -0.000313 m 09:45:40 Stage Position Measurement, pos = -0.024755 m 09:45:40 Stage Position Measurement, pos = 5.038069 m 09:45:43 Move:node 1 absolute position = -0.024695 m 09:45:43 Stage Position Measurement, pos = -0.000313 m 09:45:43 Stage Position Measurement, pos = -0.024695 m 09:45:43 Stage Position Measurement, pos = 5.038069 m 09:45:47 Move:node 1 absolute position = -0.024635 m 09:45:47 Stage Position Measurement, pos = -0.000313 m 09:45:47 Stage Position Measurement, pos = -0.024635 m 09:45:47 Stage Position Measurement, pos = 5.038069 m 09:45:51 Move:node 1 absolute position = -0.024575 m 09:45:51 Stage Position Measurement, pos = -0.000313 m 09:45:51 Stage Position Measurement, pos = -0.024575 m 09:45:51 Stage Position Measurement, pos = 5.038069 m 09:45:55 Move:node 1 absolute position = -0.024515 m 09:45:55 Stage Position Measurement, pos = -0.000313 m 09:45:55 Stage Position Measurement, pos = -0.024515 m 09:45:55 Stage Position Measurement, pos = 5.038069 m 09:45:58 Move:node 1 absolute position = -0.024455 m 09:45:58 Stage Position Measurement, pos = -0.000313 m 09:45:58 Stage Position Measurement, pos = -0.024455 m 09:45:58 Stage Position Measurement, pos = 5.038069 m 09:46:02 Move:node 1 absolute position = -0.024395 m 09:46:02 Stage Position Measurement, pos = -0.000313 m 09:46:02 Stage Position Measurement, pos = -0.024395 m 09:46:02 Stage Position Measurement, pos = 5.038069 m 09:46:05 Move:node 1 absolute position = -0.024335 m 09:46:05 Stage Position Measurement, pos = -0.000313 m 09:46:05 Stage Position Measurement, pos = -0.024335 m 09:46:05 Stage Position Measurement, pos = 5.038069 m 09:46:09 Move:node 1 absolute position = -0.024275 m 09:46:09 Stage Position Measurement, pos = -0.000313 m 09:46:09 Stage Position Measurement, pos = -0.024275 m 09:46:09 Stage Position Measurement, pos = 5.038069 m 09:46:13 Move:node 1 absolute position = -0.024215 m 09:46:13 Stage Position Measurement, pos = -0.000313 m 09:46:13 Stage Position Measurement, pos = -0.024215 m 09:46:13 Stage Position Measurement, pos = 5.038069 m 09:46:17 Move:node 1 absolute position = -0.024155 m 09:46:17 Stage Position Measurement, pos = -0.000313 m 09:46:17 Stage Position Measurement, pos = -0.024155 m 09:46:17 Stage Position Measurement, pos = 5.038069 m 09:46:20 Move:node 1 absolute position = -0.024095 m 09:46:20 Stage Position Measurement, pos = -0.000313 m 09:46:20 Stage Position Measurement, pos = -0.024095 m 09:46:20 Stage Position Measurement, pos = 5.038069 m PolyFit: 16.764956 -60.695236 70.923508 -26.837301, Error = 0.000000 Max position = -0.02481009:46:24 Move:node 1 absolute position = -0.024811 m 09:46:24 Stage Position Measurement, pos = -0.000313 m 09:46:24 Stage Position Measurement, pos = -0.024810 m 09:46:24 Stage Position Measurement, pos = 5.038069 m 09:46:27 Stage Position Measurement, pos = -0.000313 m 09:46:27 Stage Position Measurement, pos = -0.024811 m 09:46:27 Stage Position Measurement, pos = 5.038069 m 09:46:29 Move:node 2 absolute position = 0.000287 m 09:46:29 Stage Position Measurement, pos = 0.000287 m 09:46:29 Stage Position Measurement, pos = -0.024811 m 09:46:29 Stage Position Measurement, pos = 5.038069 m 09:46:32 Move:node 2 absolute position = 0.000307 m 09:46:33 Stage Position Measurement, pos = 0.000307 m 09:46:33 Stage Position Measurement, pos = -0.024811 m 09:46:33 Stage Position Measurement, pos = 5.038069 m 09:46:36 Move:node 2 absolute position = 0.000327 m 09:46:36 Stage Position Measurement, pos = 0.000327 m 09:46:36 Stage Position Measurement, pos = -0.024811 m 09:46:36 Stage Position Measurement, pos = 5.038069 m 09:46:40 Move:node 2 absolute position = 0.000347 m 09:46:40 Stage Position Measurement, pos = 0.000347 m 09:46:40 Stage Position Measurement, pos = -0.024811 m 09:46:40 Stage Position Measurement, pos = 5.038069 m 09:46:43 Move:node 2 absolute position = 0.000367 m 09:46:43 Stage Position Measurement, pos = 0.000367 m 09:46:43 Stage Position Measurement, pos = -0.024811 m 09:46:43 Stage Position Measurement, pos = 5.038069 m 09:46:47 Move:node 2 absolute position = 0.000387 m 09:46:47 Stage Position Measurement, pos = 0.000387 m 09:46:47 Stage Position Measurement, pos = -0.024810 m 09:46:47 Stage Position Measurement, pos = 5.038069 m 09:46:50 Move:node 2 absolute position = 0.000407 m 09:46:50 Stage Position Measurement, pos = 0.000407 m 09:46:50 Stage Position Measurement, pos = -0.024811 m 09:46:50 Stage Position Measurement, pos = 5.038069 m 09:46:54 Move:node 2 absolute position = 0.000427 m 09:46:54 Stage Position Measurement, pos = 0.000427 m 09:46:54 Stage Position Measurement, pos = -0.024811 m 09:46:54 Stage Position Measurement, pos = 5.038069 m 09:46:57 Move:node 2 absolute position = 0.000447 m 09:46:57 Stage Position Measurement, pos = 0.000447 m 09:46:57 Stage Position Measurement, pos = -0.024811 m 09:46:57 Stage Position Measurement, pos = 5.038069 m 09:47:01 Move:node 2 absolute position = 0.000467 m 09:47:01 Stage Position Measurement, pos = 0.000467 m 09:47:01 Stage Position Measurement, pos = -0.024811 m 09:47:01 Stage Position Measurement, pos = 5.038069 m 09:47:04 Move:node 2 absolute position = 0.000487 m 09:47:04 Stage Position Measurement, pos = 0.000487 m 09:47:04 Stage Position Measurement, pos = -0.024810 m 09:47:04 Stage Position Measurement, pos = 5.038069 m 09:47:08 Move:node 2 absolute position = 0.000507 m 09:47:08 Stage Position Measurement, pos = 0.000507 m 09:47:08 Stage Position Measurement, pos = -0.024811 m 09:47:08 Stage Position Measurement, pos = 5.038069 m 09:47:12 Move:node 2 absolute position = 0.000527 m 09:47:12 Stage Position Measurement, pos = 0.000527 m 09:47:12 Stage Position Measurement, pos = -0.024811 m 09:47:12 Stage Position Measurement, pos = 5.038069 m 09:47:15 Move:node 2 absolute position = 0.000547 m 09:47:16 Stage Position Measurement, pos = 0.000547 m 09:47:16 Stage Position Measurement, pos = -0.024811 m 09:47:16 Stage Position Measurement, pos = 5.038069 m 09:47:19 Move:node 2 absolute position = 0.000567 m 09:47:19 Stage Position Measurement, pos = 0.000567 m 09:47:19 Stage Position Measurement, pos = -0.024811 m 09:47:19 Stage Position Measurement, pos = 5.038069 m 09:47:22 Move:node 2 absolute position = 0.000587 m 09:47:22 Stage Position Measurement, pos = 0.000587 m 09:47:23 Stage Position Measurement, pos = -0.024811 m 09:47:23 Stage Position Measurement, pos = 5.038069 m 09:47:26 Move:node 2 absolute position = 0.000607 m 09:47:26 Stage Position Measurement, pos = 0.000607 m 09:47:26 Stage Position Measurement, pos = -0.024811 m 09:47:26 Stage Position Measurement, pos = 5.038069 m 09:47:29 Move:node 2 absolute position = 0.000627 m 09:47:30 Stage Position Measurement, pos = 0.000627 m 09:47:30 Stage Position Measurement, pos = -0.024811 m 09:47:30 Stage Position Measurement, pos = 5.038069 m 09:47:33 Move:node 2 absolute position = 0.000647 m 09:47:33 Stage Position Measurement, pos = 0.000647 m 09:47:33 Stage Position Measurement, pos = -0.024811 m 09:47:33 Stage Position Measurement, pos = 5.038069 m 09:47:37 Move:node 2 absolute position = 0.000667 m 09:47:37 Stage Position Measurement, pos = 0.000667 m 09:47:37 Stage Position Measurement, pos = -0.024811 m 09:47:37 Stage Position Measurement, pos = 5.038069 m Linear fit Error = 0.00000009:47:40 Move:node 2 absolute position = 0.000541 m 09:47:40 Stage Position Measurement, pos = 0.000541 m 09:47:40 Stage Position Measurement, pos = -0.024811 m 09:47:40 Stage Position Measurement, pos = 5.038069 m 09:47:43 Stage Position Measurement, pos = 0.000541 m 09:47:43 Stage Position Measurement, pos = -0.024811 m 09:47:43 Stage Position Measurement, pos = 5.038069 m 09:47:45 Move:node 2 absolute position = 0.001341 m 09:47:45 Stage Position Measurement, pos = 0.001341 m 09:47:45 Stage Position Measurement, pos = -0.024811 m 09:47:45 Stage Position Measurement, pos = 5.038069 m 09:47:47 Move:node 0 absolute position = 5.037069 m 09:47:47 Stage Position Measurement, pos = 0.001341 m 09:47:48 Stage Position Measurement, pos = -0.024811 m 09:47:48 Stage Position Measurement, pos = 5.037069 m 09:47:51 Move:node 0 absolute position = 5.037169 m 09:47:51 Stage Position Measurement, pos = 0.001340 m 09:47:51 Stage Position Measurement, pos = -0.024811 m 09:47:51 Stage Position Measurement, pos = 5.037169 m 09:47:54 Move:node 0 absolute position = 5.037269 m 09:47:54 Stage Position Measurement, pos = 0.001341 m 09:47:54 Stage Position Measurement, pos = -0.024811 m 09:47:54 Stage Position Measurement, pos = 5.037269 m 09:47:58 Move:node 0 absolute position = 5.037369 m 09:47:58 Stage Position Measurement, pos = 0.001341 m 09:47:58 Stage Position Measurement, pos = -0.024811 m 09:47:58 Stage Position Measurement, pos = 5.037369 m 09:48:01 Move:node 0 absolute position = 5.037469 m 09:48:02 Stage Position Measurement, pos = 0.001341 m 09:48:02 Stage Position Measurement, pos = -0.024811 m 09:48:02 Stage Position Measurement, pos = 5.037469 m 09:48:05 Move:node 0 absolute position = 5.037569 m 09:48:05 Stage Position Measurement, pos = 0.001341 m 09:48:05 Stage Position Measurement, pos = -0.024811 m 09:48:05 Stage Position Measurement, pos = 5.037569 m 09:48:08 Move:node 0 absolute position = 5.037669 m 09:48:08 Stage Position Measurement, pos = 0.001341 m 09:48:08 Stage Position Measurement, pos = -0.024810 m 09:48:08 Stage Position Measurement, pos = 5.037669 m 09:48:12 Move:node 0 absolute position = 5.037769 m 09:48:12 Stage Position Measurement, pos = 0.001341 m 09:48:12 Stage Position Measurement, pos = -0.024811 m 09:48:12 Stage Position Measurement, pos = 5.037769 m 09:48:15 Move:node 0 absolute position = 5.037869 m 09:48:15 Stage Position Measurement, pos = 0.001341 m 09:48:15 Stage Position Measurement, pos = -0.024810 m 09:48:15 Stage Position Measurement, pos = 5.037869 m 09:48:19 Move:node 0 absolute position = 5.037969 m 09:48:20 Stage Position Measurement, pos = 0.001341 m 09:48:21 Stage Position Measurement, pos = -0.024811 m 09:48:21 Stage Position Measurement, pos = 5.037969 m 09:48:24 Move:node 0 absolute position = 5.038069 m 09:48:25 Stage Position Measurement, pos = 0.001341 m 09:48:25 Stage Position Measurement, pos = -0.024811 m 09:48:25 Stage Position Measurement, pos = 5.038069 m 09:48:28 Move:node 0 absolute position = 5.038169 m 09:48:28 Stage Position Measurement, pos = 0.001341 m 09:48:28 Stage Position Measurement, pos = -0.024811 m 09:48:28 Stage Position Measurement, pos = 5.038169 m 09:48:31 Move:node 0 absolute position = 5.038269 m 09:48:32 Stage Position Measurement, pos = 0.001341 m 09:48:32 Stage Position Measurement, pos = -0.024811 m 09:48:32 Stage Position Measurement, pos = 5.038269 m 09:48:35 Move:node 0 absolute position = 5.038369 m 09:48:35 Stage Position Measurement, pos = 0.001341 m 09:48:35 Stage Position Measurement, pos = -0.024811 m 09:48:35 Stage Position Measurement, pos = 5.038369 m 09:48:38 Move:node 0 absolute position = 5.038469 m 09:48:38 Stage Position Measurement, pos = 0.001341 m 09:48:38 Stage Position Measurement, pos = -0.024811 m 09:48:38 Stage Position Measurement, pos = 5.038469 m 09:48:42 Move:node 0 absolute position = 5.038569 m 09:48:42 Stage Position Measurement, pos = 0.001341 m 09:48:42 Stage Position Measurement, pos = -0.024811 m 09:48:42 Stage Position Measurement, pos = 5.038569 m 09:48:45 Move:node 0 absolute position = 5.038669 m 09:48:45 Stage Position Measurement, pos = 0.001341 m 09:48:45 Stage Position Measurement, pos = -0.024810 m 09:48:45 Stage Position Measurement, pos = 5.038669 m 09:48:49 Move:node 0 absolute position = 5.038769 m 09:48:49 Stage Position Measurement, pos = 0.001341 m 09:48:49 Stage Position Measurement, pos = -0.024811 m 09:48:49 Stage Position Measurement, pos = 5.038769 m 09:48:52 Move:node 0 absolute position = 5.038869 m 09:48:52 Stage Position Measurement, pos = 0.001341 m 09:48:52 Stage Position Measurement, pos = -0.024811 m 09:48:52 Stage Position Measurement, pos = 5.038869 m 09:48:56 Move:node 0 absolute position = 5.038969 m 09:48:56 Stage Position Measurement, pos = 0.001341 m 09:48:56 Stage Position Measurement, pos = -0.024811 m 09:48:56 Stage Position Measurement, pos = 5.038969 m PolyFit: -1817951.899275 5057047.987043 -4660086.692232 1420990.742254, Error = 0.000000 Max position = 5.03799909:48:59 Move:node 0 absolute position = 5.037999 m 09:48:59 Stage Position Measurement, pos = 0.001341 m 09:48:59 Stage Position Measurement, pos = -0.024811 m 09:49:00 Stage Position Measurement, pos = 5.037999 m 09:49:02 Stage Position Measurement, pos = 0.001341 m 09:49:03 Stage Position Measurement, pos = -0.024811 m 09:49:03 Stage Position Measurement, pos = 5.037999 m 09:49:05 Move:node 1 absolute position = -0.025410 m 09:49:05 Stage Position Measurement, pos = 0.001341 m 09:49:05 Stage Position Measurement, pos = -0.025410 m 09:49:05 Stage Position Measurement, pos = 5.037999 m 09:49:08 Move:node 1 absolute position = -0.025351 m 09:49:08 Stage Position Measurement, pos = 0.001341 m 09:49:08 Stage Position Measurement, pos = -0.025351 m 09:49:08 Stage Position Measurement, pos = 5.037999 m 09:49:12 Move:node 1 absolute position = -0.025291 m 09:49:12 Stage Position Measurement, pos = 0.001341 m 09:49:12 Stage Position Measurement, pos = -0.025291 m 09:49:12 Stage Position Measurement, pos = 5.037999 m 09:49:15 Move:node 1 absolute position = -0.025230 m 09:49:15 Stage Position Measurement, pos = 0.001341 m 09:49:16 Stage Position Measurement, pos = -0.025230 m 09:49:16 Stage Position Measurement, pos = 5.037999 m 09:49:19 Move:node 1 absolute position = -0.025171 m 09:49:19 Stage Position Measurement, pos = 0.001341 m 09:49:19 Stage Position Measurement, pos = -0.025171 m 09:49:19 Stage Position Measurement, pos = 5.037999 m 09:49:22 Move:node 1 absolute position = -0.025110 m 09:49:22 Stage Position Measurement, pos = 0.001341 m 09:49:22 Stage Position Measurement, pos = -0.025110 m 09:49:22 Stage Position Measurement, pos = 5.037999 m 09:49:26 Move:node 1 absolute position = -0.025050 m 09:49:26 Stage Position Measurement, pos = 0.001341 