09-30-2022 HE SXU 000 +25um (-50um gap change); By field, repeat Gap I1By 7.20 61.004000 7.50 63.284600 8.00 58.186800 9.00 47.288200 10.00 37.585800 12.00 29.580600 15.00 21.946400 20.00 14.852600 25.00 12.130800 33.00 5.676000 50.00 5.630200 75.00 2.071000 100.00 -1.162600