Hans Imfeld
2008-09-09T17:18:37Z
2008-09-09T17:04:32Z
11.9999
12975
14940
720
240
False
False
| AEG Measurement of Upstream Vacuum Chambers |
Sep. 2008 |
| Used to determine mask position |
M. Perry |
| B. Rutledge |
| Z is along beam at the device center |
H. Imfeld |
| Y is up |
| X is right handed to Z and Y at the device center |
| ID (SPEAR) |
ID (AEG) |
dZ in |
dX in |
dY in |
dZ mm |
dX mm |
dY mm |
| BM2016 |
SC04CM11 |
-1.2899999999999999E-3 |
-7.3499999999999998E-3 |
-9.2499999999999805E-3 |
-3.2765999999999997E-2 |
-0.18668999999999999 |
-0.23494999999999949 |
|
|
| SC04CM12 |
1.4829999999999999E-2 |
-3.2499999999999999E-3 |
-1.248E-2 |
0.37668199999999996 |
-8.2549999999999998E-2 |
-0.316992 |
|
|
| BM2011 |
SC06CM11 |
5.4690000000000003E-2 |
-8.5900000000000004E-3 |
-1.3880000000000003E-2 |
1.3891260000000001 |
-0.21818599999999999 |
-0.35255200000000009 |
|
|
| SC06CM12 |
6.1940000000000002E-2 |
-6.0999999999999997E-4 |
-1.2869999999999999E-2 |
1.5732759999999999 |
-1.5493999999999999E-2 |
-0.32689799999999997 |
|
|
| BM2012 |
SC07CM11 |
5.1200000000000002E-2 |
-1.9179999999999999E-2 |
-4.610000000000003E-3 |
1.3004800000000001 |
-0.48717199999999994 |
-0.11709400000000007 |
|
|
| SC07CM12 |
5.092E-2 |
-1.512E-2 |
-4.6999999999999999E-4 |
1.2933679999999999 |
-0.38404799999999994 |
-1.1937999999999999E-2 |
|
|
| BM2MCA-1 |
SC10CM11 |
4.2000000000000003E-2 |
-4.0000000000000002E-4 |
-6.3600000000000002E-3 |
1.0668 |
-1.0160000000000001E-2 |
-0.16154399999999999 |
|
|
| SC10CM12 |
4.8079999999999998E-2 |
4.7299999999999998E-3 |
4.15E-3 |
1.2212319999999999 |
0.12014199999999998 |
0.10540999999999999 |
|
|
| BM2017 |
SC12CM11 |
5.3740000000000003E-2 |
1.99E-3 |
-2.3680000000000034E-2 |
1.3649960000000001 |
5.0546000000000001E-2 |
-0.60147200000000078 |
|
|
| SC12CM12 |
5.8459999999999998E-2 |
3.7299999999999998E-3 |
-3.0929999999999999E-2 |
1.4848839999999999 |
9.4741999999999993E-2 |
-0.78562199999999993 |
|
|
| BM2014 |
SC13CM11 |
6.4799999999999996E-3 |
-5.4999999999999997E-3 |
-4.8000000000000265E-3 |
0.16459199999999999 |
-0.13969999999999999 |
-0.12192000000000067 |
|
|
| SC13CM12 |
7.3999999999999999E-4 |
-1.085E-2 |
-4.3999999999999595E-3 |
1.8796E-2 |
-0.27559 |
-0.11175999999999897 |
|
|
| BM2010 |
SC16CM11 |
9.2660000000000006E-2 |
-2.103E-2 |
5.3099999999999259E-3 |
2.353564 |
-0.53416200000000003 |
0.13487399999999811 |
|
|
| SC16CM12 |
7.9159999999999994E-2 |
-1.839E-2 |
6.9999999999999994E-5 |
2.0106639999999998 |
-0.46710599999999997 |
1.7779999999999998E-3 |
|
|
| BM2003 |
SC17CM11 |
2.47E-3 |
-1.9269999999999999E-2 |
4.8399999999999554E-3 |
6.2738000000000002E-2 |
-0.48945799999999995 |
0.12293599999999887 |
|
|
| SC17CM12 |
-9.7999999999999997E-3 |
-1.7829999999999999E-2 |
8.9599999999999992E-3 |
-0.24891999999999997 |
-0.45288199999999995 |
0.22758399999999998 |
|
|
| BM2MCB-2 |
SC18CM11 |
2.4819999999999998E-2 |
-1.9810000000000001E-2 |
-3.1199999999999999E-3 |
0.63042799999999988 |
-0.50317400000000001 |
-7.9247999999999999E-2 |
|
|
| SC18CM12 |
3.2939999999999997E-2 |
-1.7340000000000001E-2 |
1.7000000000000001E-4 |
0.83667599999999986 |
-0.44043599999999999 |
4.3179999999999998E-3 |
|
|
False
False