m 09:49:26 Stage Position Measurement, pos = -0.025050 m 09:49:26 Stage Position Measurement, pos = 5.037999 m 09:49:30 Move:node 1 absolute position = -0.024991 m 09:49:30 Stage Position Measurement, pos = 0.001341 m 09:49:30 Stage Position Measurement, pos = -0.024991 m 09:49:30 Stage Position Measurement, pos = 5.037999 m 09:49:33 Move:node 1 absolute position = -0.024930 m 09:49:33 Stage Position Measurement, pos = 0.001341 m 09:49:33 Stage Position Measurement, pos = -0.024930 m 09:49:33 Stage Position Measurement, pos = 5.037999 m 09:49:36 Move:node 1 absolute position = -0.024871 m 09:49:36 Stage Position Measurement, pos = 0.001341 m 09:49:36 Stage Position Measurement, pos = -0.024871 m 09:49:36 Stage Position Measurement, pos = 5.037999 m 09:49:40 Move:node 1 absolute position = -0.024811 m 09:49:40 Stage Position Measurement, pos = 0.001341 m 09:49:40 Stage Position Measurement, pos = -0.024811 m 09:49:40 Stage Position Measurement, pos = 5.037999 m 09:49:43 Move:node 1 absolute position = -0.024750 m 09:49:43 Stage Position Measurement, pos = 0.001341 m 09:49:43 Stage Position Measurement, pos = -0.024750 m 09:49:43 Stage Position Measurement, pos = 5.037999 m 09:49:47 Move:node 1 absolute position = -0.024691 m 09:49:47 Stage Position Measurement, pos = 0.001341 m 09:49:47 Stage Position Measurement, pos = -0.024691 m 09:49:47 Stage Position Measurement, pos = 5.037999 m 09:49:50 Move:node 1 absolute position = -0.024631 m 09:49:50 Stage Position Measurement, pos = 0.001340 m 09:49:50 Stage Position Measurement, pos = -0.024631 m 09:49:50 Stage Position Measurement, pos = 5.037999 m 09:49:53 Move:node 1 absolute position = -0.024570 m 09:49:54 Stage Position Measurement, pos = 0.001341 m 09:49:54 Stage Position Measurement, pos = -0.024570 m 09:49:54 Stage Position Measurement, pos = 5.037999 m 09:49:57 Move:node 1 absolute position = -0.024511 m 09:49:57 Stage Position Measurement, pos = 0.001341 m 09:49:57 Stage Position Measurement, pos = -0.024511 m 09:49:57 Stage Position Measurement, pos = 5.037999 m 09:50:00 Move:node 1 absolute position = -0.024451 m 09:50:01 Stage Position Measurement, pos = 0.001341 m 09:50:01 Stage Position Measurement, pos = -0.024450 m 09:50:01 Stage Position Measurement, pos = 5.037999 m 09:50:04 Move:node 1 absolute position = -0.024390 m 09:50:04 Stage Position Measurement, pos = 0.001341 m 09:50:04 Stage Position Measurement, pos = -0.024390 m 09:50:04 Stage Position Measurement, pos = 5.037999 m 09:50:08 Move:node 1 absolute position = -0.024331 m 09:50:08 Stage Position Measurement, pos = 0.001341 m 09:50:08 Stage Position Measurement, pos = -0.024331 m 09:50:08 Stage Position Measurement, pos = 5.037999 m 09:50:11 Move:node 1 absolute position = -0.024271 m 09:50:11 Stage Position Measurement, pos = 0.001341 m 09:50:11 Stage Position Measurement, pos = -0.024271 m 09:50:11 Stage Position Measurement, pos = 5.037999 m PolyFit: -11.175960 23.239159 -12.992799 1.076395, Error = 0.000000 Max position = -0.02487309:50:14 Move:node 1 absolute position = -0.024873 m 09:50:15 Stage Position Measurement, pos = 0.001341 m 09:50:15 Stage Position Measurement, pos = -0.024873 m 09:50:15 Stage Position Measurement, pos = 5.037999 m 09:50:17 Stage Position Measurement, pos = 0.001341 m 09:50:17 Stage Position Measurement, pos = -0.024873 m 09:50:17 Stage Position Measurement, pos = 5.037999 m 09:50:20 Move:node 2 absolute position = 0.000341 m 09:50:20 Stage Position Measurement, pos = 0.000340 m 09:50:20 Stage Position Measurement, pos = -0.024873 m 09:50:20 Stage Position Measurement, pos = 5.037999 m 09:50:23 Move:node 2 absolute position = 0.000360 m 09:50:23 Stage Position Measurement, pos = 0.000361 m 09:50:23 Stage Position Measurement, pos = -0.024873 m 09:50:23 Stage Position Measurement, pos = 5.037999 m 09:50:27 Move:node 2 absolute position = 0.000381 m 09:50:27 Stage Position Measurement, pos = 0.000381 m 09:50:27 Stage Position Measurement, pos = -0.024873 m 09:50:27 Stage Position Measurement, pos = 5.037999 m 09:50:30 Move:node 2 absolute position = 0.000401 m 09:50:30 Stage Position Measurement, pos = 0.000401 m 09:50:30 Stage Position Measurement, pos = -0.024873 m 09:50:30 Stage Position Measurement, pos = 5.037999 m 09:50:34 Move:node 2 absolute position = 0.000421 m 09:50:34 Stage Position Measurement, pos = 0.000421 m 09:50:34 Stage Position Measurement, pos = -0.024873 m 09:50:34 Stage Position Measurement, pos = 5.037999 m 09:50:37 Move:node 2 absolute position = 0.000441 m 09:50:38 Stage Position Measurement, pos = 0.000441 m 09:50:38 Stage Position Measurement, pos = -0.024873 m 09:50:38 Stage Position Measurement, pos = 5.037999 m 09:50:41 Move:node 2 absolute position = 0.000461 m 09:50:41 Stage Position Measurement, pos = 0.000461 m 09:50:41 Stage Position Measurement, pos = -0.024873 m 09:50:41 Stage Position Measurement, pos = 5.037999 m 09:50:44 Move:node 2 absolute position = 0.000481 m 09:50:44 Stage Position Measurement, pos = 0.000481 m 09:50:44 Stage Position Measurement, pos = -0.024873 m 09:50:44 Stage Position Measurement, pos = 5.037999 m 09:50:48 Move:node 2 absolute position = 0.000501 m 09:50:48 Stage Position Measurement, pos = 0.000501 m 09:50:48 Stage Position Measurement, pos = -0.024873 m 09:50:48 Stage Position Measurement, pos = 5.037999 m 09:50:51 Move:node 2 absolute position = 0.000521 m 09:50:51 Stage Position Measurement, pos = 0.000521 m 09:50:52 Stage Position Measurement, pos = -0.024873 m 09:50:52 Stage Position Measurement, pos = 5.037999 m 09:50:55 Move:node 2 absolute position = 0.000540 m 09:50:55 Stage Position Measurement, pos = 0.000541 m 09:50:55 Stage Position Measurement, pos = -0.024873 m 09:50:55 Stage Position Measurement, pos = 5.037999 m 09:50:59 Move:node 2 absolute position = 0.000561 m 09:50:59 Stage Position Measurement, pos = 0.000561 m 09:50:59 Stage Position Measurement, pos = -0.024873 m 09:50:59 Stage Position Measurement, pos = 5.037999 m 09:51:03 Move:node 2 absolute position = 0.000581 m 09:51:03 Stage Position Measurement, pos = 0.000581 m 09:51:03 Stage Position Measurement, pos = -0.024873 m 09:51:03 Stage Position Measurement, pos = 5.037999 m 09:51:06 Move:node 2 absolute position = 0.000601 m 09:51:06 Stage Position Measurement, pos = 0.000601 m 09:51:06 Stage Position Measurement, pos = -0.024873 m 09:51:06 Stage Position Measurement, pos = 5.037999 m 09:51:09 Move:node 2 absolute position = 0.000621 m 09:51:10 Stage Position Measurement, pos = 0.000620 m 09:51:10 Stage Position Measurement, pos = -0.024873 m 09:51:10 Stage Position Measurement, pos = 5.037999 m 09:51:13 Move:node 2 absolute position = 0.000641 m 09:51:13 Stage Position Measurement, pos = 0.000641 m 09:51:13 Stage Position Measurement, pos = -0.024873 m 09:51:13 Stage Position Measurement, pos = 5.037999 m 09:51:17 Move:node 2 absolute position = 0.000661 m 09:51:17 Stage Position Measurement, pos = 0.000661 m 09:51:17 Stage Position Measurement, pos = -0.024873 m 09:51:17 Stage Position Measurement, pos = 5.037999 m 09:51:20 Move:node 2 absolute position = 0.000681 m 09:51:20 Stage Position Measurement, pos = 0.000681 m 09:51:20 Stage Position Measurement, pos = -0.024873 m 09:51:20 Stage Position Measurement, pos = 5.037999 m 09:51:24 Move:node 2 absolute position = 0.000701 m 09:51:24 Stage Position Measurement, pos = 0.000701 m 09:51:24 Stage Position Measurement, pos = -0.024873 m 09:51:24 Stage Position Measurement, pos = 5.037999 m 09:51:27 Move:node 2 absolute position = 0.000721 m 09:51:27 Stage Position Measurement, pos = 0.000721 m 09:51:27 Stage Position Measurement, pos = -0.024873 m 09:51:27 Stage Position Measurement, pos = 5.037999 m Linear fit Error = 0.00000009:51:31 Move:node 2 absolute position = 0.000540 m 09:51:31 Stage Position Measurement, pos = 0.000540 m 09:51:31 Stage Position Measurement, pos = -0.024873 m 09:51:31 Stage Position Measurement, pos = 5.037999 m 09:51:33 Stage Position Measurement, pos = 0.000540 m 09:51:33 Stage Position Measurement, pos = -0.024873 m 09:51:33 Stage Position Measurement, pos = 5.037999 m 09:51:42 Move:node 1 absolute position = 0.000000 m 09:51:43 Stage Position Measurement, pos = 0.000000 m 09:51:45 Move:node 2 absolute position = 0.000000 m 09:51:46 Move:node 0 absolute position = 0.000000 m 09:53:41 Move:node 0 absolute position = 5.038034 m 09:53:41 Stage Position Measurement, pos = 0.000000 m 09:53:41 Stage Position Measurement, pos = 0.000000 m 09:53:41 Stage Position Measurement, pos = 5.038034 m 09:53:48 Move:node 1 absolute position = -0.024842 m 09:53:48 Stage Position Measurement, pos = 0.000000 m 09:53:48 Stage Position Measurement, pos = -0.024842 m 09:53:48 Stage Position Measurement, pos = 5.038034 m 09:53:50 Move:node 2 absolute position = 0.000540 m 09:53:50 Stage Position Measurement, pos = 0.000540 m 09:53:50 Stage Position Measurement, pos = -0.024842 m 09:53:50 Stage Position Measurement, pos = 5.038034 m 09:53:54 Stage Position Measurement, pos = 0.000540 m 09:53:54 Stage Position Measurement, pos = -0.024842 m 09:53:54 Stage Position Measurement, pos = 5.038034 m 09:53:57 Move:node 2 absolute position = -0.000260 m 09:53:57 Stage Position Measurement, pos = -0.000260 m 09:53:57 Stage Position Measurement, pos = -0.024842 m 09:53:57 Stage Position Measurement, pos = 5.038034 m 09:53:59 Move:node 0 absolute position = 5.037034 m 09:53:59 Stage Position Measurement, pos = -0.000260 m 09:53:59 Stage Position Measurement, pos = -0.024842 m 09:53:59 Stage Position Measurement, pos = 5.037034 m 09:54:02 Move:node 0 absolute position = 5.037134 m 09:54:02 Stage Position Measurement, pos = -0.000260 m 09:54:02 Stage Position Measurement, pos = -0.024842 m 09:54:02 Stage Position Measurement, pos = 5.037134 m 09:54:05 Move:node 0 absolute position = 5.037234 m 09:54:05 Stage Position Measurement, pos = -0.000260 m 09:54:05 Stage Position Measurement, pos = -0.024842 m 09:54:05 Stage Position Measurement, pos = 5.037234 m 09:54:09 Move:node 0 absolute position = 5.037334 m 09:54:09 Stage Position Measurement, pos = -0.000260 m 09:54:09 Stage Position Measurement, pos = -0.024842 m 09:54:09 Stage Position Measurement, pos = 5.037334 m 09:54:12 Move:node 0 absolute position = 5.037434 m 09:54:12 Stage Position Measurement, pos = -0.000260 m 09:54:12 Stage Position Measurement, pos = -0.024842 m 09:54:12 Stage Position Measurement, pos = 5.037434 m 09:54:16 Move:node 0 absolute position = 5.037534 m 09:54:16 Stage Position Measurement, pos = -0.000260 m 09:54:16 Stage Position Measurement, pos = -0.024842 m 09:54:16 Stage Position Measurement, pos = 5.037534 m 09:54:19 Move:node 0 absolute position = 5.037634 m 09:54:19 Stage Position Measurement, pos = -0.000260 m 09:54:19 Stage Position Measurement, pos = -0.024842 m 09:54:19 Stage Position Measurement, pos = 5.037634 m 09:54:23 Move:node 0 absolute position = 5.037734 m 09:54:23 Stage Position Measurement, pos = -0.000260 m 09:54:23 Stage Position Measurement, pos = -0.024842 m 09:54:23 Stage Position Measurement, pos = 5.037734 m 09:54:26 Move:node 0 absolute position = 5.037834 m 09:54:26 Stage Position Measurement, pos = -0.000260 m 09:54:26 Stage Position Measurement, pos = -0.024842 m 09:54:26 Stage Position Measurement, pos = 5.037834 m 09:54:29 Move:node 0 absolute position = 5.037934 m 09:54:29 Stage Position Measurement, pos = -0.000260 m 09:54:29 Stage Position Measurement, pos = -0.024842 m 09:54:29 Stage Position Measurement, pos = 5.037934 m 09:54:33 Move:node 0 absolute position = 5.038034 m 09:54:33 Stage Position Measurement, pos = -0.000260 m 09:54:33 Stage Position Measurement, pos = -0.024842 m 09:54:33 Stage Position Measurement, pos = 5.038034 m 09:54:36 Move:node 0 absolute position = 5.038134 m 09:54:36 Stage Position Measurement, pos = -0.000260 m 09:54:36 Stage Position Measurement, pos = -0.024842 m 09:54:36 Stage Position Measurement, pos = 5.038134 m 09:54:40 Move:node 0 absolute position = 5.038234 m 09:54:40 Stage Position Measurement, pos = -0.000260 m 09:54:40 Stage Position Measurement, pos = -0.024842 m 09:54:40 Stage Position Measurement, pos = 5.038234 m 09:54:43 Move:node 0 absolute position = 5.038334 m 09:54:43 Stage Position Measurement, pos = -0.000260 m 09:54:43 Stage Position Measurement, pos = -0.024842 m 09:54:43 Stage Position Measurement, pos = 5.038334 m 09:54:46 Move:node 0 absolute position = 5.038434 m 09:54:46 Stage Position Measurement, pos = -0.000260 m 09:54:46 Stage Position Measurement, pos = -0.024842 m 09:54:46 Stage Position Measurement, pos = 5.038434 m 09:54:50 Move:node 0 absolute position = 5.038534 m 09:54:50 Stage Position Measurement, pos = -0.000260 m 09:54:50 Stage Position Measurement, pos = -0.024842 m 09:54:50 Stage Position Measurement, pos = 5.038534 m 09:54:53 Move:node 0 absolute position = 5.038634 m 09:54:53 Stage Position Measurement, pos = -0.000260 m 09:54:53 Stage Position Measurement, pos = -0.024842 m 09:54:53 Stage Position Measurement, pos = 5.038634 m 09:54:57 Move:node 0 absolute position = 5.038734 m 09:54:57 Stage Position Measurement, pos = -0.000260 m 09:54:57 Stage Position Measurement, pos = -0.024842 m 09:54:57 Stage Position Measurement, pos = 5.038734 m 09:55:00 Move:node 0 absolute position = 5.038834 m 09:55:00 Stage Position Measurement, pos = -0.000260 m 09:55:00 Stage Position Measurement, pos = -0.024842 m 09:55:00 Stage Position Measurement, pos = 5.038834 m 09:55:03 Move:node 0 absolute position = 5.038934 m 09:55:03 Stage Position Measurement, pos = -0.000260 m 09:55:03 Stage Position Measurement, pos = -0.024842 m 09:55:03 Stage Position Measurement, pos = 5.038934 m PolyFit: 75513201.357592 -227029449.958741 227519453.345875 -76003204.603209, Error = 0.000000 Max position = 5.03809309:55:07 Move:node 0 absolute position = 5.038093 m 09:55:07 Stage Position Measurement, pos = -0.000260 m 09:55:07 Stage Position Measurement, pos = -0.024842 m 09:55:07 Stage Position Measurement, pos = 5.038093 m 09:55:10 Stage Position Measurement, pos = -0.000260 m 09:55:10 Stage Position Measurement, pos = -0.024842 m 