09-30-2022 HE SXU 000 +25um (-50um gap change); By field Gap I1By 7.20 63.031000 7.50 66.602400 8.00 59.125000 9.00 54.256400 10.00 43.461800 12.00 37.018400 15.00 20.863200 20.00 9.234200 25.00 14.548200 33.00 9.920200 50.00 9.157000 75.00 5.435200 100.00 1.303200