09:55:10 Stage Position Measurement, pos = 5.038093 m 09:55:12 Move:node 1 absolute position = -0.025442 m 09:55:12 Stage Position Measurement, pos = -0.000260 m 09:55:12 Stage Position Measurement, pos = -0.025442 m 09:55:12 Stage Position Measurement, pos = 5.038093 m 09:55:15 Move:node 1 absolute position = -0.025382 m 09:55:15 Stage Position Measurement, pos = -0.000260 m 09:55:15 Stage Position Measurement, pos = -0.025382 m 09:55:15 Stage Position Measurement, pos = 5.038093 m 09:55:18 Move:node 1 absolute position = -0.025322 m 09:55:18 Stage Position Measurement, pos = -0.000260 m 09:55:18 Stage Position Measurement, pos = -0.025322 m 09:55:18 Stage Position Measurement, pos = 5.038093 m 09:55:22 Move:node 1 absolute position = -0.025262 m 09:55:22 Stage Position Measurement, pos = -0.000260 m 09:55:22 Stage Position Measurement, pos = -0.025262 m 09:55:22 Stage Position Measurement, pos = 5.038093 m 09:55:25 Move:node 1 absolute position = -0.025202 m 09:55:25 Stage Position Measurement, pos = -0.000260 m 09:55:25 Stage Position Measurement, pos = -0.025202 m 09:55:25 Stage Position Measurement, pos = 5.038093 m 09:55:29 Move:node 1 absolute position = -0.025142 m 09:55:29 Stage Position Measurement, pos = -0.000260 m 09:55:29 Stage Position Measurement, pos = -0.025142 m 09:55:29 Stage Position Measurement, pos = 5.038093 m 09:55:32 Move:node 1 absolute position = -0.025082 m 09:55:32 Stage Position Measurement, pos = -0.000260 m 09:55:32 Stage Position Measurement, pos = -0.025082 m 09:55:32 Stage Position Measurement, pos = 5.038093 m 09:55:35 Move:node 1 absolute position = -0.025022 m 09:55:35 Stage Position Measurement, pos = -0.000260 m 09:55:35 Stage Position Measurement, pos = -0.025022 m 09:55:35 Stage Position Measurement, pos = 5.038093 m 09:55:39 Move:node 1 absolute position = -0.024962 m 09:55:39 Stage Position Measurement, pos = -0.000260 m 09:55:39 Stage Position Measurement, pos = -0.024962 m 09:55:39 Stage Position Measurement, pos = 5.038093 m 09:55:42 Move:node 1 absolute position = -0.024902 m 09:55:42 Stage Position Measurement, pos = -0.000260 m 09:55:42 Stage Position Measurement, pos = -0.024902 m 09:55:42 Stage Position Measurement, pos = 5.038093 m 09:55:46 Move:node 1 absolute position = -0.024842 m 09:55:46 Stage Position Measurement, pos = -0.000260 m 09:55:46 Stage Position Measurement, pos = -0.024842 m 09:55:46 Stage Position Measurement, pos = 5.038093 m 09:55:49 Move:node 1 absolute position = -0.024782 m 09:55:49 Stage Position Measurement, pos = -0.000260 m 09:55:49 Stage Position Measurement, pos = -0.024782 m 09:55:49 Stage Position Measurement, pos = 5.038093 m 09:55:53 Move:node 1 absolute position = -0.024722 m 09:55:53 Stage Position Measurement, pos = -0.000260 m 09:55:53 Stage Position Measurement, pos = -0.024722 m 09:55:53 Stage Position Measurement, pos = 5.038093 m 09:55:56 Move:node 1 absolute position = -0.024662 m 09:55:56 Stage Position Measurement, pos = -0.000260 m 09:55:56 Stage Position Measurement, pos = -0.024662 m 09:55:56 Stage Position Measurement, pos = 5.038093 m 09:55:59 Move:node 1 absolute position = -0.024602 m 09:55:59 Stage Position Measurement, pos = -0.000260 m 09:55:59 Stage Position Measurement, pos = -0.024602 m 09:55:59 Stage Position Measurement, pos = 5.038093 m 09:56:03 Move:node 1 absolute position = -0.024542 m 09:56:03 Stage Position Measurement, pos = -0.000260 m 09:56:03 Stage Position Measurement, pos = -0.024542 m 09:56:03 Stage Position Measurement, pos = 5.038093 m 09:56:06 Move:node 1 absolute position = -0.024482 m 09:56:06 Stage Position Measurement, pos = -0.000260 m 09:56:06 Stage Position Measurement, pos = -0.024482 m 09:56:06 Stage Position Measurement, pos = 5.038093 m 09:56:10 Move:node 1 absolute position = -0.024422 m 09:56:10 Stage Position Measurement, pos = -0.000260 m 09:56:10 Stage Position Measurement, pos = -0.024422 m 09:56:10 Stage Position Measurement, pos = 5.038093 m 09:56:13 Move:node 1 absolute position = -0.024362 m 09:56:13 Stage Position Measurement, pos = -0.000260 m 09:56:13 Stage Position Measurement, pos = -0.024362 m 09:56:13 Stage Position Measurement, pos = 5.038093 m 09:56:16 Move:node 1 absolute position = -0.024302 m 09:56:16 Stage Position Measurement, pos = -0.000260 m 09:56:16 Stage Position Measurement, pos = -0.024302 m 09:56:16 Stage Position Measurement, pos = 5.038093 m PolyFit: -23.102799 57.294492 -45.281147 11.239537, Error = 0.000000 Max position = -0.02479009:56:20 Move:node 1 absolute position = -0.024790 m 09:56:20 Stage Position Measurement, pos = -0.000260 m 09:56:20 Stage Position Measurement, pos = -0.024790 m 09:56:20 Stage Position Measurement, pos = 5.038093 m 09:56:23 Stage Position Measurement, pos = -0.000260 m 09:56:23 Stage Position Measurement, pos = -0.024790 m 09:56:23 Stage Position Measurement, pos = 5.038093 m 09:56:25 Move:node 2 absolute position = 0.000340 m 09:56:25 Stage Position Measurement, pos = 0.000340 m 09:56:25 Stage Position Measurement, pos = -0.024790 m 09:56:25 Stage Position Measurement, pos = 5.038093 m 09:56:28 Move:node 2 absolute position = 0.000360 m 09:56:28 Stage Position Measurement, pos = 0.000360 m 09:56:28 Stage Position Measurement, pos = -0.024790 m 09:56:28 Stage Position Measurement, pos = 5.038093 m 09:56:31 Move:node 2 absolute position = 0.000380 m 09:56:31 Stage Position Measurement, pos = 0.000380 m 09:56:31 Stage Position Measurement, pos = -0.024790 m 09:56:31 Stage Position Measurement, pos = 5.038093 m 09:56:35 Move:node 2 absolute position = 0.000400 m 09:56:35 Stage Position Measurement, pos = 0.000400 m 09:56:35 Stage Position Measurement, pos = -0.024790 m 09:56:35 Stage Position Measurement, pos = 5.038093 m 09:56:38 Move:node 2 absolute position = 0.000420 m 09:56:38 Stage Position Measurement, pos = 0.000420 m 09:56:38 Stage Position Measurement, pos = -0.024790 m 09:56:38 Stage Position Measurement, pos = 5.038093 m 09:56:42 Move:node 2 absolute position = 0.000440 m 09:56:42 Stage Position Measurement, pos = 0.000440 m 09:56:42 Stage Position Measurement, pos = -0.024790 m 09:56:42 Stage Position Measurement, pos = 5.038093 m 09:56:45 Move:node 2 absolute position = 0.000460 m 09:56:45 Stage Position Measurement, pos = 0.000460 m 09:56:45 Stage Position Measurement, pos = -0.024790 m 09:56:45 Stage Position Measurement, pos = 5.038093 m 09:56:48 Move:node 2 absolute position = 0.000480 m 09:56:48 Stage Position Measurement, pos = 0.000480 m 09:56:48 Stage Position Measurement, pos = -0.024790 m 09:56:48 Stage Position Measurement, pos = 5.038093 m 09:56:52 Move:node 2 absolute position = 0.000500 m 09:56:52 Stage Position Measurement, pos = 0.000500 m 09:56:52 Stage Position Measurement, pos = -0.024790 m 09:56:52 Stage Position Measurement, pos = 5.038093 m 09:56:55 Move:node 2 absolute position = 0.000520 m 09:56:55 Stage Position Measurement, pos = 0.000520 m 09:56:55 Stage Position Measurement, pos = -0.024790 m 09:56:55 Stage Position Measurement, pos = 5.038093 m 09:56:59 Move:node 2 absolute position = 0.000540 m 09:56:59 Stage Position Measurement, pos = 0.000540 m 09:56:59 Stage Position Measurement, pos = -0.024790 m 09:56:59 Stage Position Measurement, pos = 5.038093 m 09:57:02 Move:node 2 absolute position = 0.000560 m 09:57:02 Stage Position Measurement, pos = 0.000560 m 09:57:02 Stage Position Measurement, pos = -0.024790 m 09:57:02 Stage Position Measurement, pos = 5.038093 m 09:57:06 Move:node 2 absolute position = 0.000580 m 09:57:06 Stage Position Measurement, pos = 0.000580 m 09:57:06 Stage Position Measurement, pos = -0.024790 m 09:57:06 Stage Position Measurement, pos = 5.038093 m 09:57:09 Move:node 2 absolute position = 0.000600 m 09:57:09 Stage Position Measurement, pos = 0.000600 m 09:57:09 Stage Position Measurement, pos = -0.024790 m 09:57:09 Stage Position Measurement, pos = 5.038093 m 09:57:12 Move:node 2 absolute position = 0.000620 m 09:57:12 Stage Position Measurement, pos = 0.000620 m 09:57:12 Stage Position Measurement, pos = -0.024790 m 09:57:12 Stage Position Measurement, pos = 5.038093 m 09:57:16 Move:node 2 absolute position = 0.000640 m 09:57:16 Stage Position Measurement, pos = 0.000640 m 09:57:16 Stage Position Measurement, pos = -0.024790 m 09:57:16 Stage Position Measurement, pos = 5.038093 m 09:57:19 Move:node 2 absolute position = 0.000660 m 09:57:19 Stage Position Measurement, pos = 0.000660 m 09:57:19 Stage Position Measurement, pos = -0.024790 m 09:57:19 Stage Position Measurement, pos = 5.038093 m 09:57:23 Move:node 2 absolute position = 0.000680 m 09:57:23 Stage Position Measurement, pos = 0.000680 m 09:57:23 Stage Position Measurement, pos = -0.024790 m 09:57:23 Stage Position Measurement, pos = 5.038093 m 09:57:26 Move:node 2 absolute position = 0.000700 m 09:57:26 Stage Position Measurement, pos = 0.000700 m 09:57:26 Stage Position Measurement, pos = -0.024790 m 09:57:26 Stage Position Measurement, pos = 5.038093 m 09:57:29 Move:node 2 absolute position = 0.000720 m 09:57:29 Stage Position Measurement, pos = 0.000720 m 09:57:29 Stage Position Measurement, pos = -0.024790 m 09:57:29 Stage Position Measurement, pos = 5.038093 m Linear fit Error = 0.00000009:57:33 Move:node 2 absolute position = 0.000541 m 09:57:33 Stage Position Measurement, pos = 0.000541 m 09:57:33 Stage Position Measurement, pos = -0.024790 m 09:57:33 Stage Position Measurement, pos = 5.038093 m 09:57:36 Stage Position Measurement, pos = 0.000541 m 09:57:36 Stage Position Measurement, pos = -0.024790 m 09:57:36 Stage Position Measurement, pos = 5.038093 m 09:57:38 Move:node 2 absolute position = 0.001341 m 09:57:38 Stage Position Measurement, pos = 0.001341 m 09:57:38 Stage Position Measurement, pos = -0.024790 m 09:57:38 Stage Position Measurement, pos = 5.038093 m 09:57:40 Move:node 0 absolute position = 5.037093 m 09:57:40 Stage Position Measurement, pos = 0.001341 m 09:57:40 Stage Position Measurement, pos = -0.024790 m 09:57:40 Stage Position Measurement, pos = 5.037093 m 09:57:43 Move:node 0 absolute position = 5.037193 m 09:57:43 Stage Position Measurement, pos = 0.001341 m 09:57:43 Stage Position Measurement, pos = -0.024790 m 09:57:43 Stage Position Measurement, pos = 5.037193 m 09:57:46 Move:node 0 absolute position = 5.037293 m 09:57:46 Stage Position Measurement, pos = 0.001341 m 09:57:46 Stage Position Measurement, pos = -0.024790 m 09:57:46 Stage Position Measurement, pos = 5.037293 m 09:57:50 Move:node 0 absolute position = 5.037393 m 09:57:50 Stage Position Measurement, pos = 0.001341 m 09:57:50 Stage Position Measurement, pos = -0.024790 m 09:57:50 Stage Position Measurement, pos = 5.037393 m 09:57:53 Move:node 0 absolute position = 5.037493 m 09:57:53 Stage Position Measurement, pos = 0.001341 m 09:57:53 Stage Position Measurement, pos = -0.024790 m 09:57:53 Stage Position Measurement, pos = 5.037493 m 09:57:57 Move:node 0 absolute position = 5.037593 m 09:57:57 Stage Position Measurement, pos = 0.001341 m 09:57:57 Stage Position Measurement, pos = -0.024790 m 09:57:57 Stage Position Measurement, pos = 5.037593 m 09:58:00 Move:node 0 absolute position = 5.037693 m 09:58:00 Stage Position Measurement, pos = 0.001341 m 09:58:00 Stage Position Measurement, pos = -0.024790 m 09:58:00 Stage Position Measurement, pos = 5.037693 m 09:58:04 Move:node 0 absolute position = 5.037793 m 09:58:04 Stage Position Measurement, pos = 0.001341 m 09:58:04 Stage Position Measurement, pos = -0.024790 m 09:58:04 Stage Position Measurement, pos = 5.037793 m 09:58:07 Move:node 0 absolute position = 5.037893 m 09:58:07 Stage Position Measurement, pos = 0.001341 m 09:58:07 Stage Position Measurement, pos = -0.024790 m 09:58:07 Stage Position Measurement, pos = 5.037893 m 09:58:10 Move:node 0 absolute position = 5.037993 m 09:58:10 Stage Position Measurement, pos = 0.001341 m 09:58:10 Stage Position Measurement, pos = -0.024790 m 09:58:10 Stage Position Measurement, pos = 5.037993 m 09:58:14 Move:node 0 absolute position = 5.038093 m 09:58:14 Stage Position Measurement, pos = 0.001341 m 09:58:14 Stage Position Measurement, pos = -0.024790 m 09:58:14 Stage Position Measurement, pos = 5.038093 m 09:58:17 Move:node 0 absolute position = 5.038193 m 09:58:17 Stage Position Measurement, pos = 0.001341 m 09:58:17 Stage Position Measurement, pos = -0.024790 m 09:58:17 Stage Position Measurement, pos = 5.038193 m 09:58:21 Move:node 0 absolute position = 5.038293 m 09:58:21 Stage Position Measurement, pos = 0.001341 m 09:58:21 Stage Position Measurement, pos = -0.024790 m 09:58:21 Stage Position Measurement, pos = 5.038293 m 09:58:24 Move:node 0 absolute position = 5.038393 m 09:58:24 Stage Position Measurement, pos = 0.001341 m 09:58:24 Stage Position Measurement, pos = -0.024790 m 09:58:24 Stage Position Measurement, pos = 5.038393 m 09:58:27 Move:node 0 absolute position = 5.038493 m 09:58:27 Stage Position Measurement, pos = 0.001341 m 09:58:27 Stage Position Measurement, pos = -0.024790 m 09:58:27 Stage Position Measurement, pos = 5.038493 m 09:58:31 Move:node 0 absolute position = 5.038593 m 09:58:31 Stage Position Measurement, pos = 0.001341 m 09:58:31 Stage Position Measurement, pos = -0.024790 m 09:58:31 Stage Position Measurement, pos = 5.038593 m 09:58:34 Move:node 0 absolute position = 5.038693 m 09:58:34 Stage Position Measurement, pos = 0.001341 m 09:58:34 Stage Position Measurement, pos = -0.024790 m 09:58:34 Stage Position Measurement, pos = 5.038693 m 09:58:38 Move:node 0 absolute position = 5.038793 m 09:58:38 Stage Position Measurement, pos = 0.001341 m 09:58:38 Stage Position Measurement, pos = -0.024790 m 09:58:38 Stage Position Measurement, pos = 5.038793 m 09:58:41 Move:node 0 absolute position = 5.038893 m 09:58:41 Stage Position Measurement, pos = 0.001341 m 09:58:41 Stage Position Measurement, pos = -0.024790 m 09:58:41 Stage Position Measurement, pos = 5.038893 m 09:58:44 Move:node 0 absolute position = 5.038993 m 09:58:44 Stage Position Measurement, pos = 0.001341 m 09:58:44 Stage Position Measurement, pos = -0.024790 m 09:58:44 Stage Position Measurement, pos = 5.038993 m PolyFit: -40819592.132316 122084658.803267 -121710387.053211 40445320.519289, Error = 0.000000 Max position = 5.03799109:58:48 Move:node 0 absolute position = 5.037991 m 09:58:48 Stage Position Measurement, pos = 0.001341 m 09:58:48 Stage Position Measurement, pos = -0.024790 m 09:58:48 Stage Position Measurement, pos = 5.037991 m 09:58:51 Stage Position Measurement, pos = 0.001341 m 09:58:51 Stage Position Measurement, pos = -0.024790 m 09:58:51 Stage Position Measurement, pos = 5.037991 m 09:58:53 Move:node 1 absolute position = -0.025390 m 09:58:53 Stage Position Measurement, pos = 0.001341 m 09:58:53 Stage Position Measurement, pos = -0.025390 m 09:58:53 Stage Position Measurement, pos = 5.037991 m 09:58:56 Move:node 1 absolute position = -0.025330 m 09:58:56 Stage Position Measurement, pos = 0.001341 m 09:58:56 Stage Position Measurement, pos = -0.025330 m 09:58:56 Stage Position Measurement, pos = 5.037991 m 09:58:59 Move:node 1 absolute position = -0.025270 m 09:58:59 Stage Position Measurement, pos = 0.001341 m 09:58:59 Stage Position Measurement, pos = -0.025270 m 09:58:59 Stage Position Measurement, pos = 5.037991 m 09:59:03 Move:node 1 absolute position = -0.025210 m 09:59:03 Stage Position Measurement, pos = 0.001341 m 09:59:03 Stage Position Measurement, pos = -0.025210 m 09:59:03 Stage Position Measurement, pos = 5.037991 m 09:59:06 Move:node 1 absolute position = -0.025150 m 09:59:06 Stage Position Measurement, pos = 0.001341 m 09:59:06 Stage Position Measurement, pos = -0.025150 m 09:59:06 Stage Position Measurement, pos = 5.037991 m 09:59:10 Move:node 1 absolute position = -0.025090 m 09:59:10 Stage Position Measurement, pos = 0.001341 m 09:59:10 Stage Position Measurement, pos = -0.025090 m 09:59:10 Stage Position Measurement, pos = 5.037991 m 09:59:13 Move:node 1 absolute position = -0.025030 m 09:59:13 Stage Position Measurement, pos = 0.001341 m 09:59:13 Stage Position Measurement, pos = -0.025030 m 09:59:13 Stage Position Measurement, pos = 5.037991 m 09:59:17 Move:node 1 absolute position = -0.024970 m 09:59:17 Stage Position Measurement, pos = 0.001341 m 09:59:17 Stage Position Measurement, pos = -0.024970 m 09:59:17 Stage Position Measurement, pos = 5.037991 m 09:59:20 Move:node 1 absolute position = -0.024910 m 09:59:20 Stage Position Measurement, pos = 0.001341 m 09:59:20 Stage Position Measurement, pos = -0.024910 m 09:59:20 Stage Position Measurement, pos = 5.037991 m 09:59:23 Move:node 1 absolute position = -0.024850 m 09:59:23 Stage Position Measurement, pos = 0.001341 m 09:59:23 Stage Position Measurement, pos = -0.024850 m 09:59:23 Stage Position Measurement, pos = 5.037991 m 09:59:27 Move:node 1 absolute position = -0.024790 m 09:59:27 Stage Position Measurement, pos = 0.001341 m 09:59:27 Stage Position Measurement, pos = -0.024790 m 09:59:27 Stage Position Measurement, pos = 5.037991 m 09:59:30 Move:node 1 absolute position = -0.024730 m 09:59:30 Stage Position Measurement, pos = 0.001341 m 09:59:30 Stage Position Measurement, pos = -0.024730 m 09:59:30 Stage Position Measurement, pos = 5.037991 m 09:59:34 Move:node 1 absolute position = -0.024670 m 09:59:34 Stage Position Measurement, pos = 0.001341 m 09:59:34 Stage Position Measurement, pos = -0.024670 m 09:59:34 Stage Position Measurement, pos = 5.037991 m 09:59:37 Move:node 1 absolute position = -0.024610 m 09:59:37 Stage Position Measurement, pos = 0.001341 m 09:59:37 Stage Position Measurement, pos = -0.024610 m 09:59:37 Stage Position Measurement, pos = 5.037991 m 09:59:40 Move:node 1 absolute position = -0.024550 m 09:59:40 Stage Position Measurement, pos = 0.001341 m 09:59:40 Stage Position Measurement, pos = -0.024550 m 09:59:40 Stage Position Measurement, pos = 5.037991 m 09:59:44 Move:node 1 absolute position = -0.024490 m 09:59:44 Stage Position Measurement, pos = 0.001341 m 09:59:44 Stage Position Measurement, pos = -0.024490 m 09:59:44 Stage Position Measurement, pos = 5.037991 m 09:59:47 Move:node 1 absolute position = -0.024430 m 09:59:47 Stage Position Measurement, pos = 0.001341 m 09:59:47 Stage Position Measurement, pos = -0.024430 m 09:59:47 Stage Position Measurement, pos = 5.037991 m 09:59:51 Move:node 1 absolute position = -0.024370 m 09:59:51 Stage Position Measurement, pos = 0.001341 m 09:59:51 Stage Position Measurement, pos = -0.024370 m 09:59:51 Stage Position Measurement, pos = 5.037991 m 09:59:54 Move:node 1 absolute position = -0.024310 m 09:59:54 Stage Position Measurement, pos = 0.001341 m 09:59:54 Stage Position Measurement, pos = -0.024310 m 09:59:54 Stage Position Measurement, pos = 5.037991 m 09:59:57 Move:node 1 absolute position = -0.024250 m 09:59:57 Stage Position Measurement, pos = 0.001341 m 09:59:57 Stage Position Measurement, pos = -0.024250 m 09:59:57 Stage Position Measurement, pos = 5.037991 m PolyFit: -4.136333 2.316631 7.709609 -5.743660, Error = 0.000000 Max position = -0.02487810:00:01 Move:node 1 absolute position = -0.024878 m 10:00:01 Stage Position Measurement, pos = 0.001341 m 10:00:01 Stage Position Measurement, pos = -0.024878 m 10:00:01 Stage Position Measurement, pos = 5.037991 m 10:00:04 Stage Position Measurement, pos = 0.001341 m 10:00:04 Stage Position Measurement, pos = -0.024878 m 10:00:04 Stage Position Measurement, pos = 5.037991 m 10:00:06 Move:node 2 absolute position = 0.000341 m 10:00:06 Stage Position Measurement, pos = 0.000341 m 10:00:06 Stage Position Measurement, pos = -0.024878 m 10:00:06 Stage Position Measurement, pos = 5.037991 m 10:00:09 Move:node 2 absolute position = 0.000361 m 10:00:09 Stage Position Measurement, pos = 0.000361 m 10:00:09 Stage Position Measurement, pos = -0.024878 m 10:00:09 Stage Position Measurement, pos = 5.037991 m 10:00:12 Move:node 2 absolute position = 0.000381 m 10:00:12 Stage Position Measurement, pos = 0.000381 m 10:00:12 Stage Position Measurement, pos = -0.024878 m 10:00:12 Stage Position Measurement, pos = 5.037991 m 10:00:16 Move:node 2 absolute position = 0.000401 m 10:00:16 Stage Position Measurement, pos = 0.000401 m 10:00:16 Stage Position Measurement, pos = -0.024878 m 10:00:16 Stage Position Measurement, pos = 5.037991 m 10:00:19 Move:node 2 absolute position = 0.000420 m 10:00:19 Stage Position Measurement, pos = 0.000420 m 10:00:19 Stage Position Measurement, pos = -0.024878 m 10:00:19 Stage Position Measurement, pos = 5.037991 m 10:00:23 Move:node 2 absolute position = 0.000441 m 10:00:23 Stage Position Measurement, pos = 0.000441 m 10:00:23 Stage Position Measurement, pos = -0.024878 m 10:00:23 Stage Position Measurement, pos = 5.037991 m 10:00:26 Move:node 2 absolute position = 0.000461 m 10:00:26 Stage Position Measurement, pos = 0.000461 m 10:00:26 Stage Position Measurement, pos = -0.024878 m 10:00:26 Stage Position Measurement, pos = 5.037991 m 10:00:29 Move:node 2 absolute position = 0.000480 m 10:00:29 Stage Position Measurement, pos = 0.000480 m 10:00:29 Stage Position Measurement, pos = -0.024878 m 10:00:29 Stage Position Measurement, pos = 5.037991 m 10:00:33 Move:node 2 absolute position = 0.000500 m 10:00:33 Stage Position Measurement, pos = 0.000500 m 10:00:33 Stage Position Measurement, pos = -0.024878 m 10:00:33 Stage Position Measurement, pos = 5.037991 m 10:00:36 Move:node 2 absolute position = 0.000521 m 10:00:36 Stage Position Measurement, pos = 0.000521 m 10:00:36 Stage Position Measurement, pos = -0.024878 m 10:00:36 Stage Position Measurement, pos = 5.037991 m 10:00:40 Move:node 2 absolute position = 0.000541 m 10:00:40 Stage Position Measurement, pos = 0.000541 m 10:00:40 Stage Position Measurement, pos = -0.024878 m 10:00:40 Stage Position Measurement, pos = 5.037991 m 10:00:43 Move:node 2 absolute position = 0.000561 m 10:00:43 Stage Position Measurement, pos = 0.000561 m 10:00:43 Stage Position Measurement, pos = -0.024878 m 10:00:43 Stage Position Measurement, pos = 5.037991 m 10:00:47 Move:node 2 absolute position = 0.000581 m 10:00:47 Stage Position Measurement, pos = 0.000581 m 10:00:47 Stage Position Measurement, pos = -0.024878 m 10:00:47 Stage Position Measurement, pos = 5.037991 m 10:00:50 Move:node 2 absolute position = 0.000601 m 10:00:50 Stage Position Measurement, pos = 0.000601 m 10:00:50 Stage Position Measurement, pos = -0.024878 m 10:00:50 Stage Position Measurement, pos = 5.037991 m 10:00:53 Move:node 2 absolute position = 0.000621 m 10:00:53 Stage Position Measurement, pos = 0.000621 m 10:00:53 Stage Position Measurement, pos = -0.024878 m 10:00:53 Stage Position Measurement, pos = 5.037991 m 10:00:57 Move:node 2 absolute position = 0.000641 m 10:00:57 Stage Position Measurement, pos = 0.000641 m 10:00:57 Stage Position Measurement, pos = -0.024878 m 10:00:57 Stage Position Measurement, pos = 5.037991 m 10:01:00 Move:node 2 absolute position = 0.000661 m 10:01:00 Stage Position Measurement, pos = 0.000661 m 10:01:00 Stage Position Measurement, pos = -0.024878 m 10:01:00 Stage Position Measurement, pos = 5.037991 m 10:01:04 Move:node 2 absolute position = 0.000681 m 10:01:04 Stage Position Measurement, pos = 0.000681 m 10:01:04 Stage Position Measurement, pos = -0.024878 m 10:01:04 Stage Position Measurement, pos = 5.037991 m 10:01:07 Move:node 2 absolute position = 0.000701 m 10:01:07 Stage Position Measurement, pos = 0.000701 m 10:01:07 Stage Position Measurement, pos = -0.024878 m 10:01:07 Stage Position Measurement, pos = 5.037991 m 10:01:10 Move:node 2 absolute position = 0.000721 m 10:01:10 Stage Position Measurement, pos = 0.000721 m 10:01:10 Stage Position Measurement, pos = -0.024878 m 10:01:10 Stage Position Measurement, pos = 5.037991 m Linear fit Error = 0.00000010:01:14 Move:node 2 absolute position = 0.000540 m 10:01:14 Stage Position Measurement, pos = 0.000540 m 10:01:14 Stage Position Measurement, pos = -0.024878 m 10:01:14 Stage Position Measurement, pos = 5.037991 m 10:01:17 Stage Position Measurement, pos = 0.000540 m 10:01:17 Stage Position Measurement, pos = -0.024878 m 10:01:17 Stage Position Measurement, pos = 5.037991 m 10:01:25 Move:node 1 absolute position = 0.000000 m 10:01:26 Stage Position Measurement, pos = 0.000000 m 10:01:28 Move:node 2 absolute position = 0.000000 m 10:01:29 Move:node 0 absolute position = 0.000000 m 10:03:35 Move:node 0 absolute position = 5.834719 m 10:03:35 Stage Position Measurement, pos = 0.000000 m 10:03:35 Stage Position Measurement, pos = 0.000000 m 10:03:35 Stage Position Measurement, pos = 5.834719 m 10:03:40 Move:node 1 absolute position = -0.013364 m 10:03:40 Stage Position Measurement, pos = 0.000000 m 10:03:40 Stage Position Measurement, pos = -0.013364 m 10:03:40 Stage Position Measurement, pos = 5.834719 m 10:03:42 Move:node 2 absolute position = 0.000819 m 10:03:42 Stage Position Measurement, pos = 0.000819 m 10:03:42 Stage Position Measurement, pos = -0.013364 m 10:03:42 Stage Position Measurement, pos = 5.834719 m 10:04:03 Stage Position Measurement, pos = 0.000819 m 10:04:03 Stage Position Measurement, pos = -0.013364 m 10:04:03 Stage Position Measurement, pos = 5.834719 m 10:04:05 Move:node 2 absolute position = 0.000019 m 10:04:05 Stage Position Measurement, pos = 0.000019 m 10:04:05 Stage Position Measurement, pos = -0.013364 m 10:04:05 Stage Position Measurement, pos = 5.834719 m 10:04:07 Move:node 0 absolute position = 5.833719 m 10:04:07 Stage Position Measurement, pos = 0.000019 m 10:04:07 Stage Position Measurement, pos = -0.013364 m 10:04:07 Stage Position Measurement, pos = 5.833719 m 10:04:11 Move:node 0 absolute position = 5.833819 m 10:04:11 Stage Position Measurement, pos = 0.000019 m 10:04:11 Stage Position Measurement, pos = -0.013364 m 10:04:11 Stage Position Measurement, pos = 5.833819 m 10:04:14 Move:node 0 absolute position = 5.833919 m 10:04:14 Stage Position Measurement, pos = 0.000019 m 10:04:14 Stage Position Measurement, pos = -0.013364 m 10:04:14 Stage Position Measurement, pos = 5.833919 m 10:04:17 Move:node 0 absolute position = 5.834019 m 10:04:17 Stage Position Measurement, pos = 0.000019 m 10:04:17 Stage Position Measurement, pos = -0.013364 m 10:04:17 Stage Position Measurement, pos = 5.834019 m 10:04:21 Move:node 0 absolute position = 5.834119 m 10:04:21 Stage Position Measurement, pos = 0.000019 m 10:04:21 Stage Position Measurement, pos = -0.013364 m 10:04:21 Stage Position Measurement, pos = 5.834119 m 10:04:24 Move:node 0 absolute position = 5.834219 m 10:04:24 Stage Position Measurement, pos = 0.000019 m 10:04:24 Stage Position Measurement, pos = -0.013364 m 10:04:24 Stage Position Measurement, pos = 5.834219 m 10:04:28 Move:node 0 absolute position = 5.834319 m 10:04:28 Stage Position Measurement, pos = 0.000019 m 10:04:28 Stage Position Measurement, pos = -0.013364 m 10:04:28 Stage Position Measurement, pos = 5.834319 m 10:04:31 Move:node 0 absolute position = 5.834419 m 10:04:31 Stage Position Measurement, pos = 0.000019 m 10:04:31 Stage Position Measurement, pos = -0.013364 m 10:04:31 Stage Position Measurement, pos = 5.834419 m 10:04:35 Move:node 0 absolute position = 5.834519 m 10:04:35 Stage Position Measurement, pos = 0.000019 m 10:04:35 Stage Position Measurement, pos = -0.013364 m 10:04:35 Stage Position Measurement, pos = 5.834519 m 10:04:38 Move:node 0 absolute position = 5.834619 m 10:04:38 Stage Position Measurement, pos = 0.000019 m 10:04:38 Stage Position Measurement, pos = -0.013364 m 10:04:38 Stage Position Measurement, pos = 5.834619 m 10:04:41 Move:node 0 absolute position = 5.834719 m 10:04:41 Stage Position Measurement, pos = 0.000019 m 10:04:41 Stage Position Measurement, pos = -0.013364 m 10:04:41 Stage Position Measurement, pos = 5.834719 m 10:04:45 Move:node 0 absolute position = 5.834819 m 10:04:45 Stage Position Measurement, pos = 0.000019 m 10:04:45 Stage Position Measurement, pos = -0.013364 m 10:04:45 Stage Position Measurement, pos = 5.834819 m 10:04:48 Move:node 0 absolute position = 5.834919 m 10:04:48 Stage Position Measurement, pos = 0.000019 m 10:04:48 Stage Position Measurement, pos = -0.013364 m 10:04:48 Stage Position Measurement, pos = 5.834919 m 10:04:52 Move:node 0 absolute position = 5.835019 m 10:04:52 Stage Position Measurement, pos = 0.000019 m 10:04:52 Stage Position Measurement, pos = -0.013364 m 10:04:52 Stage Position Measurement, pos = 5.835019 m 10:04:55 Move:node 0 absolute position = 5.835119 m 10:04:55 Stage Position Measurement, pos = 0.000019 m 10:04:55 Stage Position Measurement, pos = -0.013364 m 10:04:55 Stage Position Measurement, pos = 5.835119 m 10:04:58 Move:node 0 absolute position = 5.835219 m 10:04:58 Stage Position Measurement, pos = 0.000019 m 10:04:58 Stage Position Measurement, pos = -0.013364 m 10:04:58 Stage Position Measurement, pos = 5.835219 m 10:05:02 Move:node 0 absolute position = 5.835319 m 10:05:02 Stage Position Measurement, pos = 0.000019 m 10:05:02 Stage Position Measurement, pos = -0.013364 m 10:05:02 Stage Position Measurement, pos = 5.835319 m 10:05:05 Move:node 0 absolute position = 5.835419 m 10:05:05 Stage Position Measurement, pos = 0.000019 m 10:05:05 Stage Position Measurement, pos = -0.013364 m 10:05:05 Stage Position Measurement, pos = 5.835419 m 10:05:09 Move:node 0 absolute position = 5.835519 m 10:05:09 Stage Position Measurement, pos = 0.000019 m 10:05:09 Stage Position Measurement, pos = -0.013364 m 10:05:09 Stage Position Measurement, pos = 5.835519 m 10:05:12 Move:node 0 absolute position = 5.835619 m 10:05:12 Stage Position Measurement, pos = 0.000019 m 10:05:12 Stage Position Measurement, pos = -0.013364 m 10:05:12 Stage Position Measurement, pos = 5.835619 m PolyFit: -135353658.265843 405656497.485633 -405251845.884915 134949006.792344, Error = 0.000000 Max position = 5.83447810:05:15 Move:node 0 absolute position = 5.834478 m 10:05:15 Stage Position Measurement, pos = 0.000019 m 10:05:15 Stage Position Measurement, pos = -0.013364 m 10:05:15 Stage Position Measurement, pos = 5.834478 m 10:05:18 Stage Position Measurement, pos = 0.000019 m 10:05:18 Stage Position Measurement, pos = -0.013364 m 10:05:18 Stage Position Measurement, pos = 5.834478 m 10:05:20 Move:node 1 absolute position = -0.013964 m 10:05:20 Stage Position Measurement, pos = 0.000019 m 10:05:20 Stage Position Measurement, pos = -0.013964 m 10:05:20 Stage Position Measurement, pos = 5.834478 m 10:05:24 Move:node 1 absolute position = -0.013904 m 10:05:24 Stage Position Measurement, pos = 0.000019 m 10:05:24 Stage Position Measurement, pos = -0.013904 m 10:05:24 Stage Position Measurement, pos = 5.834478 m 10:05:27 Move:node 1 absolute position = -0.013844 m 10:05:27 Stage Position Measurement, pos = 0.000019 m 10:05:27 Stage Position Measurement, pos = -0.013844 m 10:05:27 Stage Position Measurement, pos = 5.834478 m 10:05:30 Move:node 1 absolute position = -0.013784 m 10:05:30 Stage Position Measurement, pos = 0.000019 m 10:05:30 Stage Position Measurement, pos = -0.013784 m 10:05:30 Stage Position Measurement, pos = 5.834478 m 10:05:34 Move:node 1 absolute position = -0.013724 m 10:05:34 Stage Position Measurement, pos = 0.000019 m 10:05:34 Stage Position Measurement, pos = -0.013724 m 10:05:34 Stage Position Measurement, pos = 5.834478 m 10:05:37 Move:node 1 absolute position = -0.013664 m 10:05:37 Stage Position Measurement, pos = 0.000019 m 10:05:37 Stage Position Measurement, pos = -0.013664 m 10:05:37 Stage Position Measurement, pos = 5.834478 m 10:05:41 Move:node 1 absolute position = -0.013604 m 10:05:41 Stage Position Measurement, pos = 0.000019 m 10:05:41 Stage Position Measurement, pos = -0.013604 m 10:05:41 Stage Position Measurement, pos = 5.834478 m 10:05:44 Move:node 1 absolute position = -0.013544 m 10:05:44 Stage Position Measurement, pos = 0.000019 m 10:05:44 Stage Position Measurement, pos = -0.013544 m 10:05:44 Stage Position Measurement, pos = 5.834478 m 10:05:47 Move:node 1 absolute position = -0.013484 m 10:05:47 Stage Position Measurement, pos = 0.000019 m 10:05:47 Stage Position Measurement, pos = -0.013484 m 10:05:47 Stage Position Measurement, pos = 5.834478 m 10:05:51 Move:node 1 absolute position = -0.013424 m 10:05:51 Stage Position Measurement, pos = 0.000019 m 10:05:51 Stage Position Measurement, pos = -0.013424 m 10:05:51 Stage Position Measurement, pos = 5.834478 m 10:05:54 Move:node 1 absolute position = -0.013364 m 10:05:54 Stage Position Measurement, pos = 0.000019 m 10:05:54 Stage Position Measurement, pos = -0.013364 m 10:05:54 Stage Position Measurement, pos = 5.834478 m 10:05:58 Move:node 1 absolute position = -0.013304 m 10:05:58 Stage Position Measurement, pos = 0.000019 m 10:05:58 Stage Position Measurement, pos = -0.013304 m 10:05:58 Stage Position Measurement, pos = 5.834478 m 10:06:01 Move:node 1 absolute position = -0.013244 m 10:06:01 Stage Position Measurement, pos = 0.000019 m 10:06:01 Stage Position Measurement, pos = -0.013244 m 10:06:01 Stage Position Measurement, pos = 5.834478 m 10:06:05 Move:node 1 absolute position = -0.013184 m 10:06:05 Stage Position Measurement, pos = 0.000019 m 10:06:05 Stage Position Measurement, pos = -0.013184 m 10:06:05 Stage Position Measurement, pos = 5.834478 m 10:06:08 Move:node 1 absolute position = -0.013124 m 10:06:08 Stage Position Measurement, pos = 0.000019 m 10:06:08 Stage Position Measurement, pos = -0.013124 m 10:06:08 Stage Position Measurement, pos = 5.834478 m 10:06:11 Move:node 1 absolute position = -0.013064 m 10:06:11 Stage Position Measurement, pos = 0.000019 m 10:06:11 Stage Position Measurement, pos = -0.013064 m 10:06:11 Stage Position Measurement, pos = 5.834478 m 10:06:15 Move:node 1 absolute position = -0.013004 m 10:06:15 Stage Position Measurement, pos = 0.000019 m 10:06:15 Stage Position Measurement, pos = -0.013004 m 10:06:15 Stage Position Measurement, pos = 5.834478 m 10:06:18 Move:node 1 absolute position = -0.012944 m 10:06:18 Stage Position Measurement, pos = 0.000019 m 10:06:18 Stage Position Measurement, pos = -0.012944 m 10:06:18 Stage Position Measurement, pos = 5.834478 m 10:06:22 Move:node 1 absolute position = -0.012884 m 10:06:22 Stage Position Measurement, pos = 0.000019 m 10:06:22 Stage Position Measurement, pos = -0.012884 m 10:06:22 Stage Position Measurement, pos = 5.834478 m 10:06:25 Move:node 1 absolute position = -0.012824 m 10:06:25 Stage Position Measurement, pos = 0.000019 m 10:06:25 Stage Position Measurement, pos = -0.012824 m 10:06:25 Stage Position Measurement, pos = 5.834478 m PolyFit: -2.506480 5.125847 -2.520946 0.041843, Error = 0.000000 Max position = -0.01338510:06:28 Move:node 1 absolute position = -0.013385 m 10:06:28 Stage Position Measurement, pos = 0.000019 m 10:06:28 Stage Position Measurement, pos = -0.013385 m 10:06:28 Stage Position Measurement, pos = 5.834478 m 10:06:31 Stage Position Measurement, pos = 0.000019 m 10:06:31 Stage Position Measurement, pos = -0.013385 m 10:06:31 Stage Position Measurement, pos = 5.834478 m 10:06:33 Move:node 2 absolute position = 0.000619 m 10:06:33 Stage Position Measurement, pos = 0.000619 m 10:06:33 Stage Position Measurement, pos = -0.013385 m 10:06:33 Stage Position Measurement, pos = 5.834478 m 10:06:37 Move:node 2 absolute position = 0.000639 m 10:06:37 Stage Position Measurement, pos = 0.000639 m 10:06:37 Stage Position Measurement, pos = -0.013385 m 10:06:37 Stage Position Measurement, pos = 5.834478 m 10:06:40 Move:node 2 absolute position = 0.000659 m 10:06:40 Stage Position Measurement, pos = 0.000659 m 10:06:40 Stage Position Measurement, pos = -0.013385 m 10:06:40 Stage Position Measurement, pos = 5.834478 m 10:06:43 Move:node 2 absolute position = 0.000679 m 10:06:43 Stage Position Measurement, pos = 0.000679 m 10:06:43 Stage Position Measurement, pos = -0.013385 m 10:06:43 Stage Position Measurement, pos = 5.834478 m 10:06:47 Move:node 2 absolute position = 0.000699 m 10:06:47 Stage Position Measurement, pos = 0.000699 m 10:06:47 Stage Position Measurement, pos = -0.013385 m 10:06:47 Stage Position Measurement, pos = 5.834478 m 10:06:50 Move:node 2 absolute position = 0.000719 m 10:06:50 Stage Position Measurement, pos = 0.000719 m 10:06:50 Stage Position Measurement, pos = -0.013385 m 10:06:50 Stage Position Measurement, pos = 5.834478 m 10:06:54 Move:node 2 absolute position = 0.000739 m 10:06:54 Stage Position Measurement, pos = 0.000739 m 10:06:54 Stage Position Measurement, pos = -0.013385 m 10:06:54 Stage Position Measurement, pos = 5.834478 m 10:06:57 Move:node 2 absolute position = 0.000759 m 10:06:57 Stage Position Measurement, pos = 0.000759 m 10:06:57 Stage Position Measurement, pos = -0.013385 m 10:06:57 Stage Position Measurement, pos = 5.834478 m 10:07:00 Move:node 2 absolute position = 0.000779 m 10:07:00 Stage Position Measurement, pos = 0.000779 m 10:07:00 Stage Position Measurement, pos = -0.013385 m 10:07:00 Stage Position Measurement, pos = 5.834478 m 10:07:04 Move:node 2 absolute position = 0.000799 m 10:07:04 Stage Position Measurement, pos = 0.000799 m 10:07:04 Stage Position Measurement, pos = -0.013385 m 10:07:04 Stage Position Measurement, pos = 5.834478 m 10:07:07 Move:node 2 absolute position = 0.000819 m 10:07:07 Stage Position Measurement, pos = 0.000819 m 10:07:07 Stage Position Measurement, pos = -0.013385 m 10:07:07 Stage Position Measurement, pos = 5.834478 m 10:07:11 Move:node 2 absolute position = 0.000839 m 10:07:11 Stage Position Measurement, pos = 0.000839 m 10:07:11 Stage Position Measurement, pos = -0.013385 m 10:07:11 Stage Position Measurement, pos = 5.834478 m 10:07:14 Move:node 2 absolute position = 0.000859 m 10:07:14 Stage Position Measurement, pos = 0.000859 m 10:07:14 Stage Position Measurement, pos = -0.013385 m 10:07:14 Stage Position Measurement, pos = 5.834478 m 10:07:18 Move:node 2 absolute position = 0.000879 m 10:07:18 Stage Position Measurement, pos = 0.000879 m 10:07:18 Stage Position Measurement, pos = -0.013385 m 10:07:18 Stage Position Measurement, pos = 5.834478 m 10:07:21 Move:node 2 absolute position = 0.000899 m 10:07:21 Stage Position Measurement, pos = 0.000899 m 10:07:21 Stage Position Measurement, pos = -0.013385 m 10:07:21 Stage Position Measurement, pos = 5.834478 m 10:07:24 Move:node 2 absolute position = 0.000919 m 10:07:24 Stage Position Measurement, pos = 0.000919 m 10:07:24 Stage Position Measurement, pos = -0.013385 m 10:07:24 Stage Position Measurement, pos = 5.834478 m 10:07:28 Move:node 2 absolute position = 0.000939 m 10:07:28 Stage Position Measurement, pos = 0.000939 m 10:07:28 Stage Position Measurement, pos = -0.013385 m 10:07:28 Stage Position Measurement, pos = 5.834478 m 10:07:31 Move:node 2 absolute position = 0.000959 m 10:07:31 Stage Position Measurement, pos = 0.000959 m 10:07:31 Stage Position Measurement, pos = -0.013385 m 10:07:31 Stage Position Measurement, pos = 5.834478 m 10:07:35 Move:node 2 absolute position = 0.000979 m 10:07:35 Stage Position Measurement, pos = 0.000979 m 10:07:35 Stage Position Measurement, pos = -0.013385 m 10:07:35 Stage Position Measurement, pos = 5.834478 m 10:07:38 Move:node 2 absolute position = 0.000999 m 10:07:38 Stage Position Measurement, pos = 0.000999 m 10:07:38 Stage Position Measurement, pos = -0.013385 m 10:07:38 Stage Position Measurement, pos = 5.834478 m Linear fit Error = 0.00000010:07:42 Move:node 2 absolute position = 0.000923 m 10:07:42 Stage Position Measurement, pos = 0.000923 m 10:07:42 Stage Position Measurement, pos = -0.013385 m 10:07:42 Stage Position Measurement, pos = 5.834478 m 10:07:45 Stage Position Measurement, pos = 0.000923 m 10:07:45 Stage Position Measurement, pos = -0.013385 m 10:07:45 Stage Position Measurement, pos = 5.834478 m 10:07:47 Move:node 2 absolute position = 0.001723 m 10:07:47 Stage Position Measurement, pos = 0.001723 m 10:07:47 Stage Position Measurement, pos = -0.013385 m 10:07:47 Stage Position Measurement, pos = 5.834478 m 10:07:49 Move:node 0 absolute position = 5.833478 m 10:07:49 Stage Position Measurement, pos = 0.001723 m 10:07:49 Stage Position Measurement, pos = -0.013385 m 10:07:49 Stage Position Measurement, pos = 5.833478 m 10:07:52 Move:node 0 absolute position = 5.833578 m 10:07:52 Stage Position Measurement, pos = 0.001723 m 10:07:52 Stage Position Measurement, pos = -0.013385 m 10:07:52 Stage Position Measurement, pos = 5.833578 m 10:07:56 Move:node 0 absolute position = 5.833678 m 10:07:56 Stage Position Measurement, pos = 0.001723 m 10:07:57 Stage Position Measurement, pos = -0.013385 m 10:07:57 Stage Position Measurement, pos = 5.833678 m 10:08:00 Move:node 0 absolute position = 5.833778 m 10:08:00 Stage Position Measurement, pos = 0.001723 m 10:08:00 Stage Position Measurement, pos = -0.013385 m 10:08:00 Stage Position Measurement, pos = 5.833778 m 10:08:04 Move:node 0 absolute position = 5.833878 m 10:08:04 Stage Position Measurement, pos = 0.001723 m 10:08:04 Stage Position Measurement, pos = -0.013385 m 10:08:04 Stage Position Measurement, pos = 5.833878 m 10:08:07 Move:node 0 absolute position = 5.833978 m 10:08:07 Stage Position Measurement, pos = 0.001723 m 10:08:07 Stage Position Measurement, pos = -0.013385 m 10:08:07 Stage Position Measurement, pos = 5.833978 m 10:08:11 Move:node 0 absolute position = 5.834078 m 10:08:11 Stage Position Measurement, pos = 0.001723 m 10:08:11 Stage Position Measurement, pos = -0.013385 m 10:08:11 Stage Position Measurement, pos = 5.834078 m 10:08:14 Move:node 0 absolute position = 5.834178 m 10:08:15 Stage Position Measurement, pos = 0.001723 m 10:08:15 Stage Position Measurement, pos = -0.013385 m 10:08:15 Stage Position Measurement, pos = 5.834178 m 10:08:18 Move:node 0 absolute position = 5.834278 m 10:08:18 Stage Position Measurement, pos = 0.001723 m 10:08:18 Stage Position Measurement, pos = -0.013385 m 10:08:18 Stage Position Measurement, pos = 5.834278 m 10:08:22 Move:node 0 absolute position = 5.834378 m 10:08:22 Stage Position Measurement, pos = 0.001723 m 10:08:22 Stage Position Measurement, pos = -0.013385 m 10:08:22 Stage Position Measurement, pos = 5.834378 m 10:08:25 Move:node 0 absolute position = 5.834478 m 10:08:25 Stage Position Measurement, pos = 0.001723 m 10:08:25 Stage Position Measurement, pos = -0.013385 m 10:08:25 Stage Position Measurement, pos = 5.834478 m 10:08:29 Move:node 0 absolute position = 5.834578 m 10:08:29 Stage Position Measurement, pos = 0.001723 m 10:08:29 Stage Position Measurement, pos = -0.013385 m 10:08:29 Stage Position Measurement, pos = 5.834578 m 10:08:32 Move:node 0 absolute position = 5.834678 m 10:08:32 Stage Position Measurement, pos = 0.001723 m 10:08:32 Stage Position Measurement, pos = -0.013385 m 10:08:32 Stage Position Measurement, pos = 5.834678 m 10:08:36 Move:node 0 absolute position = 5.834778 m 10:08:36 Stage Position Measurement, pos = 0.001723 m 10:08:36 Stage Position Measurement, pos = -0.013385 m 10:08:36 Stage Position Measurement, pos = 5.834778 m 10:08:39 Move:node 0 absolute position = 5.834878 m 10:08:39 Stage Position Measurement, pos = 0.001723 m 10:08:39 Stage Position Measurement, pos = -0.013385 m 10:08:39 Stage Position Measurement, pos = 5.834878 m 10:08:43 Move:node 0 absolute position = 5.834978 m 10:08:43 Stage Position Measurement, pos = 0.001723 m 10:08:43 Stage Position Measurement, pos = -0.013385 m 10:08:43 Stage Position Measurement, pos = 5.834978 m 10:08:46 Move:node 0 absolute position = 5.835078 m 10:08:46 Stage Position Measurement, pos = 0.001723 m 10:08:46 Stage Position Measurement, pos = -0.013385 m 10:08:46 Stage Position Measurement, pos = 5.835078 m 10:08:50 Move:node 0 absolute position = 5.835178 m 10:08:50 Stage Position Measurement, pos = 0.001723 m 10:08:50 Stage Position Measurement, pos = -0.013385 m 10:08:50 Stage Position Measurement, pos = 5.835178 m 10:08:53 Move:node 0 absolute position = 5.835278 m 10:08:53 Stage Position Measurement, pos = 0.001723 m 10:08:53 Stage Position Measurement, pos = -0.013385 m 10:08:53 Stage Position Measurement, pos = 5.835278 m 10:08:59 Move:node 0 absolute position = 5.835378 m 10:09:00 Stage Position Measurement, pos = 0.001723 m 10:09:00 Stage Position Measurement, pos = -0.013385 m 10:09:00 Stage Position Measurement, pos = 5.835378 m PolyFit: -106577389.924268 319407093.040157 -319081880.618789 106252177.615589, Error = 0.000000 Max position = 5.83426710:09:04 Move:node 0 absolute position = 5.834267 m 10:09:04 Stage Position Measurement, pos = 0.001723 m 10:09:04 Stage Position Measurement, pos = -0.013385 m 10:09:04 Stage Position Measurement, pos = 5.834267 m 10:09:07 Stage Position Measurement, pos = 0.001723 m 10:09:07 Stage Position Measurement, pos = -0.013385 m 10:09:07 Stage Position Measurement, pos = 5.834267 m 10:09:09 Move:node 1 absolute position = -0.013985 m 10:09:09 Stage Position Measurement, pos = 0.001723 m 10:09:09 Stage Position Measurement, pos = -0.013985 m 10:09:09 Stage Position Measurement, pos = 5.834267 m 10:09:14 Move:node 1 absolute position = -0.013925 m 10:09:14 Stage Position Measurement, pos = 0.001723 m 10:09:14 Stage Position Measurement, pos = -0.013926 m 10:09:14 Stage Position Measurement, pos = 5.834267 m 10:09:18 Move:node 1 absolute position = -0.013866 m 10:09:18 Stage Position Measurement, pos = 0.001723 m 10:09:18 Stage Position Measurement, pos = -0.013866 m 10:09:18 Stage Position Measurement, pos = 5.834267 m 10:09:21 Move:node 1 absolute position = -0.013806 m 10:09:21 Stage Position Measurement, pos = 0.001723 m 10:09:21 Stage Position Measurement, pos = -0.013806 m 10:09:21 Stage Position Measurement, pos = 5.834267 m 10:09:24 Move:node 1 absolute position = -0.013745 m 10:09:25 Stage Position Measurement, pos = 0.001723 m 10:09:25 Stage Position Measurement, pos = -0.013745 m 10:09:25 Stage Position Measurement, pos = 5.834267 m 10:09:28 Move:node 1 absolute position = -0.013685 m 10:09:28 Stage Position Measurement, pos = 0.001723 m 10:09:28 Stage Position Measurement, pos = -0.013685 m 10:09:28 Stage Position Measurement, pos = 5.834267 m 10:09:32 Move:node 1 absolute position = -0.013626 m 10:09:32 Stage Position Measurement, pos = 0.001723 m 10:09:33 Stage Position Measurement, pos = -0.013625 m 10:09:33 Stage Position Measurement, pos = 5.834267 m 10:09:36 Move:node 1 absolute position = -0.013565 m 10:09:36 Stage Position Measurement, pos = 0.001723 m 10:09:36 Stage Position Measurement, pos = -0.013565 m 10:09:36 Stage Position Measurement, pos = 5.834267 m 10:09:39 Move:node 1 absolute position = -0.013505 m 10:09:39 Stage Position Measurement, pos = 0.001723 m 10:09:39 Stage Position Measurement, pos = -0.013505 m 10:09:40 Stage Position Measurement, pos = 5.834267 m 10:09:43 Move:node 1 absolute position = -0.013445 m 10:09:43 Stage Position Measurement, pos = 0.001723 m 10:09:43 Stage Position Measurement, pos = -0.013445 m 10:09:43 Stage Position Measurement, pos = 5.834267 m 10:09:46 Move:node 1 absolute position = -0.013385 m 10:09:46 Stage Position Measurement, pos = 0.001723 m 10:09:46 Stage Position Measurement, pos = -0.013385 m 10:09:46 Stage Position Measurement, pos = 5.834267 m 10:09:51 Move:node 1 absolute position = -0.013326 m 10:09:51 Stage Position Measurement, pos = 0.001723 m 10:09:51 Stage Position Measurement, pos = -0.013326 m 10:09:51 Stage Position Measurement, pos = 5.834267 m 10:09:54 Move:node 1 absolute position = -0.013265 m 10:09:54 Stage Position Measurement, pos = 0.001723 m 10:09:54 Stage Position Measurement, pos = -0.013265 m 10:09:54 Stage Position Measurement, pos = 5.834267 m 10:09:58 Move:node 1 absolute position = -0.013206 m 10:09:58 Stage Position Measurement, pos = 0.001723 m 10:09:58 Stage Position Measurement, pos = -0.013206 m 10:09:58 Stage Position Measurement, pos = 5.834267 m 10:10:01 Move:node 1 absolute position = -0.013146 m 10:10:01 Stage Position Measurement, pos = 0.001723 m 10:10:01 Stage Position Measurement, pos = -0.013146 m 10:10:01 Stage Position Measurement, pos = 5.834267 m 10:10:05 Move:node 1 absolute position = -0.013085 m 10:10:05 Stage Position Measurement, pos = 0.001723 m 10:10:05 Stage Position Measurement, pos = -0.013085 m 10:10:05 Stage Position Measurement, pos = 5.834267 m 10:10:08 Move:node 1 absolute position = -0.013025 m 10:10:09 Stage Position Measurement, pos = 0.001723 m 10:10:09 Stage Position Measurement, pos = -0.013025 m 10:10:09 Stage Position Measurement, pos = 5.834267 m 10:10:12 Move:node 1 absolute position = -0.012965 m 10:10:12 Stage Position Measurement, pos = 0.001723 m 10:10:12 Stage Position Measurement, pos = -0.012965 m 10:10:12 Stage Position Measurement, pos = 5.834267 m 10:10:16 Move:node 1 absolute position = -0.012906 m 10:10:16 Stage Position Measurement, pos = 0.001723 m 10:10:16 Stage Position Measurement, pos = -0.012906 m 10:10:16 Stage Position Measurement, pos = 5.834267 m 10:10:19 Move:node 1 absolute position = -0.012845 m 10:10:19 Stage Position Measurement, pos = 0.001723 m 10:10:19 Stage Position Measurement, pos = -0.012845 m 10:10:19 Stage Position Measurement, pos = 5.834267 m PolyFit: -2.243842 4.858606 -2.776134 0.284076, Error = 0.000000 Max position = -0.01337910:10:23 Move:node 1 absolute position = -0.013379 m 10:10:23 Stage Position Measurement, pos = 0.001723 m 10:10:23 Stage Position Measurement, pos = -0.013379 m 10:10:23 Stage Position Measurement, pos = 5.834267 m 10:10:26 Stage Position Measurement, pos = 0.001723 m 10:10:26 Stage Position Measurement, pos = -0.013380 m 10:10:26 Stage Position Measurement, pos = 5.834267 m 10:10:28 Move:node 2 absolute position = 0.000723 m 10:10:28 Stage Position Measurement, pos = 0.000723 m 10:10:28 Stage Position Measurement, pos = -0.013379 m 10:10:28 Stage Position Measurement, pos = 5.834267 m 10:10:32 Move:node 2 absolute position = 0.000743 m 10:10:32 Stage Position Measurement, pos = 0.000743 m 10:10:32 Stage Position Measurement, pos = -0.013380 m 10:10:32 Stage Position Measurement, pos = 5.834267 m 10:10:35 Move:node 2 absolute position = 0.000763 m 10:10:35 Stage Position Measurement, pos = 0.000763 m 10:10:35 Stage Position Measurement, pos = -0.013379 m 10:10:35 Stage Position Measurement, pos = 5.834267 m 10:10:39 Move:node 2 absolute position = 0.000783 m 10:10:39 Stage Position Measurement, pos = 0.000783 m 10:10:39 Stage Position Measurement, pos = -0.013380 m 10:10:39 Stage Position Measurement, pos = 5.834267 m 10:10:43 Move:node 2 absolute position = 0.000803 m 10:10:43 Stage Position Measurement, pos = 0.000803 m 10:10:43 Stage Position Measurement, pos = -0.013379 m 10:10:43 Stage Position Measurement, pos = 5.834267 m 10:10:46 Move:node 2 absolute position = 0.000823 m 10:10:46 Stage Position Measurement, pos = 0.000823 m 10:10:46 Stage Position Measurement, pos = -0.013379 m 10:10:46 Stage Position Measurement, pos = 5.834267 m 10:10:50 Move:node 2 absolute position = 0.000843 m 10:10:50 Stage Position Measurement, pos = 0.000843 m 10:10:50 Stage Position Measurement, pos = -0.013379 m 10:10:50 Stage Position Measurement, pos = 5.834267 m 10:10:54 Move:node 2 absolute position = 0.000863 m 10:10:54 Stage Position Measurement, pos = 0.000863 m 10:10:54 Stage Position Measurement, pos = -0.013380 m 10:10:54 Stage Position Measurement, pos = 5.834267 m 10:10:57 Move:node 2 absolute position = 0.000883 m 10:10:58 Stage Position Measurement, pos = 0.000883 m 10:10:58 Stage Position Measurement, pos = -0.013379 m 10:10:58 Stage Position Measurement, pos = 5.834267 m 10:11:01 Move:node 2 absolute position = 0.000903 m 10:11:01 Stage Position Measurement, pos = 0.000903 m 10:11:01 Stage Position Measurement, pos = -0.013379 m 10:11:01 Stage Position Measurement, pos = 5.834267 m 10:11:04 Move:node 2 absolute position = 0.000923 m 10:11:05 Stage Position Measurement, pos = 0.000923 m 10:11:05 Stage Position Measurement, pos = -0.013379 m 10:11:05 Stage Position Measurement, pos = 5.834267 m 10:11:08 Move:node 2 absolute position = 0.000943 m 10:11:08 Stage Position Measurement, pos = 0.000943 m 10:11:08 Stage Position Measurement, pos = -0.013379 m 10:11:08 Stage Position Measurement, pos = 5.834267 m 10:11:11 Move:node 2 absolute position = 0.000963 m 10:11:11 Stage Position Measurement, pos = 0.000963 m 10:11:11 Stage Position Measurement, pos = -0.013380 m 10:11:11 Stage Position Measurement, pos = 5.834267 m 10:11:15 Move:node 2 absolute position = 0.000983 m 10:11:15 Stage Position Measurement, pos = 0.000983 m 10:11:15 Stage Position Measurement, pos = -0.013380 m 10:11:15 Stage Position Measurement, pos = 5.834267 m 10:11:18 Move:node 2 absolute position = 0.001003 m 10:11:18 Stage Position Measurement, pos = 0.001003 m 10:11:19 Stage Position Measurement, pos = -0.013379 m 10:11:19 Stage Position Measurement, pos = 5.834267 m 10:11:22 Move:node 2 absolute position = 0.001023 m 10:11:22 Stage Position Measurement, pos = 0.001023 m 10:11:22 Stage Position Measurement, pos = -0.013379 m 10:11:22 Stage Position Measurement, pos = 5.834267 m 10:11:26 Move:node 2 absolute position = 0.001043 m 10:11:26 Stage Position Measurement, pos = 0.001043 m 10:11:26 Stage Position Measurement, pos = -0.013380 m 10:11:26 Stage Position Measurement, pos = 5.834267 m 10:11:29 Move:node 2 absolute position = 0.001063 m 10:11:29 Stage Position Measurement, pos = 0.001063 m 10:11:29 Stage Position Measurement, pos = -0.013380 m 10:11:29 Stage Position Measurement, pos = 5.834267 m 10:11:33 Move:node 2 absolute position = 0.001083 m 10:11:33 Stage Position Measurement, pos = 0.001083 m 10:11:33 Stage Position Measurement, pos = -0.013380 m 10:11:33 Stage Position Measurement, pos = 5.834267 m 10:11:36 Move:node 2 absolute position = 0.001103 m 10:11:36 Stage Position Measurement, pos = 0.001103 m 10:11:36 Stage Position Measurement, pos = -0.013380 m 10:11:36 Stage Position Measurement, pos = 5.834267 m Linear fit Error = 0.00000010:11:39 Move:node 2 absolute position = 0.000920 m 10:11:39 Stage Position Measurement, pos = 0.000920 m 10:11:39 Stage Position Measurement, pos = -0.013379 m 10:11:40 Stage Position Measurement, pos = 5.834267 m 10:11:42 Stage Position Measurement, pos = 0.000920 m 10:11:42 Stage Position Measurement, pos = -0.013379 m 10:11:42 Stage Position Measurement, pos = 5.834267 m 10:11:49 Move:node 1 absolute position = -0.000000 m 10:11:50 Stage Position Measurement, pos = 0.000000 m 10:11:52 Move:node 2 absolute position = 0.000000 m 10:11:53 Move:node 0 absolute position = 0.000000 m 10:13:57 Move:node 0 absolute position = 5.834373 m 10:13:57 Stage Position Measurement, pos = 0.000000 m 10:13:57 Stage Position Measurement, pos = 0.000000 m 10:13:57 Stage Position Measurement, pos = 5.834373 m 10:14:03 Move:node 1 absolute position = -0.013383 m 10:14:03 Stage Position Measurement, pos = -0.000000 m 10:14:03 Stage Position Measurement, pos = -0.013383 m 10:14:03 Stage Position Measurement, pos = 5.834373 m 10:14:05 Move:node 2 absolute position = 0.000922 m 10:14:05 Stage Position Measurement, pos = 0.000922 m 10:14:05 Stage Position Measurement, pos = -0.013383 m 10:14:05 Stage Position Measurement, pos = 5.834373 m 10:14:10 Stage Position Measurement, pos = 0.000922 m 10:14:10 Stage Position Measurement, pos = -0.013383 m 10:14:10 Stage Position Measurement, pos = 5.834373 m 10:14:12 Move:node 2 absolute position = 0.000122 m 10:14:12 Stage Position Measurement, pos = 0.000122 m 10:14:12 Stage Position Measurement, pos = -0.013383 m 10:14:12 Stage Position Measurement, pos = 5.834373 m 10:14:14 Move:node 0 absolute position = 5.833373 m 10:14:14 Stage Position Measurement, pos = 0.000122 m 10:14:14 Stage Position Measurement, pos = -0.013383 m 10:14:14 Stage Position Measurement, pos = 5.833373 m 10:14:17 Move:node 0 absolute position = 5.833473 m 10:14:17 Stage Position Measurement, pos = 0.000122 m 10:14:17 Stage Position Measurement, pos = -0.013383 m 10:14:17 Stage Position Measurement, pos = 5.833473 m 10:14:21 Move:node 0 absolute position = 5.833573 m 10:14:21 Stage Position Measurement, pos = 0.000122 m 10:14:21 Stage Position Measurement, pos = -0.013383 m 10:14:21 Stage Position Measurement, pos = 5.833573 m 10:14:24 Move:node 0 absolute position = 5.833673 m 10:14:24 Stage Position Measurement, pos = 0.000122 m 10:14:24 Stage Position Measurement, pos = -0.013383 m 10:14:24 Stage Position Measurement, pos = 5.833673 m 10:14:28 Move:node 0 absolute position = 5.833773 m 10:14:28 Stage Position Measurement, pos = 0.000122 m 10:14:28 Stage Position Measurement, pos = -0.013383 m 10:14:28 Stage Position Measurement, pos = 5.833773 m 10:14:32 Move:node 0 absolute position = 5.833873 m 10:14:32 Stage Position Measurement, pos = 0.000122 m 10:14:32 Stage Position Measurement, pos = -0.013383 m 10:14:32 Stage Position Measurement, pos = 5.833873 m 10:14:36 Move:node 0 absolute position = 5.833973 m 10:14:36 Stage Position Measurement, pos = 0.000122 m 10:14:36 Stage Position Measurement, pos = -0.013382 m 10:14:36 Stage Position Measurement, pos = 5.833972 m 10:14:39 Move:node 0 absolute position = 5.834073 m 10:14:39 Stage Position Measurement, pos = 0.000122 m 10:14:39 Stage Position Measurement, pos = -0.013383 m 10:14:39 Stage Position Measurement, pos = 5.834073 m 10:14:43 Move:node 0 absolute position = 5.834173 m 10:14:43 Stage Position Measurement, pos = 0.000122 m 10:14:43 Stage Position Measurement, pos = -0.013383 m 10:14:43 Stage Position Measurement, pos = 5.834173 m 10:14:46 Move:node 0 absolute position = 5.834273 m 10:14:46 Stage Position Measurement, pos = 0.000122 m 10:14:46 Stage Position Measurement, pos = -0.013382 m 10:14:46 Stage Position Measurement, pos = 5.834273 m 10:14:50 Move:node 0 absolute position = 5.834373 m 10:14:50 Stage Position Measurement, pos = 0.000122 m 10:14:50 Stage Position Measurement, pos = -0.013383 m 10:14:50 Stage Position Measurement, pos = 5.834373 m 10:14:53 Move:node 0 absolute position = 5.834473 m 10:14:53 Stage Position Measurement, pos = 0.000122 m 10:14:53 Stage Position Measurement, pos = -0.013382 m 10:14:53 Stage Position Measurement, pos = 5.834472 m 10:14:57 Move:node 0 absolute position = 5.834573 m 10:14:57 Stage Position Measurement, pos = 0.000122 m 10:14:57 Stage Position Measurement, pos = -0.013383 m 10:14:57 Stage Position Measurement, pos = 5.834573 m 10:15:00 Move:node 0 absolute position = 5.834672 m 10:15:00 Stage Position Measurement, pos = 0.000122 m 10:15:00 Stage Position Measurement, pos = -0.013383 m 10:15:00 Stage Position Measurement, pos = 5.834673 m 10:15:04 Move:node 0 absolute position = 5.834773 m 10:15:04 Stage Position Measurement, pos = 0.000122 m 10:15:05 Stage Position Measurement, pos = -0.013383 m 10:15:05 Stage Position Measurement, pos = 5.834773 m 10:15:08 Move:node 0 absolute position = 5.834873 m 10:15:08 Stage Position Measurement, pos = 0.000122 m 10:15:08 Stage Position Measurement, pos = -0.013383 m 10:15:08 Stage Position Measurement, pos = 5.834873 m 10:15:14 Move:node 0 absolute position = 5.834973 m 10:15:14 Stage Position Measurement, pos = 0.000122 m 10:15:14 Stage Position Measurement, pos = -0.013382 m 10:15:14 Stage Position Measurement, pos = 5.834973 m 10:15:18 Move:node 0 absolute position = 5.835072 m 10:15:18 Stage Position Measurement, pos = 0.000122 m 10:15:18 Stage Position Measurement, pos = -0.013383 m 10:15:18 Stage Position Measurement, pos = 5.835072 m 10:15:21 Move:node 0 absolute position = 5.835173 m 10:15:21 Stage Position Measurement, pos = 0.000122 m 10:15:21 Stage Position Measurement, pos = -0.013383 m 10:15:21 Stage Position Measurement, pos = 5.835173 m 10:15:25 Move:node 0 absolute position = 5.835273 m 10:15:25 Stage Position Measurement, pos = 0.000122 m 10:15:25 Stage Position Measurement, pos = -0.013383 m 10:15:25 Stage Position Measurement, pos = 5.835273 m PolyFit: 131074482.971052 -393700022.021367 394176714.810438 -131551175.640954, Error = 0.000000 Max position = 5.83449910:15:28 Move:node 0 absolute position = 5.834499 m 10:15:28 Stage Position Measurement, pos = 0.000122 m 10:15:28 Stage Position Measurement, pos = -0.013383 m 10:15:28 Stage Position Measurement, pos = 5.834499 m 10:15:31 Stage Position Measurement, pos = 0.000122 m 10:15:31 Stage Position Measurement, pos = -0.013383 m 10:15:31 Stage Position Measurement, pos = 5.834499 m 10:15:33 Move:node 1 absolute position = -0.013982 m 10:15:33 Stage Position Measurement, pos = 0.000122 m 10:15:33 Stage Position Measurement, pos = -0.013982 m 10:15:33 Stage Position Measurement, pos = 5.834499 m 10:15:37 Move:node 1 absolute position = -0.013922 m 10:15:37 Stage Position Measurement, pos = 0.000122 m 10:15:37 Stage Position Measurement, pos = -0.013922 m 10:15:37 Stage Position Measurement, pos = 5.834499 m 10:15:40 Move:node 1 absolute position = -0.013863 m 10:15:40 Stage Position Measurement, pos = 0.000122 m 10:15:40 Stage Position Measurement, pos = -0.013863 m 10:15:40 Stage Position Measurement, pos = 5.834499 m 10:15:44 Move:node 1 absolute position = -0.013802 m 10:15:44 Stage Position Measurement, pos = 0.000122 m 10:15:44 Stage Position Measurement, pos = -0.013803 m 10:15:44 Stage Position Measurement, pos = 5.834499 m 10:15:47 Move:node 1 absolute position = -0.013742 m 10:15:47 Stage Position Measurement, pos = 0.000122 m 10:15:47 Stage Position Measurement, pos = -0.013742 m 10:15:47 Stage Position Measurement, pos = 5.834498 m 10:15:50 Move:node 1 absolute position = -0.013682 m 10:15:50 Stage Position Measurement, pos = 0.000122 m 10:15:50 Stage Position Measurement, pos = -0.013682 m 10:15:50 Stage Position Measurement, pos = 5.834499 m 10:15:54 Move:node 1 absolute position = -0.013623 m 10:15:54 Stage Position Measurement, pos = 0.000122 m 10:15:54 Stage Position Measurement, pos = -0.013623 m 10:15:54 Stage Position Measurement, pos = 5.834499 m 10:15:57 Move:node 1 absolute position = -0.013562 m 10:15:57 Stage Position Measurement, pos = 0.000122 m 10:15:57 Stage Position Measurement, pos = -0.013562 m 10:15:57 Stage Position Measurement, pos = 5.834499 m 10:16:01 Move:node 1 absolute position = -0.013503 m 10:16:01 Stage Position Measurement, pos = 0.000122 m 10:16:01 Stage Position Measurement, pos = -0.013503 m 10:16:01 Stage Position Measurement, pos = 5.834499 m 10:16:04 Move:node 1 absolute position = -0.013443 m 10:16:04 Stage Position Measurement, pos = 0.000122 m 10:16:04 Stage Position Measurement, pos = -0.013443 m 10:16:04 Stage Position Measurement, pos = 5.834499 m 10:16:07 Move:node 1 absolute position = -0.013383 m 10:16:07 Stage Position Measurement, pos = 0.000122 m 10:16:07 Stage Position Measurement, pos = -0.013383 m 10:16:07 Stage Position Measurement, pos = 5.834499 m 10:16:11 Move:node 1 absolute position = -0.013322 m 10:16:11 Stage Position Measurement, pos = 0.000122 m 10:16:11 Stage Position Measurement, pos = -0.013322 m 10:16:11 Stage Position Measurement, pos = 5.834498 m 10:16:14 Move:node 1 absolute position = -0.013263 m 10:16:14 Stage Position Measurement, pos = 0.000122 m 10:16:14 Stage Position Measurement, pos = -0.013263 m 10:16:14 Stage Position Measurement, pos = 5.834499 m 10:16:18 Move:node 1 absolute position = -0.013203 m 10:16:18 Stage Position Measurement, pos = 0.000122 m 10:16:18 Stage Position Measurement, pos = -0.013203 m 10:16:18 Stage Position Measurement, pos = 5.834499 m 10:16:21 Move:node 1 absolute position = -0.013142 m 10:16:21 Stage Position Measurement, pos = 0.000122 m 10:16:21 Stage Position Measurement, pos = -0.013142 m 10:16:21 Stage Position Measurement, pos = 5.834499 m 10:16:24 Move:node 1 absolute position = -0.013083 m 10:16:24 Stage Position Measurement, pos = 0.000122 m 10:16:24 Stage Position Measurement, pos = -0.013083 m 10:16:24 Stage Position Measurement, pos = 5.834499 m 10:16:28 Move:node 1 absolute position = -0.013023 m 10:16:28 Stage Position Measurement, pos = 0.000122 m 10:16:28 Stage Position Measurement, pos = -0.013023 m 10:16:28 Stage Position Measurement, pos = 5.834499 m 10:16:31 Move:node 1 absolute position = -0.012963 m 10:16:31 Stage Position Measurement, pos = 0.000122 m 10:16:31 Stage Position Measurement, pos = -0.012963 m 10:16:31 Stage Position Measurement, pos = 5.834498 m 10:16:35 Move:node 1 absolute position = -0.012902 m 10:16:35 Stage Position Measurement, pos = 0.000122 m 10:16:35 Stage Position Measurement, pos = -0.012902 m 10:16:35 Stage Position Measurement, pos = 5.834499 m 10:16:38 Move:node 1 absolute position = -0.012842 m 10:16:38 Stage Position Measurement, pos = 0.000122 m 10:16:38 Stage Position Measurement, pos = -0.012842 m 10:16:38 Stage Position Measurement, pos = 5.834499 m PolyFit: -2.739827 6.037260 -3.668495 0.494181, Error = 0.000000 Max position = -0.01338810:16:42 Move:node 1 absolute position = -0.013388 m 10:16:42 Stage Position Measurement, pos = 0.000122 m 10:16:42 Stage Position Measurement, pos = -0.013388 m 10:16:42 Stage Position Measurement, pos = 5.834499 m 10:16:44 Stage Position Measurement, pos = 0.000122 m 10:16:44 Stage Position Measurement, pos = -0.013388 m 10:16:44 Stage Position Measurement, pos = 5.834498 m 10:16:46 Move:node 2 absolute position = 0.000722 m 10:16:46 Stage Position Measurement, pos = 0.000722 m 10:16:46 Stage Position Measurement, pos = -0.013388 m 10:16:46 Stage Position Measurement, pos = 5.834499 m 10:16:50 Move:node 2 absolute position = 0.000742 m 10:16:50 Stage Position Measurement, pos = 0.000742 m 10:16:50 Stage Position Measurement, pos = -0.013388 m 10:16:50 Stage Position Measurement, pos = 5.834499 m 10:16:53 Move:node 2 absolute position = 0.000762 m 10:16:53 Stage Position Measurement, pos = 0.000762 m 10:16:53 Stage Position Measurement, pos = -0.013388 m 10:16:53 Stage Position Measurement, pos = 5.834499 m 10:16:57 Move:node 2 absolute position = 0.000782 m 10:16:57 Stage Position Measurement, pos = 0.000782 m 10:16:57 Stage Position Measurement, pos = -0.013388 m 10:16:57 Stage Position Measurement, pos = 5.834499 m 10:17:00 Move:node 2 absolute position = 0.000802 m 10:17:00 Stage Position Measurement, pos = 0.000802 m 10:17:00 Stage Position Measurement, pos = -0.013388 m 10:17:00 Stage Position Measurement, pos = 5.834498 m 10:17:03 Move:node 2 absolute position = 0.000822 m 10:17:03 Stage Position Measurement, pos = 0.000822 m 10:17:03 Stage Position Measurement, pos = -0.013388 m 10:17:03 Stage Position Measurement, pos = 5.834499 m 10:17:07 Move:node 2 absolute position = 0.000842 m 10:17:07 Stage Position Measurement, pos = 0.000842 m 10:17:07 Stage Position Measurement, pos = -0.013388 m 10:17:07 Stage Position Measurement, pos = 5.834499 m 10:17:10 Move:node 2 absolute position = 0.000862 m 10:17:10 Stage Position Measurement, pos = 0.000862 m 10:17:10 Stage Position Measurement, pos = -0.013388 m 10:17:10 Stage Position Measurement, pos = 5.834499 m 10:17:14 Move:node 2 absolute position = 0.000882 m 10:17:14 Stage Position Measurement, pos = 0.000882 m 10:17:14 Stage Position Measurement, pos = -0.013388 m 10:17:14 Stage Position Measurement, pos = 5.834499 m 10:17:17 Move:node 2 absolute position = 0.000902 m 10:17:17 Stage Position Measurement, pos = 0.000902 m 10:17:17 Stage Position Measurement, pos = -0.013388 m 10:17:17 Stage Position Measurement, pos = 5.834499 m 10:17:20 Move:node 2 absolute position = 0.000922 m 10:17:20 Stage Position Measurement, pos = 0.000922 m 10:17:20 Stage Position Measurement, pos = -0.013388 m 10:17:20 Stage Position Measurement, pos = 5.834499 m 10:17:24 Move:node 2 absolute position = 0.000942 m 10:17:24 Stage Position Measurement, pos = 0.000942 m 10:17:24 Stage Position Measurement, pos = -0.013388 m 10:17:24 Stage Position Measurement, pos = 5.834498 m 10:17:27 Move:node 2 absolute position = 0.000962 m 10:17:27 Stage Position Measurement, pos = 0.000962 m 10:17:27 Stage Position Measurement, pos = -0.013388 m 10:17:27 Stage Position Measurement, pos = 5.834498 m 10:17:31 Move:node 2 absolute position = 0.000982 m 10:17:31 Stage Position Measurement, pos = 0.000982 m 10:17:31 Stage Position Measurement, pos = -0.013388 m 10:17:31 Stage Position Measurement, pos = 5.834499 m 10:17:34 Move:node 2 absolute position = 0.001002 m 10:17:34 Stage Position Measurement, pos = 0.001002 m 10:17:34 Stage Position Measurement, pos = -0.013388 m 10:17:34 Stage Position Measurement, pos = 5.834499 m 10:17:37 Move:node 2 absolute position = 0.001022 m 10:17:37 Stage Position Measurement, pos = 0.001022 m 10:17:38 Stage Position Measurement, pos = -0.013388 m 10:17:38 Stage Position Measurement, pos = 5.834499 m 10:17:41 Move:node 2 absolute position = 0.001042 m 10:17:41 Stage Position Measurement, pos = 0.001042 m 10:17:41 Stage Position Measurement, pos = -0.013388 m 10:17:41 Stage Position Measurement, pos = 5.834499 m 10:17:44 Move:node 2 absolute position = 0.001062 m 10:17:44 Stage Position Measurement, pos = 0.001062 m 10:17:44 Stage Position Measurement, pos = -0.013388 m 10:17:44 Stage Position Measurement, pos = 5.834498 m 10:17:48 Move:node 2 absolute position = 0.001082 m 10:17:48 Stage Position Measurement, pos = 0.001082 m 10:17:48 Stage Position Measurement, pos = -0.013388 m 10:17:48 Stage Position Measurement, pos = 5.834499 m 10:17:51 Move:node 2 absolute position = 0.001102 m 10:17:51 Stage Position Measurement, pos = 0.001102 m 10:17:51 Stage Position Measurement, pos = -0.013388 m 10:17:51 Stage Position Measurement, pos = 5.834499 m Linear fit Error = 0.00000010:17:55 Move:node 2 absolute position = 0.000924 m 10:17:55 Stage Position Measurement, pos = 0.000924 m 10:17:55 Stage Position Measurement, pos = -0.013388 m 10:17:55 Stage Position Measurement, pos = 5.834499 m 10:17:57 Stage Position Measurement, pos = 0.000924 m 10:17:57 Stage Position Measurement, pos = -0.013388 m 10:17:57 Stage Position Measurement, pos = 5.834499 m 10:17:59 Move:node 2 absolute position = 0.001724 m 10:17:59 Stage Position Measurement, pos = 0.001724 m 10:17:59 Stage Position Measurement, pos = -0.013388 m 10:17:59 Stage Position Measurement, pos = 5.834499 m 10:18:01 Move:node 0 absolute position = 5.833499 m 10:18:01 Stage Position Measurement, pos = 0.001724 m 10:18:01 Stage Position Measurement, pos = -0.013388 m 10:18:01 Stage Position Measurement, pos = 5.833499 m 10:18:05 Move:node 0 absolute position = 5.833599 m 10:18:05 Stage Position Measurement, pos = 0.001724 m 10:18:05 Stage Position Measurement, pos = -0.013388 m 10:18:05 Stage Position Measurement, pos = 5.833599 m 10:18:08 Move:node 0 absolute position = 5.833699 m 10:18:08 Stage Position Measurement, pos = 0.001724 m 10:18:08 Stage Position Measurement, pos = -0.013388 m 10:18:08 Stage Position Measurement, pos = 5.833699 m 10:18:12 Move:node 0 absolute position = 5.833799 m 10:18:12 Stage Position Measurement, pos = 0.001724 m 10:18:12 Stage Position Measurement, pos = -0.013388 m 10:18:12 Stage Position Measurement, pos = 5.833799 m 10:18:15 Move:node 0 absolute position = 5.833899 m 10:18:15 Stage Position Measurement, pos = 0.001724 m 10:18:15 Stage Position Measurement, pos = -0.013388 m 10:18:15 Stage Position Measurement, pos = 5.833899 m 10:18:18 Move:node 0 absolute position = 5.833998 m 10:18:18 Stage Position Measurement, pos = 0.001724 m 10:18:18 Stage Position Measurement, pos = -0.013388 m 10:18:18 Stage Position Measurement, pos = 5.833999 m 10:18:22 Move:node 0 absolute position = 5.834099 m 10:18:22 Stage Position Measurement, pos = 0.001724 m 10:18:22 Stage Position Measurement, pos = -0.013388 m 10:18:22 Stage Position Measurement, pos = 5.834099 m 10:18:25 Move:node 0 absolute position = 5.834199 m 10:18:25 Stage Position Measurement, pos = 0.001724 m 10:18:25 Stage Position Measurement, pos = -0.013388 m 10:18:25 Stage Position Measurement, pos = 5.834199 m 10:18:29 Move:node 0 absolute position = 5.834299 m 10:18:29 Stage Position Measurement, pos = 0.001724 m 10:18:29 Stage Position Measurement, pos = -0.013388 m 10:18:29 Stage Position Measurement, pos = 5.834299 m 10:18:32 Move:node 0 absolute position = 5.834399 m 10:18:32 Stage Position Measurement, pos = 0.001724 m 10:18:32 Stage Position Measurement, pos = -0.013388 m 10:18:32 Stage Position Measurement, pos = 5.834399 m 10:18:35 Move:node 0 absolute position = 5.834498 m 10:18:35 Stage Position Measurement, pos = 0.001724 m 10:18:35 Stage Position Measurement, pos = -0.013388 m 10:18:36 Stage Position Measurement, pos = 5.834499 m 10:18:39 Move:node 0 absolute position = 5.834599 m 10:18:39 Stage Position Measurement, pos = 0.001724 m 10:18:39 Stage Position Measurement, pos = -0.013388 m 10:18:39 Stage Position Measurement, pos = 5.834599 m 10:18:42 Move:node 0 absolute position = 5.834698 m 10:18:42 Stage Position Measurement, pos = 0.001724 m 10:18:42 Stage Position Measurement, pos = -0.013388 m 10:18:42 Stage Position Measurement, pos = 5.834699 m 10:18:46 Move:node 0 absolute position = 5.834798 m 10:18:46 Stage Position Measurement, pos = 0.001724 m 10:18:46 Stage Position Measurement, pos = -0.013388 m 10:18:46 Stage Position Measurement, pos = 5.834799 m 10:18:49 Move:node 0 absolute position = 5.834899 m 10:18:49 Stage Position Measurement, pos = 0.001724 m 10:18:49 Stage Position Measurement, pos = -0.013388 m 10:18:49 Stage Position Measurement, pos = 5.834899 m 10:18:53 Move:node 0 absolute position = 5.834999 m 10:18:53 Stage Position Measurement, pos = 0.001724 m 10:18:53 Stage Position Measurement, pos = -0.013388 m 10:18:53 Stage Position Measurement, pos = 5.834999 m 10:18:56 Move:node 0 absolute position = 5.835099 m 10:18:56 Stage Position Measurement, pos = 0.001724 m 10:18:56 Stage Position Measurement, pos = -0.013388 m 10:18:56 Stage Position Measurement, pos = 5.835099 m 10:18:59 Move:node 0 absolute position = 5.835199 m 10:18:59 Stage Position Measurement, pos = 0.001724 m 10:18:59 Stage Position Measurement, pos = -0.013388 m 10:18:59 Stage Position Measurement, pos = 5.835199 m 10:19:03 Move:node 0 absolute position = 5.835299 m 10:19:03 Stage Position Measurement, pos = 0.001724 m 10:19:03 Stage Position Measurement, pos = -0.013388 m 10:19:03 Stage Position Measurement, pos = 5.835299 m 10:19:06 Move:node 0 absolute position = 5.835398 m 10:19:06 Stage Position Measurement, pos = 0.001724 m 10:19:06 Stage Position Measurement, pos = -0.013388 m 10:19:06 Stage Position Measurement, pos = 5.835399 m PolyFit: -110671240.246415 331687691.917009 -331361523.854340 110345072.295993, Error = 0.000000 Max position = 5.83426710:19:10 Move:node 0 absolute position = 5.834267 m 10:19:10 Stage Position Measurement, pos = 0.001724 m 10:19:10 Stage Position Measurement, pos = -0.013388 m 10:19:10 Stage Position Measurement, pos = 5.834267 m 10:19:12 Stage Position Measurement, pos = 0.001724 m 10:19:12 Stage Position Measurement, pos = -0.013388 m 10:19:12 Stage Position Measurement, pos = 5.834267 m 10:19:14 Move:node 1 absolute position = -0.013988 m 10:19:14 Stage Position Measurement, pos = 0.001724 m 10:19:14 Stage Position Measurement, pos = -0.013988 m 10:19:14 Stage Position Measurement, pos = 5.834267 m 10:19:18 Move:node 1 absolute position = -0.013928 m 10:19:18 Stage Position Measurement, pos = 0.001724 m 10:19:18 Stage Position Measurement, pos = -0.013928 m 10:19:18 Stage Position Measurement, pos = 5.834267 m 10:19:21 Move:node 1 absolute position = -0.013868 m 10:19:21 Stage Position Measurement, pos = 0.001724 m 10:19:21 Stage Position Measurement, pos = -0.013868 m 10:19:21 Stage Position Measurement, pos = 5.834267 m 10:19:25 Move:node 1 absolute position = -0.013808 m 10:19:25 Stage Position Measurement, pos = 0.001724 m 10:19:25 Stage Position Measurement, pos = -0.013808 m 10:19:25 Stage Position Measurement, pos = 5.834267 m 10:19:28 Move:node 1 absolute position = -0.013748 m 10:19:28 Stage Position Measurement, pos = 0.001724 m 10:19:28 Stage Position Measurement, pos = -0.013748 m 10:19:28 Stage Position Measurement, pos = 5.834267 m 10:19:31 Move:node 1 absolute position = -0.013688 m 10:19:31 Stage Position Measurement, pos = 0.001724 m 10:19:31 Stage Position Measurement, pos = -0.013688 m 10:19:31 Stage Position Measurement, pos = 5.834267 m 10:19:35 Move:node 1 absolute position = -0.013628 m 10:19:35 Stage Position Measurement, pos = 0.001724 m 10:19:35 Stage Position Measurement, pos = -0.013628 m 10:19:35 Stage Position Measurement, pos = 5.834267 m 10:19:38 Move:node 1 absolute position = -0.013568 m 10:19:38 Stage Position Measurement, pos = 0.001724 m 10:19:38 Stage Position Measurement, pos = -0.013568 m 10:19:38 Stage Position Measurement, pos = 5.834267 m 10:19:42 Move:node 1 absolute position = -0.013508 m 10:19:42 Stage Position Measurement, pos = 0.001724 m 10:19:42 Stage Position Measurement, pos = -0.013508 m 10:19:42 Stage Position Measurement, pos = 5.834267 m 10:19:45 Move:node 1 absolute position = -0.013448 m 10:19:45 Stage Position Measurement, pos = 0.001724 m 10:19:45 Stage Position Measurement, pos = -0.013448 m 10:19:45 Stage Position Measurement, pos = 5.834267 m 10:19:48 Move:node 1 absolute position = -0.013388 m 10:19:48 Stage Position Measurement, pos = 0.001724 m 10:19:48 Stage Position Measurement, pos = -0.013388 m 10:19:48 Stage Position Measurement, pos = 5.834267 m 10:19:52 Move:node 1 absolute position = -0.013328 m 10:19:52 Stage Position Measurement, pos = 0.001724 m 10:19:52 Stage Position Measurement, pos = -0.013328 m 10:19:52 Stage Position Measurement, pos = 5.834267 m 10:19:55 Move:node 1 absolute position = -0.013268 m 10:19:55 Stage Position Measurement, pos = 0.001724 m 10:19:55 Stage Position Measurement, pos = -0.013268 m 10:19:55 Stage Position Measurement, pos = 5.834267 m 10:19:59 Move:node 1 absolute position = -0.013208 m 10:19:59 Stage Position Measurement, pos = 0.001724 m 10:19:59 Stage Position Measurement, pos = -0.013208 m 10:19:59 Stage Position Measurement, pos = 5.834267 m 10:20:02 Move:node 1 absolute position = -0.013148 m 10:20:02 Stage Position Measurement, pos = 0.001724 m 10:20:02 Stage Position Measurement, pos = -0.013148 m 10:20:02 Stage Position Measurement, pos = 5.834267 m 10:20:06 Move:node 1 absolute position = -0.013088 m 10:20:06 Stage Position Measurement, pos = 0.001724 m 10:20:06 Stage Position Measurement, pos = -0.013088 m 10:20:06 Stage Position Measurement, pos = 5.834267 m 10:20:09 Move:node 1 absolute position = -0.013028 m 10:20:09 Stage Position Measurement, pos = 0.001724 m 10:20:09 Stage Position Measurement, pos = -0.013028 m 10:20:09 Stage Position Measurement, pos = 5.834267 m 10:20:12 Move:node 1 absolute position = -0.012968 m 10:20:12 Stage Position Measurement, pos = 0.001724 m 10:20:12 Stage Position Measurement, pos = -0.012968 m 10:20:12 Stage Position Measurement, pos = 5.834267 m 10:20:16 Move:node 1 absolute position = -0.012908 m 10:20:16 Stage Position Measurement, pos = 0.001724 m 10:20:16 Stage Position Measurement, pos = -0.012908 m 10:20:16 Stage Position Measurement, pos = 5.834267 m 10:20:19 Move:node 1 absolute position = -0.012848 m 10:20:19 Stage Position Measurement, pos = 0.001724 m 10:20:19 Stage Position Measurement, pos = -0.012848 m 10:20:19 Stage Position Measurement, pos = 5.834267 m PolyFit: -5.424424 13.946760 -11.427011 3.027322, Error = 0.000000 Max position = -0.01336710:20:23 Move:node 1 absolute position = -0.013367 m 10:20:23 Stage Position Measurement, pos = 0.001724 m 10:20:23 Stage Position Measurement, pos = -0.013367 m 10:20:23 Stage Position Measurement, pos = 5.834267 m 10:20:25 Stage Position Measurement, pos = 0.001724 m 10:20:25 Stage Position Measurement, pos = -0.013367 m 10:20:25 Stage Position Measurement, pos = 5.834267 m 10:20:27 Move:node 2 absolute position = 0.000724 m 10:20:27 Stage Position Measurement, pos = 0.000724 m 10:20:27 Stage Position Measurement, pos = -0.013367 m 10:20:27 Stage Position Measurement, pos = 5.834267 m 10:20:31 Move:node 2 absolute position = 0.000744 m 10:20:31 Stage Position Measurement, pos = 0.000744 m 10:20:31 Stage Position Measurement, pos = -0.013367 m 10:20:31 Stage Position Measurement, pos = 5.834267 m 10:20:34 Move:node 2 absolute position = 0.000764 m 10:20:34 Stage Position Measurement, pos = 0.000764 m 10:20:34 Stage Position Measurement, pos = -0.013367 m 10:20:34 Stage Position Measurement, pos = 5.834267 m 10:20:38 Move:node 2 absolute position = 0.000784 m 10:20:38 Stage Position Measurement, pos = 0.000784 m 10:20:38 Stage Position Measurement, pos = -0.013367 m 10:20:38 Stage Position Measurement, pos = 5.834267 m 10:20:41 Move:node 2 absolute position = 0.000804 m 10:20:41 Stage Position Measurement, pos = 0.000804 m 10:20:41 Stage Position Measurement, pos = -0.013367 m 10:20:41 Stage Position Measurement, pos = 5.834267 m 10:20:44 Move:node 2 absolute position = 0.000824 m 10:20:44 Stage Position Measurement, pos = 0.000824 m 10:20:44 Stage Position Measurement, pos = -0.013367 m 10:20:44 Stage Position Measurement, pos = 5.834267 m 10:20:48 Move:node 2 absolute position = 0.000844 m 10:20:48 Stage Position Measurement, pos = 0.000844 m 10:20:48 Stage Position Measurement, pos = -0.013367 m 10:20:48 Stage Position Measurement, pos = 5.834267 m 10:20:51 Move:node 2 absolute position = 0.000864 m 10:20:51 Stage Position Measurement, pos = 0.000864 m 10:20:51 Stage Position Measurement, pos = -0.013367 m 10:20:51 Stage Position Measurement, pos = 5.834267 m 10:20:55 Move:node 2 absolute position = 0.000884 m 10:20:55 Stage Position Measurement, pos = 0.000884 m 10:20:55 Stage Position Measurement, pos = -0.013367 m 10:20:55 Stage Position Measurement, pos = 5.834267 m 10:20:58 Move:node 2 absolute position = 0.000904 m 10:20:58 Stage Position Measurement, pos = 0.000904 m 10:20:58 Stage Position Measurement, pos = -0.013367 m 10:20:58 Stage Position Measurement, pos = 5.834267 m 10:21:01 Move:node 2 absolute position = 0.000924 m 10:21:01 Stage Position Measurement, pos = 0.000924 m 10:21:01 Stage Position Measurement, pos = -0.013367 m 10:21:01 Stage Position Measurement, pos = 5.834267 m 10:21:05 Move:node 2 absolute position = 0.000944 m 10:21:05 Stage Position Measurement, pos = 0.000944 m 10:21:05 Stage Position Measurement, pos = -0.013367 m 10:21:05 Stage Position Measurement, pos = 5.834267 m 10:21:08 Move:node 2 absolute position = 0.000964 m 10:21:08 Stage Position Measurement, pos = 0.000964 m 10:21:08 Stage Position Measurement, pos = -0.013367 m 10:21:08 Stage Position Measurement, pos = 5.834267 m 10:21:12 Move:node 2 absolute position = 0.000984 m 10:21:12 Stage Position Measurement, pos = 0.000984 m 10:21:12 Stage Position Measurement, pos = -0.013367 m 10:21:12 Stage Position Measurement, pos = 5.834267 m 10:21:15 Move:node 2 absolute position = 0.001004 m 10:21:15 Stage Position Measurement, pos = 0.001004 m 10:21:15 Stage Position Measurement, pos = -0.013367 m 10:21:15 Stage Position Measurement, pos = 5.834267 m 10:21:18 Move:node 2 absolute position = 0.001024 m 10:21:18 Stage Position Measurement, pos = 0.001024 m 10:21:19 Stage Position Measurement, pos = -0.013367 m 10:21:19 Stage Position Measurement, pos = 5.834267 m 10:21:22 Move:node 2 absolute position = 0.001044 m 10:21:22 Stage Position Measurement, pos = 0.001044 m 10:21:22 Stage Position Measurement, pos = -0.013367 m 10:21:22 Stage Position Measurement, pos = 5.834267 m 10:21:25 Move:node 2 absolute position = 0.001064 m 10:21:25 Stage Position Measurement, pos = 0.001064 m 10:21:25 Stage Position Measurement, pos = -0.013367 m 10:21:25 Stage Position Measurement, pos = 5.834267 m 10:21:29 Move:node 2 absolute position = 0.001084 m 10:21:29 Stage Position Measurement, pos = 0.001084 m 10:21:29 Stage Position Measurement, pos = -0.013367 m 10:21:29 Stage Position Measurement, pos = 5.834267 m 10:21:32 Move:node 2 absolute position = 0.001104 m 10:21:32 Stage Position Measurement, pos = 0.001104 m 10:21:32 Stage Position Measurement, pos = -0.013367 m 10:21:32 Stage Position Measurement, pos = 5.834267 m Linear fit Error = 0.00000010:21:36 Move:node 2 absolute position = 0.000920 m 10:21:36 Stage Position Measurement, pos = 0.000920 m 10:21:36 Stage Position Measurement, pos = -0.013367 m 10:21:36 Stage Position Measurement, pos = 5.834267 m 10:21:38 Stage Position Measurement, pos = 0.000920 m 10:21:38 Stage Position Measurement, pos = -0.013367 m 10:21:38 Stage Position Measurement, pos = 5.834267 m 10:21:45 Move:node 1 absolute position = 0.000000 m 10:21:46 Stage Position Measurement, pos = 0.000000 m 10:21:48 Move:node 2 absolute position = -0.000000 m 10:21:49 Move:node 0 absolute position = 0.000000 m 10:23:44 Move:node 1 absolute position = 0.000000 m 10:23:45 Stage Position Measurement, pos = 0.000000 m 10:23:47 Move:node 2 absolute position = -0.000000 m 10:23:49 Move:node 0 absolute position = 0.000000 m